DE59302602D1 - Process for electrolytic etching - Google Patents

Process for electrolytic etching

Info

Publication number
DE59302602D1
DE59302602D1 DE59302602T DE59302602T DE59302602D1 DE 59302602 D1 DE59302602 D1 DE 59302602D1 DE 59302602 T DE59302602 T DE 59302602T DE 59302602 T DE59302602 T DE 59302602T DE 59302602 D1 DE59302602 D1 DE 59302602D1
Authority
DE
Germany
Prior art keywords
electrolytic etching
contacted
substrate
areas
etched
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59302602T
Other languages
German (de)
Inventor
Walter Dr Stark
Richard Dr Rapp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Karlsruhe GmbH
Original Assignee
Forschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Karlsruhe GmbH filed Critical Forschungszentrum Karlsruhe GmbH
Application granted granted Critical
Publication of DE59302602D1 publication Critical patent/DE59302602D1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)

Abstract

Precision etching small areas of a substrate in which the cathodically connected substrate is contacted with an electrolytic soln. and the areas to be etched are contacted by a micro carbon fibre electrode connected as the anode.
DE59302602T 1992-11-25 1993-10-19 Process for electrolytic etching Expired - Fee Related DE59302602D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4239538A DE4239538C1 (en) 1992-11-25 1992-11-25 Precision etching small areas of substrate - in which cathodically connected substrate is contacted with electrolytic soln. and areas to be etched are contacted by micro carbon@ fibre electrode

Publications (1)

Publication Number Publication Date
DE59302602D1 true DE59302602D1 (en) 1996-06-20

Family

ID=6473570

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4239538A Expired - Fee Related DE4239538C1 (en) 1992-11-25 1992-11-25 Precision etching small areas of substrate - in which cathodically connected substrate is contacted with electrolytic soln. and areas to be etched are contacted by micro carbon@ fibre electrode
DE59302602T Expired - Fee Related DE59302602D1 (en) 1992-11-25 1993-10-19 Process for electrolytic etching

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE4239538A Expired - Fee Related DE4239538C1 (en) 1992-11-25 1992-11-25 Precision etching small areas of substrate - in which cathodically connected substrate is contacted with electrolytic soln. and areas to be etched are contacted by micro carbon@ fibre electrode

Country Status (3)

Country Link
EP (1) EP0603485B1 (en)
AT (1) ATE138119T1 (en)
DE (2) DE4239538C1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE505231C2 (en) * 1995-09-26 1997-07-21 Foersvarets Forskningsanstalt Electrode
EP0889680A3 (en) 1997-07-01 2000-07-05 Deutsche Thomson-Brandt Gmbh Method of removing and/or applying conductive material
DE19749832A1 (en) * 1997-07-01 1999-01-07 Thomson Brandt Gmbh Conductive material application to and-or removal from circuit board

Also Published As

Publication number Publication date
DE4239538C1 (en) 1993-11-11
EP0603485B1 (en) 1996-05-15
EP0603485A1 (en) 1994-06-29
ATE138119T1 (en) 1996-06-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee