DE4106228A1 - Prodn. of polycrystalline silicon nitride or carbide sinter prods. - using di:carbonyl cpd. to produce complex cpd(s). with sintering agents thereby preventing presence of water which can lead to oxidn. - Google Patents
Prodn. of polycrystalline silicon nitride or carbide sinter prods. - using di:carbonyl cpd. to produce complex cpd(s). with sintering agents thereby preventing presence of water which can lead to oxidn.Info
- Publication number
- DE4106228A1 DE4106228A1 DE19914106228 DE4106228A DE4106228A1 DE 4106228 A1 DE4106228 A1 DE 4106228A1 DE 19914106228 DE19914106228 DE 19914106228 DE 4106228 A DE4106228 A DE 4106228A DE 4106228 A1 DE4106228 A1 DE 4106228A1
- Authority
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- Prior art keywords
- powder
- dicarbonyl
- silicon nitride
- cpd
- powder mixture
- Prior art date
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Links
- 238000005245 sintering Methods 0.000 title claims abstract description 22
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims abstract description 15
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 12
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 9
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims description 3
- 239000003795 chemical substances by application Substances 0.000 title abstract 4
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 title 1
- 239000000843 powder Substances 0.000 claims abstract description 28
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 15
- 238000000227 grinding Methods 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims abstract description 9
- -1 dicarbonyl compound Chemical class 0.000 claims abstract description 7
- 125000004989 dicarbonyl group Chemical group 0.000 claims abstract description 7
- 229910001404 rare earth metal oxide Inorganic materials 0.000 claims abstract description 5
- 238000002156 mixing Methods 0.000 claims abstract 3
- 238000001035 drying Methods 0.000 claims abstract 2
- 239000003960 organic solvent Substances 0.000 claims abstract 2
- 239000000203 mixture Substances 0.000 claims description 22
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000007791 liquid phase Substances 0.000 claims description 4
- 229910044991 metal oxide Inorganic materials 0.000 claims description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 4
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 3
- 238000009835 boiling Methods 0.000 claims description 2
- 239000000725 suspension Substances 0.000 claims description 2
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 claims 2
- 125000005595 acetylacetonate group Chemical group 0.000 claims 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims 1
- 239000000395 magnesium oxide Substances 0.000 claims 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims 1
- 239000003791 organic solvent mixture Substances 0.000 claims 1
- 230000003014 reinforcing effect Effects 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052760 oxygen Inorganic materials 0.000 abstract description 7
- 239000001301 oxygen Substances 0.000 abstract description 7
- 239000000463 material Substances 0.000 abstract description 4
- 239000000919 ceramic Substances 0.000 abstract description 3
- 238000010276 construction Methods 0.000 abstract description 3
- 150000001875 compounds Chemical class 0.000 abstract description 2
- 238000005520 cutting process Methods 0.000 abstract description 2
- 239000011521 glass Substances 0.000 abstract description 2
- 244000025254 Cannabis sativa Species 0.000 abstract 1
- 239000006185 dispersion Substances 0.000 abstract 1
- 229910003465 moissanite Inorganic materials 0.000 abstract 1
- 230000002787 reinforcement Effects 0.000 abstract 1
- 239000002904 solvent Substances 0.000 abstract 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000000465 moulding Methods 0.000 description 6
- 238000009826 distribution Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000012512 characterization method Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910000722 Didymium Inorganic materials 0.000 description 3
- 241000224487 Didymium Species 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 229910052681 coesite Inorganic materials 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 229910001960 metal nitrate Inorganic materials 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000013001 point bending Methods 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 2
- POILWHVDKZOXJZ-ARJAWSKDSA-M (z)-4-oxopent-2-en-2-olate Chemical compound C\C([O-])=C\C(C)=O POILWHVDKZOXJZ-ARJAWSKDSA-M 0.000 description 1
- SHXHPUAKLCCLDV-UHFFFAOYSA-N 1,1,1-trifluoropentane-2,4-dione Chemical compound CC(=O)CC(=O)C(F)(F)F SHXHPUAKLCCLDV-UHFFFAOYSA-N 0.000 description 1
- 208000031872 Body Remains Diseases 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910021431 alpha silicon carbide Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 238000009770 conventional sintering Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000012456 homogeneous solution Substances 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 235000012054 meals Nutrition 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 150000003891 oxalate salts Chemical class 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Products (AREA)
Abstract
Description
Die Erfindung bezieht sich auf das Gebiet der Konstruktionskeramik und betrifft ein Verfahren zur Herstellung von polykristallinen Siliziumnitrid- oder Silizumcarbidsinterkörpern, die z. B. als Schneidwerkstoffe und als keramische Verschleißteile im Armaturen- und Motorenbau zur Anwendung kommen.The invention relates to the field of construction ceramics and relates to a process for the production of polycrystalline Silicon nitride or silicon carbide sintered bodies which, for. B. as cutting materials and as ceramic wear parts in Valve and engine construction are used.
