DE59008540D1 - Messkopf für ein Quadrupolmassenspektrometer. - Google Patents

Messkopf für ein Quadrupolmassenspektrometer.

Info

Publication number
DE59008540D1
DE59008540D1 DE59008540T DE59008540T DE59008540D1 DE 59008540 D1 DE59008540 D1 DE 59008540D1 DE 59008540 T DE59008540 T DE 59008540T DE 59008540 T DE59008540 T DE 59008540T DE 59008540 D1 DE59008540 D1 DE 59008540D1
Authority
DE
Germany
Prior art keywords
measuring head
mass spectrometer
quadrupole mass
quadrupole
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59008540T
Other languages
English (en)
Inventor
Ulrich Dr Doebler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Deutschland Holding GmbH
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Application granted granted Critical
Publication of DE59008540D1 publication Critical patent/DE59008540D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
DE59008540T 1990-06-06 1990-06-06 Messkopf für ein Quadrupolmassenspektrometer. Expired - Lifetime DE59008540D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP90110681A EP0460255B1 (de) 1990-06-06 1990-06-06 Messkopf für ein Quadrupolmassenspektrometer

Publications (1)

Publication Number Publication Date
DE59008540D1 true DE59008540D1 (de) 1995-03-30

Family

ID=8204057

Family Applications (1)

Application Number Title Priority Date Filing Date
DE59008540T Expired - Lifetime DE59008540D1 (de) 1990-06-06 1990-06-06 Messkopf für ein Quadrupolmassenspektrometer.

Country Status (5)

Country Link
US (1) US5132536A (de)
EP (1) EP0460255B1 (de)
JP (1) JP3179130B2 (de)
AT (1) ATE118925T1 (de)
DE (1) DE59008540D1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5401962A (en) * 1993-06-14 1995-03-28 Ferran Scientific Residual gas sensor utilizing a miniature quadrupole array

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3075076A (en) * 1958-12-12 1963-01-22 Siemens Ag Gas-analyzing method and apparatus
US3105899A (en) * 1960-03-25 1963-10-01 Siemens Ag Electric mass filter
US3350559A (en) * 1965-01-26 1967-10-31 Gen Electric Monopole mass spectrometer having one ceramic electrode coated with metal to within a short distance of each end
US3457404A (en) * 1965-09-13 1969-07-22 Electronic Associates Quadrupole mass analyzer
US3560734A (en) * 1968-06-26 1971-02-02 Edward F Barnett Quadrupole mass filter with fringing-field penetrating structure
GB1379515A (en) * 1970-10-30 1975-01-02 Ball G W Mass spectrometers
US3937954A (en) * 1973-03-30 1976-02-10 Extranuclear Laboratories, Inc. Methods and apparatus for spatial separation of AC and DC electric fields, with application to fringe fields in quadrupole mass filters
GB2138201B (en) * 1983-03-28 1986-07-16 Prutec Ltd Mass spectrometer
CN85102774B (zh) * 1985-04-01 1987-11-04 复旦大学 利用封闭边界产生静电四极场的结构
US4885500A (en) * 1986-11-19 1989-12-05 Hewlett-Packard Company Quartz quadrupole for mass filter

Also Published As

Publication number Publication date
EP0460255A1 (de) 1991-12-11
JP3179130B2 (ja) 2001-06-25
EP0460255B1 (de) 1995-02-22
JPH04229544A (ja) 1992-08-19
US5132536A (en) 1992-07-21
ATE118925T1 (de) 1995-03-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG, 63450

8327 Change in the person/name/address of the patent owner

Owner name: UNAXIS DEUTSCHLAND HOLDING GMBH, 63450 HANAU, DE