DE4411330C2 - Process for the production of polycapillary or monocapillary elements and uses of the elements - Google Patents

Description

The invention relates to a method for producing mono- or polycapillary Elements and systems by heating a bundle of glass tubes which one end of the bundle fastened in a driving device and that the other end is heated and molded in an oven.

The invention is in various fields of science and technology usable and belongs in the field of the glass industry and particularly affects the Glass equipment manufacturing.

The invention is used, for example, in the manufacture of solid fiber optic Elements used to target different distractions Types of radiation, for example as lenses or transfocators, are used. Another one The field of application is X-ray lithography and materials science using different radiation. Furthermore, the invention for the production of three-dimensional structures with dimensions in the micrometer range and for Manufacture of filters for fine cleaning and separation of substances and Manufacture of microchannel plates can be used.

Below is a polycapillary structure (or an article) Multi-channel system understood that has a plurality of openings. It can the product has a complicated surface (e.g. a conical, a parabolic, barrel-shaped, etc.) or similar shapes, wherein the channels can also be of a correspondingly complicated shape.  

Under a polycapillary fiber optic element is a straight polycapillary understood a variety of openings, both the openings and the Polycapillary itself cylindrical, hexagonal, rectangular, triangular, etc. could be.

The production of polycapillary structures takes place according to the fiber optic technology, which, for. B. is described in various books given below.
VB Veinberg, DK Sattarov:
"Volokonnaya Optika" (fiber optics);
NS Kapany:
"Fiber Optics, Principles and Applications".
NY London, Academic Press 1967, 432 PP

The technologies currently used for this in the glass industry are complicated.

According to the procedure described in Mullard Research Laboratories (GB-PS 1 064 072) the structures can be obtained by pulling glass tubes, which then arranged in a bundle with the desired geometry and then for conservation a channel block (a multicapillary), each channel this Block receives its final dimensions. Multicapillaries that after the Second drawing operations are obtained in sections of certain length cut up, which then put together into a bundle and under pressure like this be heated so that the multicapillaries fuse as a result. Such one The process does not allow the production of homogeneous structures. It will a deformation of the channels observed along the boundaries between the multicapillaries are arranged. The deformation is particularly in the Limits clearly defined where the geometry of the packing is disturbed. A such change in shape of the channels occurs when the multicapillaries are under pressure merge.  

US Pat. No. 4,127,398 sets forth general principles for the manufacture of multi-channel tube structures and consists of the following stages:

• - Composition of a variety of tubes and their amalgamation a fixed package with a certain cross section.
• - Heating this package to the temperature of the softening of the tubes with a uniform hexagonal structure.
• - Extending the given structure to a given cross section minimal size, whereby the tubes only fuse to the Contact surfaces are made.
• - Cutting the drawn hexagonal structures into sections of certain Length, filling with gas and melting on both sides.
• - Introducing the above-mentioned structures into a tube.
• - Sintering at their softening temperature without destroying the individual Tube elements.
• - The respective temperature at the melted ends is different.

The temperature zone moves along the selected package (from hot to cold end) while pumping out the gases, eliminating voids become.

The proposed technology is complicated and therefore not reproducible. In addition, defects are observed at the boundaries of melting together, caused by uneven heating of the packet of output tubes are caused, with parts of the block under different conditions melt together, leading to the presence of openings between the Channels leads, for example, to deformation of the border channels of a multi-core Light guide.

In the process for the production of microporous plates (US-PS 4 010 019) relatively long glass tubes placed parallel to each other to form a bundle together. The tubes are pulled lengthwise until the desired diameter of the microchannels is reached. The process consists of at least two stages on condition that in the drawing process the ratio the thickness of the walls to the inner diameter of the tubes kept constant  becomes. The tube bundle is heated to a temperature at one end which does not melt the glass, but is only minimally softened so that it can be can pull under the influence of a great force. The pulling process takes place with a low speed, leaving an area with a smaller cross section receives. After that, the first section near one of its ends except for one warmed to a higher temperature at which the glass softens significantly, after which one pulls again. The pulling is done using a lower pulling force than the first section, causing the Products is prevented. The heated first section is repeated under Exposure to a significantly low force, the size of the opening of the Tube is reduced to the desired size of the microchannels.

However, the specified method is unsuitable for the production of polycapillaries Structures with a complicated volume configuration (cone, axially symmetric Body of revolution with parabolic or other complicated surfaces). The disadvantage This method consists in the isolated execution of the drawing process, the one Control the rate of displacement of the heated glass mass in Directions for the formation of a given volume after a selected law, which is a geometry of the peripheral surfaces of the fixed fiber-optic element guaranteed, not made possible. With the help of this procedure it is also not possible to use channels with micrometer and submicrometer ranges (0.25... 0.1 micrometer), since only the Influence of surface tension forces due to inflation of the channels either the canals are squeezed or destroyed, because the main parameters of structure formation "temperature-pressure-velocity" cannot be coordinated with one another in accordance with this procedure.

In addition, due to the lack of control over the main parameters, the process does not reproduce the structure formation.

The polycapillary fiber optic product can not only in a direct drawing process be made in a temperature field, but it can also be made fiber optic elements, capillaries or polycapillaries are assembled.  

A method for mechanical assembly of X-ray and Neutron lenses and half lenses in this way (U.S. Patent No. 5,192,869). The X-ray and neutron lenses focus on divergent radiation, with their outer shape a barrel reminds. The X-ray half lenses convert divergent radiation into quasi-parallel radiation and its shape is about the top half of a barrel similar.

These lenses consist of a large number of capillaries, which are so layered are embedded that they result in effective radiation transport Ensure multiple reflection of the radiation on the inner walls of the capillaries.

According to this known method, the capillaries or polycapillaries are drawn through a system of nets or plates with openings. Devices that are manufactured using this method have the following disadvantages:
Capillaries with diameters <300 microns cannot be assembled mechanically because they lose the ability to remain stable in the required shape. Because of the inaccuracies in the positioning of the openings in the nets and plates, the lenses and half-lenses have a very extensive focal length in the longitudinal direction (sometimes up to a few cm with a capillary diameter of about 0.4 mm), so that the radiation acceptance and focusing are not effective. The device installed according to this method only guarantees a transmission of the radiation of less than 10%.

In own publications (see, for example, the magazine "Optics of Beams", Moscow IROS 1993, Preprints of the Kurtschanow Institute 1991. , .) and in our own US patent PS 5 192 869 has proposed X-ray capillary optics to solve a series of medical tasks (production of angiographs, tomographs, Mammographs, etc.), microscopy, the manufacture of analyzers (Diffractometer, devices for local X-ray analysis of elements) and X-ray telescopes and to solve the problems of contact and Use projection x-ray lithography, etc.

However, none of these tasks has yet been solved in practice, as one for the Adequate technology was lacking to solve these problems.  

A precision geometry of each is to solve all of these tasks Element of the optical system and also extremely high accuracy required in the manufacture of the entire optical system.

The various network technologies proposed in U.S. Patent No. 5,192,869 do not ensure the uniformity of the curvature of the capillaries and Polycapillaries, which is why the particles are transported through the optical system get lost. The maximum permeability found in the laboratory samples of this Lenses has been reached does not exceed 5 to 7% (see "Optics of Beams", Moscow IROS, 1993). The minimum extension of the focal spot reached an area of 0.4 mm, which is unsatisfactory for most tasks.

On the basis of the present technology according to the invention, a Permeability of about 50% preserved and the size of the focal spot is on a level of 15 microns.

The invention has for its object to provide effective methods for the production of polycapillary and monocapillary elements and structures and devices based on this method, the

• - Manufacture of polycapillary products and elements that
• - Reproducible manufacture of these products and elements,

the manufacture of a stable fiber optic product or element with a variable cross-section along the longitudinal axis (cone or axially symmetric Rotational body with parabolic or other complicated shape of the outer Areas that

• - reducing the diameter of the openings in the structure, the
• - increase productivity
• - Manufacture of structures without inter-channel openings, the
• - Development of new methods of assembling polycapillaries Products from elements, and the
• - Manufacture of three-dimensional structures that are currently manufactured using LIGA technology with an aspect ratio of up to 10 ^-6 and channel sizes of up to 10 ^-5 cm.

This task is accomplished by a method with the features of the generic term solved the features of the characterizing part of claim 1 according to the invention. Advantageous refinements are contained in the subclaims.

Basically important both for the technology and for the solution of the above listed tasks proved the possibility of generating Interference effects by means of capillary optical systems that have an axial symmetry have.

Thanks to this fact, the solution of a number of technological simplifies Tasks and the proposed technology turns out to be perfectly adequate for the tasks set, that is, only now is it within the scope of the invention possible to solve the tasks.

A polycapillary fiber optic product represents a complicated three-dimensional Structure with channels of one micrometer and one dimension Submicrometer range. In recent years, three-dimensional Structures in the micrometer range are manufactured using a special technology that received the name LIGA technology (abbreviation of the German words: Lithography, electroplating, molding). The products of LIGA technology are widely used in microelectronics, operations, medicine and in general of industry and science.

One of the most important elements of this technology is the use of powerful synchrotron beams with an energy of approximately 6 keV and a beam divergence of approximately 10 ^-4 rad, with which a resist is irradiated through a mask.

The use of synchrotron radiation makes the LIGA- Technology - in practice it is limited to a few applications. In addition, the aspect ratio of channel diameter to channel length is still less than 1000.  

The basis of the present invention is the task of Manufacture of mono- or polycapillary products and elements with Channel sizes from a few millimeters to the submicrometer range; can the products and channels in the products have a complicated geometric structure to have. The channels can ensure the possibility of better Transport of the radiation beams and the possibility of controlling the spectra of the different types of radiation with layers of different chemical Elements.

The products and elements can be made of different glasses, thereafter by means of subsequent etching and filling of the cavities with metal or other materials three-dimensional structures with such a high Aspect ratio can be made difficult by modern structures can be reached. There is also the task of developing new methods of Composing polycapillary products from fiber optic elements.

According to the method, the objective is achieved by manufacturing a mono- or polycapillary stable structure or an element with parabolic or other complicated shape of the edges of the drawing process a preformed cylindrical or polygonal part, with one end of the Glass tube bundle hermetically sealed and then at Vacuum generation is rejuvenated.

Furthermore, the heated glass mass was moved up and down in the formation zone of the onion-shaped section depending on the formation of the upper or lower part of the polycapillary solid fiber optic structure or of the element in accordance with the predetermined shape of the edge surface, during the formation of the cylindrical part the taper should not be more than 10-15% of the total area of the cross section of the glass tube bundle before the formation of the cylindrical or polygonal part. The vacuum should be 0.8 - 0.1 kg / cm ² in the temperature interval T _h - T _k , the temperature on the glass surface when leaving the furnace should not exceed 2 T, whereby
T _h - the temperature at which glass brittleness disappears in ° C
T _k - the temperature of the glass fluidity in ° C
T - heat resistance temperature of the glass in ° C.

The polycapillary structure or one or more layers of the same or different elements chemical elements are applied, for which the starting material in the Formation zone of the onion-shaped section moved at a speed becomes the given speed of drawing the glass tube equivalent. At the same time, a diluted or Protective gas atmosphere created, with the application of some layers Deposition of the elements only when the cylindrical or polygonal is formed Partly done. When producing different types of filters, only the Process of previous formation of the cylindrical part by the hermetic Sealing one end of the bundle of glass tubes and the subsequent one Rejuvenation when generating negative pressure, the displacement of the heated glass mass in the formation zone of the onion-shaped part without achieving complicated edges, carried out.

For the production of three-dimensional structures made of different materials consist of metals, their alloys, etc. polycapillary structure made of glasses with different chemical composition which after pulling and filling with different material (e.g. Metal) completely to expose the necessary structure or element be etched away.

One of the variants of the proposed method is the production of planar ones polycapillary structures or elements for which a batch of both levels and also from cylindrical structures by introducing them into the formation zone of the onion-shaped section and then closing the tubes with the polycapillary structures enclosed in it is realized.

Another variant is that of producing a fiber optic Element with the necessary solid shape of the drawing process by guiding the preserving glass tube (capillary, polycapillary, etc.) realized by guide rollers will ensure the necessary shape.  

It is proposed to manufacture a polycapillary structure (product) from a variety of layers with ordered channels and fiber optic Elements that have been assembled using different methods, consist.

One of the methods of making a polycapillary structure is that on grooves are applied to the surface of each layer into which the capillary or the Polycapillary are firmly inserted, after which the layers are placed on top of each other be attached.

Another method is to use mechanical grooves Profiling or using methods of planar technology, such as. B. Irradiation methods, lithography methods, etc. with subsequent etching be generated.

Another variant is that the space between the grooves as a channel used for radiation transport, the grooves on the inner surface every layer.

The following variant is that the capillaries or polycapillaries in one System of hollow channels are introduced, in which the thickness of the partitions between the channels can be constant or over the cross section of the optical system changes. The free end of the capillaries or polycapillaries will evenly compressed and fastened from all sides, the shape of the Capillaries or polycapillaries can be different - cylindrical, hexagonal, conical, square or similar.

This variant comes close to the following version, in which the free end of the Capillaries or polycapillaries with a second system of hollow channels Partition walls is guided, which has a conical structure, so that the Capillary or polycapillary ends are oriented to a focal point.

Another variant is that instead of a capillary or polycapillary a miniature lens is used, for example a polycapillary, which is drawn in this way  was that the cross section of the transport channels in it along its longitudinal axis changes and one end is focused on one focus.

The following variant is that over each capillary, polycapillary and Miniature lens is pulled a certain firm shell, the thickness of which can be constant or can also vary across the cross section of the optical system. The free end of the Capillaries. Polycapillaries or miniature lenses are pressed together evenly or guided by a system of cone-like channels that point to a focal point are oriented. The following procedure comes close to this variant, in which as solid envelope uses a hollow capillary or the separating layer between the Capillaries, polycapillaries or miniature lenses by vapor deposition (sputtering) is produced.

Another variant is that the shape of the first layer of the system by vapor deposition (sputtering) of a corresponding profile onto a wire is produced. Mechanically optical elements are placed on the profile obtained (Capillaries, polycapillaries, etc.) applied or glued into the spaces material is poured between the optical elements and then the creates the profile of the second and subsequent layers in the same way.

The following procedure comes close to this variant, in which the profile of the Layers by wrapping the previous layer with a flat film or a material with a profile thickness is generated.

The optical system can also be composed of flat surfaces, grooves are applied to each flat surface, into which the optical Elements that are focused in this level are embedded. After that all of these surfaces merged, being between the surfaces Partitions of the required thickness and length can be inserted so that all optical elements are oriented to the focal point of the optical system.

In this process, the optical elements are placed on flat surfaces glued, after which using the optical system from these surfaces is composed of partitions of the required thickness and length.  

According to the device of claim 6 is used for targeted distraction different radiation which contains a radiation source and an optical system proposed that a plurality of conical, barrel-shaped, spherical and. like. Contains layers in the form of similar or adequate second-order surfaces and channels for the radiation transport are arranged in each layer, whereby the diameter of the channels along their axis and accordingly theirs Radii of curvature with respect to the axis of symmetry in the longitudinal direction of the Change device over its cross section and the radiation source itself outside or located within the optical system. In each layer there are channels for the Radiation transport arranged, the channel diameter in the longitudinal direction to change. The radius of curvature changes accordingly with respect to the Longitudinal axis of symmetry of the device and the radiation source, d. H. yourself outside or located within the optical system.

The invention is intended to be illustrated below with reference to part of the figures Embodiments are explained in more detail. Show it:

Fig. 1

The representation of the process according to the proposed method by means of a special device with the following reference numbers: 1 glass tube bundle
2 glass tube
3 feed component
4 oven
5 cylinder part
6 fiber optic product
7 exhaust component

Fig. 2

The representation of the manufacturing process of glass fiber optic elements with different surface coverings with the following reference numerals: 1 solution
2 dispensers
3 evaporators
4 vapors
5 oven
6 shutdown element
7 deformed area
8 separation element

Fig. 3

The representation of the manufacturing process of three-dimensional structures using the proposed method with the following reference numerals: 1 assembly
2 feed component
3 oven
4 fiber optic element
5 exhaust component
6 Section through the glass fiber optic element
7 backing layer
8 pad
9 Removal of glass type No. 2 from the sample
10 Filling the element with metal
11 Removal of glass type No. 1
12 Removal of the carrier layer

Fig. 4

The representation of the manufacturing process of a glass fiber optic element of a given shape with the following reference numerals: 1 bundle of glass tubes
2 feed component
3 oven
4 Device for intensive heating
5 exhaust component
6 formation component
7 assembled product

Fig. 5

The representation of the manufacturing process of planar structures with the following reference symbols: 1 glass tube bundle
2 glass tubes
3 feed part
4 oven
5 formation component
6 drainage component

Fig. 6

An illustration of a layer of the optical system with the one on top of the layer applied grooves.

Fig. 7

An illustration of an optical system with interleaved layers.

Fig. 8

A longitudinal section of an optical system, the ends of which face the radiation source are oriented.

Fig. 9

An illustration of the manufacture of an optical system in which one end of the optical elements in a system of hollow channels with partitions is attached, and the other free end evenly from all sides is squeezed.

Fig. 10

The optical system as a full lens.

Fig. 11

The optical system as a miniature lens.  

Fig. 12

An illustration of a flat layer of an optical system with applied Grooves that are focused in this plane.

Fig. 13a

A cross section through the optical system that is geometrically correct arranged right-angled capillaries.

Fig. 13b

The element of a polycapillary structure that is strictly the structure of the large capillaries repeated and oriented in the same way as the blocks from the big ones Capillaries.

Fig. 14

The schematic representation of the contact X-ray lithography with the following reference numerals: 1 source
2 half lenses
3 mask
4 resist

Fig. 15

The schematic representation of the projection lithography (deep X-ray lithography) with the following reference numerals: 1 mask
2 half lenses
3 resist

Fig. 16

A microscope with point source with the following reference numerals: 1 object
2 conical half-lenses
3 detector

Fig. 17

A microscope for a parallel beam with the following reference numerals: 1 object
2 widening half lenses
3 detector

Fig. 18

The schematic representation of the diffractometer with the following reference numerals: 2 half lens
3 crystal monochromator
4 detector

Fig. 19

Illustration of the fluorescence analysis of the elements with the following reference numerals: 1 source
2 sample
3 half lenses
4 detector

Fig. 20

A schematic representation of the element analysis with the following reference numerals: 1 source
2 sample
3 half lenses
4 crystal monochromator
5 detector

Fig. 21

A schematic representation of the three-dimensional element analysis using two crossed lenses with the following reference numerals: 1 source
2, 4 lenses
3 sample
5 detector

Fig. 22

A schematic representation of element analysis using polarized radiation with the following reference numerals: 1 source
2 half lenses
3 target
4 sample
5 detector

Preferred variants of implementing the invention are described below:
The task is also accomplished by your method of manufacturing mono- or polycapillary elements and systems by heating a bundle of glass tubes, in which one end is heated and shaped in an oven, one end of the glass tube bundle being hermetically sealed, under vacuum, shrinkage and then a pulling process is carried out with at least one up and down movement,
with each up and down movement the shrinkage is not more than 10 to 15% of the total cross-sectional area of the bundle of glass tubes based on a previous up and down movement, the negative pressure in the temperature interval T _h - T _k 7.85 × 10 ⁴ to 9.81 10 ³ Pa held,
and the temperature on the surface of the glass when it leaves the oven does not exceed 2 T, wherein
T _h the temperature of the beginning of the glass softening (for example 500-600 ° C) and
T _k the temperature of the glass pour point (for example 600-800 ° C) and
T are the heat resistance of the glass (e.g. 50-200 ° C).

The main features of the proposed technical solution are:

• 1. Apply a preformed cylindrical or polygonal part hermetically sealing one end of the glass tube bundle with subsequent rejuvenation with generation of a negative pressure in the Manufacturing process of a polycapillary solid fiber optic product for transport and for the targeted distraction of X-rays and others Radiations or types of radiation.
• 2. Up and down movement of the heated glass mass in the education zone of the onion-shaped section depending on the formation of the upper and lower part of the polycapillary solid product according to the given shape of the outline area.
• 3. The shrinkage should not exceed 10 to 15% of the total area of the Cross-section of the glass tube bundle before the formation of the cylindrical or polygonal part.
• 4. The vacuum should be 0.8-0.1 kg / cm ² in the temperature interval T _h - T _k .
• 5. The temperature on the glass surface when leaving the oven should be 2 T do not exceed.
• 6. The manufacturing process of the polycapillary solid fiber optic product is continuous and runs in one stage.

The technical nature of the proposed method is explained below using the figures:
In Fig. 1 the scheme of the apparatus for the production of polycapillary solid fiber optic products is shown.

The manufacturing process of solid fiber optic products is realized as follows:
A bundle of glass tubes 1 is inserted into a glass tube 2 which is attached at one end to a feed device 3 . The other end of the glass tube 2 with the glass tube bundle 1 inside (hereinafter referred to as the component) is inserted into the temperature field of an oven 4 . When the component 1 , 2 is heated to the temperature of the glass softening in the furnace 4 , the feed 3 is switched on and at the same time the interior of the component is evacuated. During the downward movement, the cylinder part 5 is formed in this way, which, when it moves downward, is gripped by a discharge component 7 , a pulling conductor device, and is moved at variable speed, which ensure the formation of a solid glass-fiber-optical product 6 . During the drawing process, the direction of movement of the glass mass is selected depending on the formation of the upper or lower part of the fiber-optic product.

The direction of movement of the glass mass is determined by the formation of the upper or the lower part of the element determined by the mutual influence of the Weight and surface tension takes place, which allows the glass mass to be added the formation of the element to produce a along the Longitudinal axis of symmetry of variable cross-section of a fiber optic product to keep in balance.

The proposed method is based on the natural physical Properties of glass (toughness, surface tension, weight) what the Achieving high reproducibility of solid fiber optic products allowed.

The presence of a continuously forming cylindrical or polygonal part allows a practically unlimited reduction in Diameter in the solid polycapillary product, an increase in productivity and the creation of structures with no gaps between the channels below continuous production of fiber optic products.

The achievement of the task set and also the success of the whole Drawing process depends on the taper when forming the cylindrical part from. If the taper is too strong, the polycapillaries or the Glass tube in the component and there is an inflation of the component, which is too its destruction in the oven. If the taper is too small, then stay Gaps exist between the channels, making the product unsuitable  for the intended use and its further processing (cutting or similar).

The conclusion is based on the statements made regarding the rejuvenation allows leaving the specified intervals for the parameters in each Case either to reduce the quality or to destroy the Manufacturing process leads. To manufacture the products according to the proposed You can use glass tubes for the shell of the component with a diameter use between 10 mm and 200 mm. The minimum diameter of the Glass tubes, which are inserted into the envelope, are characterized by the stability of the Design and the requirements for the system to be manufactured determined. It the following concrete example is considered. In a glass tube made of glass type L 80 or NS-1 with a diameter of 30 mm are polycapillary tubes with an outer diameter of 1 mm and a diameter of the openings of 0.05 mm installed. One of the ends of the component obtained is marked with a Compound hermetically sealed and at the feed of the drawing equipment attached, the other end being fed to the furnace. After heating the lower end of the component and the formation of the cylindrical part it is from the Pulling device detected and the fiber optic product with a parabolic contour surface.

The stable fiber-optic elements obtained have an opening diameter between 0.025 and 0.030 mm on the input side and between 0.010 and 0.015 mm on the output side and allow the transport of x-rays one Energy of 30 keV with a transmission coefficient of approximately 50%. The Focal distance is F = 10 cm.

To solve a number of radiation transport tasks, it is advantageous to coat the inner walls of the capillaries or polycapillaries with 1 to 2 layers of different chemical elements or to produce multilayer structures on these walls, it also being possible to coat the capillaries from the outside. The latter process is carried out by feeding a monocapillary tube or a rod or a rod, which consists of a plurality of capillaries, into the formation zone of the onion-shaped section at a speed which corresponds to the speed specified for the drawing process of the glass tube, with the simultaneous generation of negative pressure or Generation of an inert gas atmosphere. One or more layers of the same or more elements are deposited on the inner surface of the polycapillary product (or element). If several layers are applied, the deposit only occurs when the cylindrical or polygonal part is formed. This process is shown schematically in FIG. 2. This process can be used, for example, to produce dosing devices, microscope syringes for chromatography, ampoules for nuclear magnetic resonance devices and multi-channel circuit boards. The proposed technology opens up the possibility of producing a wide variety of filters for the separation of gases and liquids. These filters have the following advantages:

• The diameter of the pores can reach the submicrometer range,
• - The arrangement of the pores has a geometrically balanced and symmetrical structure,
• - the transparency can be regulated and be high,
• - The ratio of pore diameter to channel length can reach 10 ⁶ .

To manufacture filters, only the preforming of the cylindrical part is carried out the hermetic sealing of one end of the glass tube bundle and the subsequent shrinkage under vacuum (evacuation) realized. The Movement of the onion-shaped section takes place without formation of a complicated outline structure.

Three-dimensional structures are currently manufactured in the micrometer range using LIGA technology. This technology requires the use of a super-parallel synchrotron beam to create a straight long channel in the resist that is irradiated through a mask. With the help of this technology, a multitude of three-dimensional structures are produced which are used in microelectronics, medicine, science etc. (various sensors, micromotors, elements of micro-optics, filters and the like). An aspect (ratio of the channel diameter to its length) of approximately 10 ^{3 was} achieved. The use of synchrotron radiation makes this technology extremely expensive, and it is also difficult to increase the aspect ratio.

The invention allows practically all problems to be solved which cannot be solved by LIGA technology, the technology being significantly less expensive and aspect ratios of approximately 10 ^{6 being} achievable. The LIGA technology currently only allows the production of straight ducts, the technology according to the invention also offering the possibility of producing ducts with a modified shape, which significantly increases the number of possible applications.

To carry out the method, polycapillary structures are assembled from glasses with different chemical compositions, but which have the same linear coefficients of thermal expansion. After the drawing process, the glass structures are filled with a metal and then etched to release the required structure or element. A manufacturing process of a three-dimensional microstructure is shown in FIG. 3. The required shape of the structure is obtained from two glasses with different properties, after which the drawing process is carried out to achieve the required geometric parameters and the structure obtained is cut into a plurality of identical layers. The first type of glass is then etched. The structure obtained is filled with a required metal (for example by means of galvanic or other methods). The second type of glass is then etched in a medium that differs from the medium for the etching process of the first type of glass. This gives a three-dimensional structure with a required aspect ratio, FIG. 3.

A polycapillary fiber optic product (e.g. an X-ray or neutron lens) can be composed of one or more elements, e.g. B. from Polycapillaries, capillaries and other structures. It is in a series of Cases beneficial to these elements from the outset the required stable structure to give such. B. a necessary radius of curvature, the necessary length, etc. For example, a lens consists of many layers, each in the capillary or polycapillaries with the required radius of curvature and the required Length can be embedded.

The realization of making an optical fiber element with the necessary stable form is realized by the guide of the glass tubes obtained / glass tubes (capillaries, polycapillaries) by means of pulleys, which ensure the required shape Fig. 4.

The invention can also be used to manufacture various flat systems used as flat polycapillaries and cladding glasses, both on this Basis as well as independent elements for solving various tasks different fields of industry and science especially as planar Troschanov capillary in medicine or as a jacket in medicine, the Biochemistry, chemistry or polycapillary systems in X-ray technology and X-ray technology can serve.

The preparation is both from a flat charge and of a cylindrical batch by inserting polycapillaries in the formation zone of the bulbous portion, followed by compression of the tubes along with the entrapped in it possible polycapillaries Fig. 5.

The device consists of a large number of layers, each layer approximating the shape of a parabolic, spherical, conical, barrel-shaped or similar surface. A large number of channels for radiation transport are embedded in each layer, which are oriented both towards each other and towards the radiation source, so that transmission with the lowest losses is guaranteed. An example of such a layer is shown in FIG. 6 and in the present case is reminiscent of a half or a boat. Grooves are produced on such a surface, into which optical elements, e.g. B. capillaries or polycapillaries are firmly embedded. Then these layers with the embedded optical elements are interlaced and fastened and a complete optical system is obtained. A schematic representation of such an optical system is shown in FIG. 7.

The grooves in each layer are created so that the ends of the grooves "look" at the source (this can be seen in Figure 8, in which a longitudinal section of the optical system is shown). The radiation enters the optical elements from the source and is transported by them, with one, two and multiple reflections.

The grooves can be created in an optical system in various ways become. For example, you can use mechanical profile formation produce.

Another method is to use methods in the Microelectronics are applied, e.g. B. cutting out the grooves with Radiation methods and subsequent etching.

If the surface of the grooves is sufficiently smooth, they can form the transport channels themselves, ie become optical elements. In this case, the grooves run along the inner surface of the above layers and their depth can change along their length. This is illustrated schematically in FIG. 8, where a longitudinal section of an optical system with such grooves is shown.

A successful production of an optical system from optical elements consists in the fact that a special system of hollow channels with corresponding partition walls is produced, into which the optical elements are inserted. The opposite, free end of the optical elements is pressed evenly from all sides so that they are firmly embedded. Fig. 9. The optical elements can have different shapes: cylindrical, square, right-angled, hexagonal, conical and others. In such a device, the profile of the optical element comes close to a parabola. So that the ends of the optical elements "look" exactly at the source, the thickness of the partition walls is calculated beforehand.

With the help of this method, not only a half lens but also a full lens can be produced Fig. 10.

In a number of cases, a miniature half or full lens can be used very effectively as an optical element, FIG. 11. In this case the optical system forms an ensemble which is composed of miniature lenses or half lenses. Such a system is more effective because the radiation capture angle can be very large.

Another variant of such a device is that instead of one Systems of hollow channels with partitions over each channel a solid shell with a Geometry is drawn, its thickness from the best conditions for one Radiation transport is determined by the optical system. Such a shell can be made from hollow glass capillaries, for example, by using a optical element wrapped in any film, material or the like. In a In a number of cases, such a film can also be applied by vapor deposition (sputtering) produce.

Another variant of manufacturing an optical system is that the required shape (barrel-shaped, conical, etc.) of the first layer z. B. is generated by vapor deposition of a corresponding profile on a wire. On the profile obtained is applied (glued) mechanically optical elements, that are oriented to the source. In the spaces between the optical Elements are poured into a fabric, e.g. B. soft glue, and then the Generated profile shape of the second layer, to which optical elements are also applied (or glued on).

The entire optical system is thus produced in layers. The necessary You can profile a layer not only by vapor deposition, but also by Wrap the previous layer with a flat (flat) film or a Create material with a profile.

An embodiment of this variant is the case where the basic "Architectural" material is a flat film or a material with profiled Cross section is used. In this case, optical material will be on this material Applied elements in the required geometry, d. H. with the required Spaces between the optical elements. After that, the whole System wrapped around a wire or rod or a capillary, which is the central part represents the optical system, the result being the new optical system arose.

Another variant of the device is that it is composed of flat surfaces, with different options, e.g. For example, grooves are made in each flat surface, into which optical elements that are focused in this plane are embedded . FIG. 12. These surfaces are then placed one on top of the other in such a way that partition walls of the required thickness and length are inserted between the surfaces. Then the area where the partitions are located is firmly attached. A modification of this device is that the optical elements are simply glued to flat surfaces and then assembled using partitions.

The present invention can be in the fields of medicine. Microelectronics, des scientific and analytical device construction, ecology, industry, the Microscopy, tomography, for information transfer, for targeted Deflection of various radiations (neutrons, X-rays, Heat radiation and others) and for the production of three-dimensional structures in the Micrometer range, etc. Further areas of application should are explained in more detail below.

Interference and microfocus

Under certain conditions, interference effects can occur when monochromatic radiation passes through capillaries, for which it is necessary that the capillary structure has an exact symmetry. For example, the structure consisting of strictly embedded rectangular capillaries ( FIG. 13a) has a symmetry, which is also symmetry 1 . Order is called.

If there are a large number of small capillaries within these capillaries that reproduce the geometrical arrangement of the large capillaries (blocks), there is a symmetry 2 . Order before Fig. 13b. If an optical system consists of such structures, e.g. B. an X-ray half lens, which was drawn from a multitude of such capillaries ( 1st order symmetry) by polycapillaries ( 2nd order symmetry), then an interference image will arise when focusing a monochromatic parallel beam through a half lens, the extension of the central maximum is in the order of the diameter of a capillary (or the diameter of a small channel in the polycapillary structure). Such a system focuses monochromatic radiation very effectively.

In the case of polychromatic radiation, the half lens works like a spectrometer, d. H. it breaks down the radiation according to the wavelengths so that in different Distances from the starting surface focused the corresponding spectral components become.

Effective focusing also occurs for a simple capillary or Polycapillary column if the source is a quasi point radiation source. When drawing such strictly symmetrical lines according to the invention The procedure requires that the capillaries (or the Polycapillaries) are arranged correctly geometrically so that during the Pulling this symmetry over the entire length of the lens or half lens preserved.

microelectronics

The devices according to the invention can be used in microelectronics, for example a contact lens is used in contact X-ray lithography, which converts a divergent radiation into a quasi-parallel radiation, after which the mask and resist are positioned, FIG. 14.

To carry out projection lithography (depth lithography), a mask is placed in the parallel beam and a half lens is arranged behind it, which shows the dimensions of the mask elements reduced to a resist, FIG. 15.

Microscopy and tomography

A number of arrangements can be carried out in microscopy and tomography. In one case, an object is placed in front of the source. Behind the object is a cone-shaped X-ray optical system and behind it a detector Fig. 16.

In a second case, the object is arranged in a parallel beam, after which an enlarged optical system and then a detector are provided, FIG. 17.

Scientific and analytical devices

In the case of a diffractometer, a half-lens is placed in front of the source, then a crystal monochromator and then a detector ( Fig. 18).

If inch columns are used, it is advantageous to use a half lens. Various arrangements can be implemented for elementary analyzes. For example, a half lens or lens may behind the sample to the radiation from the source is incident, are arranged FIG. 19. If very clearly elements are to be separated, is behind the hemilens a crystal monochromator and a detector arranged behind Fig. 20.

An arrangement is also possible in which a lens is arranged in front of the source, which is combined with a second lens that collects the radiation on the sample, FIG. 21.

The use of polarized radiation is also possible, a half lens being arranged in front of the source and an object behind it, the radiation being polarized by reflection of the radiation by 90 ° at the object. The sample is arranged in the polarized beam and the detector is positioned at an angle of 90 ° to the polarization plane, FIG. 22.

With such an arrangement, the background can be greatly reduced and thus the Sensitivity can be increased. In particular, one can be an object Use crystal monochromator. In this case, the Polarization of the beam its monochromatization. Others can Arrangements are built, with lenses, half lenses. Monochromators etc. can be combined.

In a number of cases, it is necessary to reduce object images the dimensions of the object elements. In this case, one Parallel beam an object and behind it a capillary system in which the Reduce the capillary diameter from the lens entrance to its end. Behind the Then there is a detector, a film, an X-ray video etc. with a lens  Such an arrangement can be used to transfer the imaging of X-ray sources Realize space, d. H. make an x-ray telescope.

If the inner surfaces of the capillaries are not designed to be reflective (e.g. by creating a rough layer on their inner surfaces or by another method), they can be used as collimators.

medicine

Any medical diagnosis used in X-rays can the proposed lenses and half lenses can be used effectively. For example, you can put a capillary system in front of the detector that the Scattered radiation from the object suppressed. In the case of a quasi-point source the capillary system has a conical appearance, in the focus of which is the Source is located. In the case of a parallel beam, this is a column of capillaries that is arranged in front of the detector.

To transfer a medical image, one can be placed behind the object Put lens or lens system that the elements of the object of the figure reduce, behind the lenses an ordinary X-ray film or a X-ray video con is positioned.

The analysis shows that in a number of cases there is a reduction in the radiation dose by

developed the relationship between the entrance and exit surface of the lens. The specified Possibility of reducing the radiation dose due to the The presence of a threshold value at which the X-ray film is still exposed or where the X-ray video con starts to work.

To create an image of a human coronary vasculature (Angiography) one can use two quasi-monochromatic rays, the one before and lie behind the absorption line of iodine (about 33 keV), as a contrast medium serves.  

The proposed lenses and half lenses can be in different Combinations can be used for angiography.

An anode can be used as the source, in which two elements with K _α lines occur in the vicinity of 33 keV. There is a system of rotating filters in front of the source, which mutually hide one or the other K _α line. A half-lens is used behind it, which converts the divergent radiation into quasi-parallel radiation. There are two options for the further design of the arrangement. The first is that a column of capillaries is placed behind the half-lens to cut off the hard radiation components that are associated with a braking radiation. The second option is to bend a half lens in the second part so that it cuts off the hard radiation component.

In another arrangement, two half lenses are placed in front of the source, which are the Aim the radiation at two crystal monochromators. Every crystal cuts different lines out of the spectrum. Starting from the crystals a monochromatic radiation is directed onto a patient's heart, behind which has a detector that subtracts the two images from each other, to get an image of the coronary system. A special source can be used powerful pulse source are used, e.g. B. a plasma source.

The proposed optics can also be used for the transmission of medical Images can be used in combination with synchrotron radiation. Very Lenses and half-lenses can advantageously be used in the production of new types use medical tomography. The lenses make it possible Beam to give the necessary shape and dimensions, various To select energy intervals from the radiation emerging from the source and to direct this filtered radiation onto the object. This enables a reduction the radiation dose and the increase in spatial resolution.

The proposed optics is also used in nuclear medicine, in diagnostics Help of isotopes applied. There is an improvement in the spatial resolution possible.  

It is also important to use it in therapy, for example very effectively in Treatment of non-operable tumors of the cerebrum. The X-ray source with lens or half lens on a spherical surface like this moved that the tumor is always in the focus of the beam and the healthy cells receive only a minimal dose.

The use of a neutron lens to treat skin cancer is also effective (Melanomie). The patient receives boron-containing agents that are close to the Concentrate tumor. Because boron absorbs thermal neutrons very effectively, where core particles are emitted, there is a kind of Micro-explosion within the diseased cells and thus to destroy them.