Bei der Herstellung von polykristallinen Siliziumnitrid- oder Siliziumcarbidmaterialien werden für das Sintern zu hochfesten Werkstoffen in der Regel Sinterhilfsmittel zugesetzt. Diese Sinterhilfsmittel sind für Siliziumnitrid meistens Oxide der Elemente Yttrium, der Seltenen Erden, Magnesium, Aluminium, Strontium, Scandium oder Nitride, wie z. B. Aluminiumnitrid. Für Siliziumcarbid werden neben den konventionellen Sinterhilfsmitteln wie Bor, Aluminium, deren Karbide und Kohlenstoff auch Oxide der Elemente Yttrium, Aluminium und der Seltenen Erden eingesetzt (I.-M. Lihrmann et al., Proc. Science of Sintering, 1989, Plenum Press New York, S. 367). Um eine homogene Verteilung dieser Sinterhilfsmittel in dem zu sinternden Siliziumnitridpulver und/oder -gemisch oder Siliziumcarbidpulver und/oder -gemisch zu erreichen, werden verschiedene Verfahren angewendet. In der Patentschrift WP C 04 B/30 61 616 erfolgt das Einbringen mittels Mischmahlung. Der Nachteil einer solchen Mischmahlung im trockenen Zustand oder in Suspension ist die Notwendigkeit großer Mahlzeiten, die bei begrenzter Dispersität und Homogenität des Mahlgutes die Anwendung teuerer und verschleißfester Mahlaggregate notwendig machen. Dabei gelingt die Verteilung des Sinterhilfsmittels nicht in dem gewünschten Maße, was sich auch auf die Zuverlässigkeit der hergestellten Sinterkörper negativ auswirkt. Weiterhin können eingebrachte Seltenerdoxide in den kaltgepreßten Formkörpern mit Luftfeuchtigkeit reagieren und die Formkörper unter Volumenzunahme mechanisch geschädigt werden.In the manufacture of polycrystalline silicon nitride or Silicon carbide materials become too strong for sintering Materials usually added sintering aids. These sintering aids are mostly oxides for silicon nitride of the elements yttrium, rare earths, magnesium, aluminum, Strontium, scandium or nitrides, such as e.g. B. aluminum nitride. In addition to conventional sintering aids, silicon carbide is used like boron, aluminum, their carbides and carbon too Oxides of yttrium, aluminum and rare earth elements used (I.-M. Lihrmann et al., Proc. Science of Sintering, 1989, Plenum Press New York, p. 367). To ensure a homogeneous distribution of these sintering aids in the sintering silicon nitride powder and / or mixture or silicon carbide powder and / or mixture to achieve different Procedure applied. It is introduced in the patent specification WP C 04 B / 30 61 616 by means of mixed grinding. The disadvantage of such a mixed grinding in the dry state or in suspension is the need large meals with limited dispersity and homogeneity the regrind the use of expensive and more wear-resistant Make grinding units necessary. The distribution of the Sintering aid not to the desired extent, which is also on the reliability of the sintered body produced affects. Furthermore, rare earth oxides introduced into the cold pressed moldings react with air humidity and the Moldings are mechanically damaged while increasing the volume.
Eine höhere Homogenität der Verteilung der Sinterhilfsmittel gelingt durch Auffällen von Hydroxiden oder Oxalaten gemäß der Patentschrift DE 37 17 831 und anschließendem Kalzinieren zu den Oxiden. Dem Vorteil einer besseren Dispersität steht folgender Nachteil entgegen: als Sinterhilfsmittel verwendete Seltenerdoxide lassen sich erst bei Temperaturen um 1000°C wasserfrei erhalten, so daß bei diesen hohen Temperaturen das Wasser entsprechend der GleichungA higher homogeneity of the distribution of the sintering aids succeeds by precipitating hydroxides or oxalates according to the Patent DE 37 17 831 and subsequent calcination to the Oxides. The advantage of better dispersity is as follows Disadvantage against: rare earth oxides used as sintering aids can only be anhydrous at temperatures around 1000 ° C obtained so that the water accordingly at these high temperatures the equation
Si₃N₄ + 6 H₂O → 3 SiO₂ + 4 NH₃Si₃N₄ + 6 H₂O → 3 SiO₂ + 4 NH₃
mit dem sinteraktiven Siliziumnitrid zu Siliziumdioxid reagiert. Damit steigt der Sauerstoffgehalt in den zu sinternden Pulvern unerwünscht an, was eine Beeinträchtigung der Hochtemperatureigenschaften infolge der Bildung von mehr bzw. niedrigviskoserer Glasphase zwischen den Siliziumnitridkörnern zur Folge hat.reacts with the sinter-active silicon nitride to form silicon dioxide. This increases the oxygen content in the powders to be sintered undesirable, which affects the high temperature properties due to the formation of more or less viscous Glass phase between the silicon nitride grains results.
Das Einbringen von Sinterhilfsmitteln über Metallnitrate gemäß der Offenlegungsschrift DE-OS 37 11 191 erfolgt zwar aus homogener Lösung, doch läßt sich das Metallnitrat am Siliziumnitrid nicht auffällen und in hoher Verteilung fixieren. Außerdem entsteht bei der Zersetzung aktiver Sauerstoff, der sinteraktives Siliziumnitridpulver nach der GleichungThe introduction of sintering aids via metal nitrates according to the published patent application DE-OS 37 11 191 takes place from homogeneous Solution, but the metal nitrate on the silicon nitride do not stand out and fix in a high distribution. It also arises in the decomposition of active oxygen, the sintered Silicon nitride powder according to the equation
Si₃N₄ + 6 O₂ → 3 SiO₂ + 2 N₂Si₃N₄ + 6 O₂ → 3 SiO₂ + 2 N₂
z. T. oxidiert, was wiederum eine Verschlechterung der Hochtemperatureigenschaften zur Folge hat. Der Nachteil dieses Herstellungsverfahrens besteht darin, daß bei so hergestellten Siliziumnitridsinterkörpern durch die unzureichenden Hochtemperatureigenschaften das Anwendungsgebiet eingeschränkt ist.e.g. T. oxidized, which in turn worsened the high temperature properties has the consequence. The disadvantage of this manufacturing process is that in silicon nitride sintered bodies produced in this way by the inadequate High temperature properties limited the area of application is.
Für hochdisperse Siliziumcarbidpulver treffen die Nachteile der obengenannten Verfahren in analoger Weise zu.For highly disperse silicon carbide powders, the disadvantages of the above method in an analogous manner.
Der in den Ansprüchen angegebenen Erfindung liegt das Problem zugrunde, ein Verfahren anzugeben, mit dem die Zuverlässigkeit und die Hochtemperatureigenschaften von polykristallinen Sinterkörpern verbessert werden.The problem specified in the invention is the problem based on specifying a method by which reliability and the high temperature properties of polycrystalline sintered bodies be improved.
