DE50204300D1 - MICRO-ELECTROMECHANICAL SYSTEM AND METHOD FOR THE PRODUCTION THEREOF - Google Patents

MICRO-ELECTROMECHANICAL SYSTEM AND METHOD FOR THE PRODUCTION THEREOF

Info

Publication number
DE50204300D1
DE50204300D1 DE50204300T DE50204300T DE50204300D1 DE 50204300 D1 DE50204300 D1 DE 50204300D1 DE 50204300 T DE50204300 T DE 50204300T DE 50204300 T DE50204300 T DE 50204300T DE 50204300 D1 DE50204300 D1 DE 50204300D1
Authority
DE
Germany
Prior art keywords
micro
production
electromechanical system
electromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE50204300T
Other languages
German (de)
Inventor
Ralf Struempler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ABB Research Ltd Switzerland
Original Assignee
ABB Research Ltd Switzerland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US2002/001662 external-priority patent/WO2002058089A1/en
Priority claimed from EP02405334A external-priority patent/EP1357571A1/en
Application filed by ABB Research Ltd Switzerland filed Critical ABB Research Ltd Switzerland
Application granted granted Critical
Publication of DE50204300D1 publication Critical patent/DE50204300D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/50—Means for increasing contact pressure, preventing vibration of contacts, holding contacts together after engagement, or biasing contacts to the open position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0078—Switches making use of microelectromechanical systems [MEMS] with parallel movement of the movable contact relative to the substrate
DE50204300T 2002-01-18 2002-12-23 MICRO-ELECTROMECHANICAL SYSTEM AND METHOD FOR THE PRODUCTION THEREOF Expired - Lifetime DE50204300D1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
PCT/US2002/001662 WO2002058089A1 (en) 2001-01-19 2002-01-18 Bistable actuation techniques, mechanisms, and applications
EP02405334A EP1357571A1 (en) 2002-04-24 2002-04-24 Microelectromechanical system and its method of manufacture
PCT/CH2002/000722 WO2003060940A1 (en) 2002-01-18 2002-12-23 Micro-electromechanical system and method for production thereof

Publications (1)

Publication Number Publication Date
DE50204300D1 true DE50204300D1 (en) 2005-10-20

Family

ID=26077627

Family Applications (1)

Application Number Title Priority Date Filing Date
DE50204300T Expired - Lifetime DE50204300D1 (en) 2002-01-18 2002-12-23 MICRO-ELECTROMECHANICAL SYSTEM AND METHOD FOR THE PRODUCTION THEREOF

Country Status (1)

Country Link
DE (1) DE50204300D1 (en)

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition