DE58908569D1 - Lagerring für Magnetlager. - Google Patents

Lagerring für Magnetlager.

Info

Publication number
DE58908569D1
DE58908569D1 DE58908569T DE58908569T DE58908569D1 DE 58908569 D1 DE58908569 D1 DE 58908569D1 DE 58908569 T DE58908569 T DE 58908569T DE 58908569 T DE58908569 T DE 58908569T DE 58908569 D1 DE58908569 D1 DE 58908569D1
Authority
DE
Germany
Prior art keywords
bearing ring
magnetic bearings
bearings
magnetic
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE58908569T
Other languages
English (en)
Inventor
Hans-Peter Kabelitz
Harald Laessig
Johann K Fremerey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
Original Assignee
Leybold AG
Forschungszentrum Juelich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=8201800&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE58908569(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Leybold AG, Forschungszentrum Juelich GmbH filed Critical Leybold AG
Application granted granted Critical
Publication of DE58908569D1 publication Critical patent/DE58908569D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0459—Details of the magnetic circuit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/047—Details of housings; Mounting of active magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0474—Active magnetic bearings for rotary movement
    • F16C32/0476—Active magnetic bearings for rotary movement with active support of one degree of freedom, e.g. axial magnetic bearings
    • F16C32/0478—Active magnetic bearings for rotary movement with active support of one degree of freedom, e.g. axial magnetic bearings with permanent magnets to support radial load
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2300/00—Application independent of particular apparatuses
    • F16C2300/40—Application independent of particular apparatuses related to environment, i.e. operating conditions
    • F16C2300/42—Application independent of particular apparatuses related to environment, i.e. operating conditions corrosive, i.e. with aggressive media or harsh conditions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps
DE58908569T 1989-08-25 1989-09-22 Lagerring für Magnetlager. Expired - Lifetime DE58908569D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP89115660 1989-08-25

Publications (1)

Publication Number Publication Date
DE58908569D1 true DE58908569D1 (de) 1994-12-01

Family

ID=8201800

Family Applications (1)

Application Number Title Priority Date Filing Date
DE58908569T Expired - Lifetime DE58908569D1 (de) 1989-08-25 1989-09-22 Lagerring für Magnetlager.

Country Status (2)

Country Link
EP (1) EP0413851B1 (de)
DE (1) DE58908569D1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3930170B2 (ja) 1998-02-18 2007-06-13 株式会社荏原製作所 循環ファン装置
DE10022061A1 (de) * 2000-05-06 2001-11-08 Leybold Vakuum Gmbh Magnetlagerung mit Dämpfung
DE10124193A1 (de) 2000-09-26 2002-04-11 Siemens Ag Magnetlager
DE102005028209B4 (de) 2005-06-17 2007-04-12 Siemens Ag Magnetische Lagereinrichtung einer Rotorwelle gegen einen Stator mit ineinander greifenden Rotorscheibenelementen und Statorscheibenelementen
DE102006053041A1 (de) * 2006-11-10 2008-05-15 Schaeffler Kg Lagerungsanordnung, insbesondere für eine Werkzeugmaschine
DE102012201252A1 (de) * 2012-01-30 2013-08-01 Siemens Aktiengesellschaft Längslagerscheibe für einen Strömungsmaschinenrotor
DE102012219982A1 (de) * 2012-10-31 2014-04-30 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE202013009660U1 (de) * 2013-10-31 2015-02-03 Oerlikon Leybold Vacuum Gmbh Lager-Halteelement für ein Lagerelement einer Rotorwelle einer Vakuumpumpe sowie Vakuumpumpe
EP2886890B1 (de) * 2013-12-18 2019-06-26 Skf Magnetic Mechatronics Schubscheibe, Magnetlager und Vorrichtung
DE102014105581A1 (de) * 2014-04-17 2015-11-05 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3088746B1 (de) * 2015-04-30 2020-03-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102015216986A1 (de) * 2015-09-04 2017-03-09 Robert Bosch Gmbh Vorrichtung zum Speichern von Energie als Rotationsenergie, System und Verfahren zum Bereitstellen von elektrischer Energie
US20220216767A1 (en) * 2019-05-24 2022-07-07 Shimadzu Corporation Vacuum Pump and Magnetic-Bearing-Integrated Motor
GB2619515A (en) * 2022-06-07 2023-12-13 Edwards Ltd Magnetic bearing hub and vacuum pump

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2163256A1 (de) * 1971-12-20 1973-07-26 Maschf Augsburg Nuernberg Ag Stroemungsmaschine, insbesondere turbopumpe, oder durchstroemmengemesseinrichtung fuer ein aggressives, radioaktives oder reinzuhaltendes stroemungsmittel
FR2528923A1 (fr) * 1982-06-17 1983-12-23 Europ Propulsion Dispositif de suspension magnetique d'un rotor place dans une enceinte etanche
DE3844563A1 (de) * 1988-03-12 1989-11-23 Kernforschungsanlage Juelich Magnetische lagerung mit permanentmagneten zur aufnahme der radialen lagerkraefte

Also Published As

Publication number Publication date
EP0413851A1 (de) 1991-02-27
EP0413851B1 (de) 1994-10-26

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8327 Change in the person/name/address of the patent owner

Owner name: FORSCHUNGSZENTRUM JUELICH GMBH, 52428 JUELICH, DE

8365 Fully valid after opposition proceedings
8327 Change in the person/name/address of the patent owner

Owner name: FORSCHUNGSZENTRUM JUELICH GMBH, 52428 JUELICH, DE