Claims (21)

1. Process for producing mono- or polycapillary elements by heating a bundle of glass tubes,
in which one end of the bundle is fastened in a driving device and the other end is heated and shaped in an oven,
one end of the glass tube bundle being hermetically sealed,
under the influence of negative pressure, a shrinking and then a pulling process with at least one up and down movement is carried out,
with each up and down movement the shrinkage is not more than 10 to 15% of the total cross-sectional area of the glass tube bundle based on a previous up or down movement,
the negative pressure is maintained in the temperature interval T _h - T _k 7.85.10 ⁴ to 9.81.10 ³ Pa, and
the temperature on the surface of the glass when leaving the oven does not exceed 2 T,
in which
T _h the temperature at which glass softening begins,
T _{k is} the temperature of the glass pour point and
T the heat resistance of the glass
are. 2. The method according to claim 1, characterized in that one or more on the inner surface of the channels of the bundle of glass tubes Layers of the same or different material is / are applied, whereby the material in the area of forming onion-shaped sections with a Speed is fed that the predetermined pulling speed of the bundle corresponds, with a protective gas atmosphere inside a glass tube is generated, and the application of multiple layers only during the formation of the cylindrical or polygonal part.   3. The method according to claim 1, characterized in that for the production of various filters the shaping of the cylindrical or polygonal Part by moving the heated glass mass into the zone to form the onion-shaped sections without designing their lateral surfaces. 4. The method according to claim 1, characterized in that for the production of planar polycapillary elements starting materials with flat or cylindrical structure of the zone for forming the onion-shaped Section are fed and then a closure of the tubes and of the enclosed polycapillary structures takes place. 5. The method according to claim 1, characterized in that to produce a fiber optic element with a stable shape Guiding of the monocapillary or polycapillary glass tube to be produced With the help of idlers of the required shape. 6. Use of a by the method according to any one of claims 1 to 5 manufactured element in a device with a radiation source and optical system for the targeted deflection of radiation, in which the optical system a variety of conical, barrel-shaped and spherical Contains layers in the form of similar or adequate second-order surfaces and channels for radiation transport are arranged in each layer, the Diameters along their axis and correspondingly their radii of curvature with respect to the axis of symmetry in the longitudinal direction of the device over its Cross section change and the radiation source is outside the optical system located.   7. Use of a by the method according to any one of claims 1 to 5 manufactured element in a device with a radiation source and optical system for the targeted deflection of radiation, in which the optical system a variety of conical, barrel-shaped and spherical Contains layers in the form of similar or adequate second-order surfaces and channels for radiation transport are arranged in each layer, the Diameters along their axis and correspondingly their radii of curvature with respect to the axis of symmetry in the longitudinal direction of the device over its Cross section change and the radiation source itself within the optical system located. 8. Use according to claim 6 or 7, in which for the construction of an x-ray lithograph a half lens between the Radiation source and a mask that quasi-parallel the divergent radiation Radiation transferred, and a resist is arranged behind the mask. 9. Use according to claim 6 or 7, in which in a device for performing deep X-ray lithography (Project depth x-ray lithography) a mask in a parallel beam and behind it a special half lens is arranged, which optically reduces the mask elements maps onto a resist. 10. Use according to claim 6 or 7, in which to build a microscope between the radiation source and a magnifying half lens an object is arranged, the radiation source in the Focal point of the half lens is arranged.   11. Use according to claim 7, in which to build a microscope in parallel x-rays an enlarging half-lens and behind it is a detector. 12. Use according to claim 6 or 7, in which to build a diffractometer between the radiation source and a Crystal monochromator a half lens is arranged. 13. Use according to claim 6 or 7, in which for X-ray fluorescence analysis between the radiation source and the sample a lens is arranged which is combined with at least one other lens and cooperates such that the lenses have a common focus on the Have sample, wherein the sample is movable in different directions. 14. Use according to claim 6 or 7, in which for fluorescence analysis between the sample that the radiation hits and a detector is arranged a half lens or lens. 15. Use according to claim 6 or 7, in which to use polarized radiation for elemental analysis, the radiation of the Radiation source is directed through a half lens to a target through which the radiation is deflected by 90 ° and directed onto the sample, the of radiation emanating from the sample is analyzed by a detector which is located under is arranged at an angle of 90 ° to the radiation direction target sample.   16. Use according to claim 6 or 7, in which to transfer the mapping of object elements behind the object Half lens, which reduces the image of the object elements and behind the half lens an X-ray film or an X-ray video con to visualize the X-ray imaging is arranged. 17. Use according to claim 6 or 7, in which one or more for imaging X-ray sources in space Half lenses are used, which have parallel radiation on one or more Focus detectors. 18. Use according to claim 6 or 7, in which capillary or polycapillary structures are used to manufacture collimators whose inner surfaces do not reflect radiation. 19. Use according to claim 6 or 7, in which to suppress the scattered radiation that is present in the object, for example medical x-rays are created behind the object a conical Capillary system is arranged, in the focal point of which is the radiation source located. 20. Use according to claim 6 or 7, wherein in a device for transmitting the image of the coronary vascular system of a human a radiation source with two K _∝ lines is used, which are in front and behind the iodine absorption line, with a system of filters in front of the source , which alternately cover one or the other K _∝ line and behind the filters there is an X-ray half lens that converts the divergent radiation into parallel radiation, and behind the half lens is a capillary column that suppresses the hard part of the radiation. 21. Use according to claim 6 or 7, wherein one with thermal neutrons focusing neutron lens is used.