Bei dem erfindungsgemäßen Verfahren werden die eingesetzten Dicarbonylverbindungen zu Komplexen umgesetzt und diese oder die eingesetzten Dicarbonylmetalloxidkomplexe über die flüssige Phase aufgefällt. Diese aufgefällten Komplexe lagern sich als sehr kleine Teilchen fein verteilt auf der Oberfläche der anderen Teilchen des Pulvergemisches ab. Nach dem Abtrennen der Mahlflüssigkeit erfolgt eine Temperaturerhöhung auf Temperaturen bis 600°C. Dadurch werden die fein verteilten kleinen Teilchen aus Dicarbonylmetalloxidkomplexen thermisch zersetzt und es liegen die Oxide dieser Verbindungen vor. Diese Oxide wirken als Sinterhilfsmittel, die sehr fein verteilt im Pulvergemisch vorliegen. Es zeigt sich dabei, daß durch diese Pulveraufbereitung keine signifikante Erhöhung des Sauerstoffgehaltes des Pulvergemisches eintritt. Obwohl der Sinterhilfsmittelgehalt im Formkörper unverändert bleibt, wird eine höhere Hochtemperaturfestigkeit dieser Sinterkörper im Vergleich zu den über Mischmahlung hergestellten erreicht. Außerdem wird auch eine höhere Zuverlässigkeit erreicht, die in Form des Weibullmoduls gemessen wird.In the process according to the invention, the dicarbonyl compounds used implemented into complexes and this or that used dicarbonyl metal oxide complexes over the liquid Phase noticed. These conspicuous complexes are stored as very small particles finely distributed on the surface of the others Particles of the powder mixture. After disconnecting the Grinding liquid is raised to temperatures up to 600 ° C. This will make the finely divided small particles thermally decomposed from dicarbonyl metal oxide complexes and it the oxides of these compounds are present. These oxides act as Sintering aids that are very finely divided in the powder mixture. It can be seen that none of these results from this powder preparation significant increase in the oxygen content of the powder mixture entry. Although the sintering aid content in the molded body remains unchanged remains, becomes a higher high temperature strength this sintered body compared to those produced by mixed grinding reached. It also increases reliability reached, which is measured in the form of the Weibull module.
Ein zusätzlicher Vorteil besteht noch darin, daß durch die gute Verteilung des Sinterhilfsmittels im Grünkörper eine hohe Sinteraktivität erreicht wird. Dadurch kann der Anteil an Sinterhilfsmitteln verringert werden. Dies wirkt sich ebenfalls vorteilhaft auf die Hochtemperatureigenschaften des Sinterkörpers aus.An additional advantage is that the good Distribution of the sintering aid in the green body a high sintering activity is achieved. This can reduce the proportion of sintering aids be reduced. This also has an advantageous effect on the high temperature properties of the sintered body out.
Im weiteren soll die Erfindung an mehreren Ausführungsbeispielen beschrieben werden.Furthermore, the invention is intended to be based on several exemplary embodiments to be discribed.
Siliziumnitridpulver mit einer spezifischen Oberfläche von 10,5 m²g-1, einem Verunreinigungsgrad von 0,5% und einem Sauerstoffgehalt von 1,55% wird mit einem Gemisch von Oxiden der Seltenerdelemente Neodym, Prasodym, Lanthan, Samarium und Cer (im weiteren als Didymoxid, R₂O₃, bezeichnet) und Aluminiumoxid (Zusammensetzung siehe Tabelle 1) und mit 20 ml Acetylaceton (Pentandion-2,4) 300 min in 85 ml 96%igem Ethanol gemischt und danach auf die Siedetemperatur der ethanolischen Lösung erwärmt und wieder abgekühlt. Anschließend wird das Pulvergemisch im Vakuum getrocknet, granuliert und mit 250 MPa zu Formkörpern 5 × 60 × 6 mm gepreßt. Danach werden die Formkörper an Luft in 10 h auf eine Temperatur von 500°C erwärmt und wieder abgekühlt. Anschließend werden die Formkörper bei 1700 bis 1950°C bei einem Stickstoffdruck bis 80 bar gesintert. Nach einer entsprechenden Finishbearbeitung (Abschleifen der Mantelflächen um ca. 0,3 mm) wird die Vierpunktbiegebruchfestigkeit σ⁴ und der Weibullmodul m bei Raumtemperatur sowie die Vierpunktbiegebruchfestigkeit σ⁴ bei 1200°C bestimmt. Diese Festigkeitseigenschaften sind mit denen von gesinterten Formkörpern gleicher Ausgangszusammensetzung, aber mit dem Verfahren mittels Mischmahlung in der Planetarkugelmühle, hergestellt, verglichen worden. Die Ergebnisse sind in Tabelle 1 dargestellt.Silicon nitride powder with a specific surface area of 10.5 m²g -1 , a degree of contamination of 0.5% and an oxygen content of 1.55% is mixed with a mixture of oxides of the rare earth elements neodymium, prasodymium, lanthanum, samarium and cerium (hereinafter as didymium oxide , R₂O₃, designated) and aluminum oxide (composition see table 1) and with 20 ml of acetylacetone (pentanedione-2,4) mixed for 300 min in 85 ml of 96% ethanol and then heated to the boiling point of the ethanolic solution and cooled again. The powder mixture is then dried in vacuo, granulated and pressed at 250 MPa to give shaped bodies 5 × 60 × 6 mm. The moldings are then heated in air to a temperature of 500 ° C. in 10 h and cooled again. The moldings are then sintered at 1700 to 1950 ° C. under a nitrogen pressure of up to 80 bar. After appropriate finishing (grinding of the outer surfaces by approx. 0.3 mm), the four-point bending strength σ⁴ and the Weibull modulus m at room temperature as well as the four-point bending strength σ⁴ at 1200 ° C are determined. These strength properties have been compared with those of sintered moldings of the same starting composition, but produced using the mixed grinding process in a planetary ball mill. The results are shown in Table 1.
Siliziumnitridpulver wird entsprechend Beispiel 1 mit einem Gemisch aus Aluminiumoxid und Didymoxid entsprechend Tabelle 2 und mit 15 ml Acetylaceton (Pentandion-2,4) 250 min in 85 ml 96%igem Ethanol mischgemahlen. Beim Einsatz von Yttriumoxid ist dieses als Yttriumoxidacetylacetonat zugegeben worden. Anschließend wird das Pulvergemisch getrocknet, granuliert, auf eine Temperatur von 500°C erwärmt und nach einer Haltezeit von 2 h abgekühlt. Danach wird das Pulvergemisch in einer Graphitmatrize bei 1840°C 60 min unter einem Druck von 30 MPa heißgepreßt. Für die mit Diamantwerkzeugen aus dichtgesinterten Scheiben geschnittenen und gefinishten Prüfkörper (3,5 × 60 × 4,5 mm) werden nach der Messung der Festigkeit folgende Werte erhalten (siehe Tabelle 2).Silicon nitride powder is used according to Example 1 with a mixture made of aluminum oxide and didymium oxide according to Table 2 and with 15 ml acetylacetone (pentanedione-2,4) 250 min in 85 ml 96% Mixed ethanol. When using yttrium oxide this was added as yttrium oxide acetylacetonate. Subsequently the powder mixture is dried, granulated, on a Temperature of 500 ° C warmed and after a holding time of 2 h cooled down. Then the powder mixture in a graphite matrix hot pressed at 1840 ° C for 60 min under a pressure of 30 MPa. For those with diamond tools made of densely sintered discs cut and finished test specimen (3.5 × 60 × 4.5 mm) the following values are obtained after measuring the strength (see table 2).
