DE50006488D1 - Qualitatsüberwachung bei einer fertigung - Google Patents

Qualitatsüberwachung bei einer fertigung

Info

Publication number
DE50006488D1
DE50006488D1 DE50006488T DE50006488T DE50006488D1 DE 50006488 D1 DE50006488 D1 DE 50006488D1 DE 50006488 T DE50006488 T DE 50006488T DE 50006488 T DE50006488 T DE 50006488T DE 50006488 D1 DE50006488 D1 DE 50006488D1
Authority
DE
Germany
Prior art keywords
manufacture
quality monitoring
monitoring
quality
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE50006488T
Other languages
English (en)
Inventor
Richard Oechsner
Thomas Tschaftary
Piotr Strzyzewski
Lothar Pfitzner
Claus Schneider
Peter Hennig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
X Fab Semiconductor Foundries GmbH
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
X Fab Semiconductor Foundries GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV, X Fab Semiconductor Foundries GmbH filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority to DE50006488T priority Critical patent/DE50006488D1/de
Priority claimed from PCT/DE2000/000144 external-priority patent/WO2000042480A1/de
Application granted granted Critical
Publication of DE50006488D1 publication Critical patent/DE50006488D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G07—CHECKING-DEVICES
    • G07C—TIME OR ATTENDANCE REGISTERS; REGISTERING OR INDICATING THE WORKING OF MACHINES; GENERATING RANDOM NUMBERS; VOTING OR LOTTERY APPARATUS; ARRANGEMENTS, SYSTEMS OR APPARATUS FOR CHECKING NOT PROVIDED FOR ELSEWHERE
    • G07C3/00—Registering or indicating the condition or the working of machines or other apparatus, other than vehicles
    • G07C3/14—Quality control systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Factory Administration (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
DE50006488T 1999-01-15 2000-01-17 Qualitatsüberwachung bei einer fertigung Expired - Lifetime DE50006488D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE50006488T DE50006488D1 (de) 1999-01-15 2000-01-17 Qualitatsüberwachung bei einer fertigung

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE19901410 1999-01-15
DE19901486 1999-01-17
DE19902795A DE19902795A1 (de) 1999-01-15 1999-01-25 Qualitätsüberwachung bei einer Fertigung mit breitem Produktspektrum
PCT/DE2000/000144 WO2000042480A1 (de) 1999-01-15 2000-01-17 Qualitatsüberwachung bei einer fertigung
DE50006488T DE50006488D1 (de) 1999-01-15 2000-01-17 Qualitatsüberwachung bei einer fertigung

Publications (1)

Publication Number Publication Date
DE50006488D1 true DE50006488D1 (de) 2004-06-24

Family

ID=26051348

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19902795A Withdrawn DE19902795A1 (de) 1999-01-15 1999-01-25 Qualitätsüberwachung bei einer Fertigung mit breitem Produktspektrum
DE50006488T Expired - Lifetime DE50006488D1 (de) 1999-01-15 2000-01-17 Qualitatsüberwachung bei einer fertigung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19902795A Withdrawn DE19902795A1 (de) 1999-01-15 1999-01-25 Qualitätsüberwachung bei einer Fertigung mit breitem Produktspektrum

Country Status (1)

Country Link
DE (2) DE19902795A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005030586A1 (de) * 2005-06-30 2007-01-11 Advanced Micro Devices, Inc., Sunnyvale Verfahren und System für eine fortschrittliche Prozesssteuerung unter Anwendung der Messunsicherheit als Steuerungseingang
DE102005046972A1 (de) 2005-09-30 2007-04-05 Advanced Micro Devices, Inc., Sunnyvale Verfahren und System für eine fortschrittliche Prozesssteuerung unter Anwendung einer Kombination aus gewichteten relativen Voreinstellungswerten
DE102017111926A1 (de) 2017-05-31 2018-12-06 Infineon Technologies Ag Prozesssteuerschaltung und Verfahren zum Steuern einer Bearbeitungsanordnung
CN110873699A (zh) * 2018-08-30 2020-03-10 广东生益科技股份有限公司 粘结片的在线质量控制方法、装置、系统和存储介质

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5479340A (en) * 1993-09-20 1995-12-26 Sematech, Inc. Real time control of plasma etch utilizing multivariate statistical analysis
GB9404536D0 (en) * 1994-03-09 1994-04-20 Kodak Ltd Process verification in photographic processes
GB2309800B (en) * 1996-02-03 1999-07-28 Kodak Ltd A method of controlling the effect of raw materials on manufacturability

Also Published As

Publication number Publication date
DE19902795A1 (de) 2000-08-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition