DE3934968A1 - Piezo-drive for axial movement or for mirrors in laser gyroscope - has layers of piezoelectric material or of metal which are glued together at constant distance - Google Patents
Piezo-drive for axial movement or for mirrors in laser gyroscope - has layers of piezoelectric material or of metal which are glued together at constant distanceInfo
- Publication number
- DE3934968A1 DE3934968A1 DE3934968A DE3934968A DE3934968A1 DE 3934968 A1 DE3934968 A1 DE 3934968A1 DE 3934968 A DE3934968 A DE 3934968A DE 3934968 A DE3934968 A DE 3934968A DE 3934968 A1 DE3934968 A1 DE 3934968A1
- Authority
- DE
- Germany
- Prior art keywords
- layers
- piezo
- drive
- piezo drive
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
Landscapes
- Gyroscopes (AREA)
Abstract
Description
Die Neuerung betrifft einen Piezoantrieb, der aus mehreren miteinander verkleb ten Schichten aufgebaut ist, die entweder alle aus piezokeramischem Material be stehen oder von denen eine oder mehrere Schichten metallisch sind.The innovation relates to a piezo drive that sticks together from several ten layers is built up, all of which are made of piezoceramic material stand or of which one or more layers are metallic.
Ein derartiger Piezoantrieb ist aus dem Gebrauchsmuster G 87 00 462 bekannt. Piezoantriebe werden beispielsweise zur gezielten axialen Bewegung oder Winkel verstellung der Spiegel in Laserkreiseln verwendet.Such a piezo drive is known from utility model G 87 00 462. Piezo drives are used, for example, for targeted axial movement or angles adjustment of the mirrors used in laser gyros.
Der Neuerung liegt die Aufgabe zugrunde, einen Piezoantrieb anzugeben, der eine definierte und über seine ganze Fläche gleichbleibende Kraft ausübt.The innovation is based on the task of specifying a piezo drive that has a defined and constant force over its entire area.
Diese Aufgabe wird durch die im Anspruch 1 angegebenen Merkmale gelöst. Vorteil hafte Ausgestaltungen der Neuerung gehen aus den Unteransprüchen hervor.This object is achieved by the features specified in claim 1. Advantage lofty developments of the innovation emerge from the subclaims.
Der gemäß der Neuerung verwendete Abstandhalter sorgt für einen unveränderbaren, über die gesamte Schichtenfläche gleichbleibenden Abstand. Somit ist die Kraft übertragung zwischen den einzelnen Schichten über die ganze Fläche des Piezoan triebs gleichbleibend konstant. Dem wirkt weder eine unterschiedliche Kleberkon sistenz noch eine unterschiedliche Auftragsdicke des Klebstoffes noch unter schiedliche Anpreßkräfte zwischen den Schichten entgegen.The spacer used according to the innovation ensures an unchangeable, constant distance over the entire layer area. So that's the power transmission between the individual layers over the entire area of the piezoan constantly constant. This is not affected by a different adhesive cone a different application thickness of the adhesive is still under different contact forces between the layers.
Anhand mehrerer in der Zeichnung dargestellter Ausführungsbeispiele wird nun die Neuerung näher erläutert.Based on several embodiments shown in the drawing, the Innovation explained in more detail.
Fig. 1 zeigt einen Querschnitt durch einen Piezoantrieb und Fig. 1 shows a cross section through a piezo drive and
Fig. 2, 3, 4 zeigen verschiedene Varianten von Abstandhaltern. Fig. 2, 3, 4 show different variants of spacers.
Der Fig. 1 sind zwei miteinander verklebte Schichten 1 und 2 eines Piezoan triebs zu entnehmen. Beide Schichten 1, 2 bestehen entweder aus einem piezokera mischen Material, oder eine der beiden Schichten 1, 2 ist metallisch, beispiels weise eine Elektrode des Piezoantriebs. Ein zwischen die beiden Schichten 1 und 2 eingefügter Abstandhalter 4 sorgt für eine gleichbleibende Distanz der beiden Schichten unabhängig von der Konsistenz und der Auftragsdicke des zwischen die beiden Schichten eingebrachten Klebstoffs 3.Of FIG. 1 are shown two bonded together layers 1 and 2 of a Piezoan drive. Both layers 1 , 2 either consist of a piezoceramic material, or one of the two layers 1 , 2 is metallic, for example an electrode of the piezo drive. A spacer 4 inserted between the two layers 1 and 2 ensures a constant distance between the two layers, irrespective of the consistency and the thickness of the adhesive 3 applied between the two layers.
In den Fig. 2, 3 und 4 sind verschiedene Ausführungsformen eines Abstandhal ters dargestellt. Die in den Fig. 2, 3 und 4 eingezeichnete strichlierte Um randung deutet jeweils die mit Klebstoff versehene Schichtenfläche an. Die Fig. 2 zeigt einen Abstandhalter, der ein aus einem Metall oder Kunststoffgewebe aus geschnittenes Formteil 6 ist. Der in Fig. 3 dargestellte Abstandhalter ist ein Draht 7, der in Bond-Technik auf den jeweiligen piezokeramischen bzw. metalli schen Schichten aufgebracht werden kann. Als Abstandhalter kann auch direkt auf die piezokeramischen bzw. metallischen Schichten eine Struktur 8 durch Bedamp fen, galvanischen Auftrag oder durch Siebdruck aufgebracht werden. Die Fig. 2, 3 und 4 machen deutlich, daß die Abstandhalter unterschiedlichste Formen ha ben können. Bei der Formgebung der Abstandhalter 6, 7, 8 ist darauf zu achten, daß ein konstanter Abstand über die gesamte Schichtenfläche gewährleistet ist.In Figs. 2, 3 and 4 different embodiments of an Abstandhal are shown ters. The dashed border shown in FIGS . 2, 3 and 4 indicates the layer surface provided with adhesive in each case. FIG. 2 shows a spacer, which is a molded part 6 cut from a metal or plastic fabric. The spacer shown in Fig. 3 is a wire 7 which can be applied to the respective piezoceramic or metallic layers using bonding technology. As a spacer, a structure 8 can also be applied directly to the piezoceramic or metallic layers by vapor deposition, galvanic application or by screen printing. Figs. 2, 3 and 4 make it clear that the spacers can ben ha different forms. When shaping the spacers 6 , 7 , 8 , care must be taken to ensure that a constant distance is ensured over the entire layer surface.
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3934968A DE3934968A1 (en) | 1988-12-23 | 1989-10-20 | Piezo-drive for axial movement or for mirrors in laser gyroscope - has layers of piezoelectric material or of metal which are glued together at constant distance |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3843527 | 1988-12-23 | ||
DE3934968A DE3934968A1 (en) | 1988-12-23 | 1989-10-20 | Piezo-drive for axial movement or for mirrors in laser gyroscope - has layers of piezoelectric material or of metal which are glued together at constant distance |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3934968A1 true DE3934968A1 (en) | 1990-07-05 |
Family
ID=25875559
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3934968A Withdrawn DE3934968A1 (en) | 1988-12-23 | 1989-10-20 | Piezo-drive for axial movement or for mirrors in laser gyroscope - has layers of piezoelectric material or of metal which are glued together at constant distance |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE3934968A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4302457A1 (en) * | 1993-01-29 | 1994-08-04 | Schlattl Werner Bavaria Tech | Spot-welding electrode holder and actuator unit |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2900609A1 (en) * | 1978-01-09 | 1979-07-12 | Singer Co | PIEZOELECTRIC ACTUATOR |
DE3032997A1 (en) * | 1979-09-12 | 1981-04-02 | Litton Systems, Inc., Beverly Hills, Calif. | CONTROLLABLE MIRROR |
DE3040563A1 (en) * | 1980-10-28 | 1982-05-27 | Siemens AG, 1000 Berlin und 8000 München | ELECTRICALLY ACTUATED ACTUATOR |
DE3227451A1 (en) * | 1981-07-24 | 1983-02-24 | Litton Systems, Inc., 90210 Beverly Hills, Calif. | PIEZOELECTRIC CONVERTER WITH INTEGRATED DRIVER STAGE AND SENSOR |
US4438364A (en) * | 1981-07-13 | 1984-03-20 | The Garrett Corporation | Piezoelectric actuator |
US4653918A (en) * | 1983-04-18 | 1987-03-31 | Sundstrand Corporation | Low Q body-dithered laser gyro assembly |
DE8700462U1 (en) * | 1987-01-10 | 1987-04-23 | Teldix Gmbh, 6900 Heidelberg, De |
-
1989
- 1989-10-20 DE DE3934968A patent/DE3934968A1/en not_active Withdrawn
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2900609A1 (en) * | 1978-01-09 | 1979-07-12 | Singer Co | PIEZOELECTRIC ACTUATOR |
DE3032997A1 (en) * | 1979-09-12 | 1981-04-02 | Litton Systems, Inc., Beverly Hills, Calif. | CONTROLLABLE MIRROR |
DE3040563A1 (en) * | 1980-10-28 | 1982-05-27 | Siemens AG, 1000 Berlin und 8000 München | ELECTRICALLY ACTUATED ACTUATOR |
US4438364A (en) * | 1981-07-13 | 1984-03-20 | The Garrett Corporation | Piezoelectric actuator |
DE3227451A1 (en) * | 1981-07-24 | 1983-02-24 | Litton Systems, Inc., 90210 Beverly Hills, Calif. | PIEZOELECTRIC CONVERTER WITH INTEGRATED DRIVER STAGE AND SENSOR |
US4653918A (en) * | 1983-04-18 | 1987-03-31 | Sundstrand Corporation | Low Q body-dithered laser gyro assembly |
DE8700462U1 (en) * | 1987-01-10 | 1987-04-23 | Teldix Gmbh, 6900 Heidelberg, De |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4302457A1 (en) * | 1993-01-29 | 1994-08-04 | Schlattl Werner Bavaria Tech | Spot-welding electrode holder and actuator unit |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
OM8 | Search report available as to paragraph 43 lit. 1 sentence 1 patent law | ||
8139 | Disposal/non-payment of the annual fee |