80 g Siliziumpulver mit einer spezifischen Oberfläche von 5 m²/g, einem Verunreinigungsgrad von 0,4% und einem Sauerstoffgehalt von 1,1% werden mit 9,5 g R₂O₃ (siehe Beispiel 1), 2,2 g Al₂O₃ und 25 ml Trifluoracetylaceton 250 min in 75 ml reinem Ethanol mischgemahlen. Anschließend wird das Pulvergemisch getrocknet, granuliert und mit 200 MPa zu Formkörpern mit den Abmessungen 5 × 60 × 6 mm gepreßt. Danach werden die Formkörper stufenweise (erste Stufe bei 500°C) auf eine Temperatur von 1420°C erwärmt und nitridiert. Anschließend erfolgt die Sinterung der Stäbe bei Temperaturen von 1700-1950°C bei einem Stickstoffdruck von 80 bar. So hergestellte Si₃N₄-Stäbe zeigen die in Tabelle 3 angegebenen mechanischen Eigenschaften.80 g silicon powder with a specific surface area of 5 m² / g, a degree of contamination of 0.4% and an oxygen content of 1.1% with 9.5 g of R₂O₃ (see Example 1), 2.2 g Al₂O₃ and 25 ml trifluoroacetylacetone 250 min in 75 ml pure Mixed ethanol. The powder mixture is then dried, granulated and with 200 MPa to form with the Dimensions 5 × 60 × 6 mm pressed. Then the moldings gradually (first stage at 500 ° C) to a temperature of 1420 ° C heated and nitrided. Then the sintering takes place of the rods at temperatures of 1700-1950 ° C at one Nitrogen pressure of 80 bar. So prepared Si₃N₄ rods show the mechanical properties given in Table 3.
α-SiC-Pulver mit einer spezifischen Oberfläche von 16,1 m²/g und einem Sauerstoffgehalt von 0,85% wird wie in den Beispielen 1-5 mit einem Gemisch aus Didymoxid und Aluminiumoxid entsprechend Tabelle 4 und mit 15 ml Acetylaceton (Pentandion-2,4) 300 min in 85 ml 96%igem Ethanol mischgemahlen. Die Summe der Feststoffe beträgt dabei 100 g. Anschließend wird das Pulvergemisch getrocknet, granuliert, auf eine Temperatur von 500°C erwärmt und nach einer Haltezeit von 2 h abgekühlt. Danach wird das Pulvergemisch in einer Graphitmatrize bei 1950°C 120 min unter einem Druck von 30 MPa heißgepreßt. Für die analog Beispiel 4 und 5 hergestellten Prüfkörper werden folgende Festigkeitswerte gemessen und mit analog hergestellten Prüfkörpern ohne Verwendung des erfindungsgemäßen Herstellungsverfahrens verglichen.α-SiC powder with a specific surface area of 16.1 m² / g and an oxygen content of 0.85% as in Examples 1-5 with a mixture of didymium oxide and aluminum oxide accordingly Table 4 and with 15 ml acetylacetone (pentanedione-2,4) in 300 min Mix 85 ml of 96% ethanol mixed. The sum of the solids is 100 g. The powder mixture is then dried, granulated, heated to a temperature of 500 ° C and cooled after a holding time of 2 h. Then the powder mixture in a graphite matrix at 1950 ° C for 120 min under one Pressure of 30 MPa hot pressed. For the test specimens produced analogously to Examples 4 and 5 the following strength values measured and produced with analog Test specimens without using the manufacturing method according to the invention compared.
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DE19754235C2 (en) * | 1997-07-01 | 2001-11-15 | Fct Systeme Der Strukturkerami | Method for producing a hob with at least one ceramic hob inserted and hob with hob, which is produced by the method |
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DE3717831A1 (en) * | 1987-05-27 | 1988-12-08 | Hoechst Ag | Process for producing a sintered body |
DE3840781A1 (en) * | 1988-12-03 | 1990-06-07 | Hoechst Ag | FIBER COMPOSITE CERAMICS AND METHOD FOR THEIR PRODUCTION |
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DE3717831A1 (en) * | 1987-05-27 | 1988-12-08 | Hoechst Ag | Process for producing a sintered body |
DE3840781A1 (en) * | 1988-12-03 | 1990-06-07 | Hoechst Ag | FIBER COMPOSITE CERAMICS AND METHOD FOR THEIR PRODUCTION |
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DE19754235C2 (en) * | 1997-07-01 | 2001-11-15 | Fct Systeme Der Strukturkerami | Method for producing a hob with at least one ceramic hob inserted and hob with hob, which is produced by the method |
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