DE3872227D1 - Opto-elektronischer skalenlese-apparat. - Google Patents
Opto-elektronischer skalenlese-apparat.Info
- Publication number
- DE3872227D1 DE3872227D1 DE8989900866T DE3872227T DE3872227D1 DE 3872227 D1 DE3872227 D1 DE 3872227D1 DE 8989900866 T DE8989900866 T DE 8989900866T DE 3872227 T DE3872227 T DE 3872227T DE 3872227 D1 DE3872227 D1 DE 3872227D1
- Authority
- DE
- Germany
- Prior art keywords
- opto
- electronic scale
- scale reader
- reader
- electronic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005693 optoelectronics Effects 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB878729246A GB8729246D0 (en) | 1987-12-15 | 1987-12-15 | Opto-electronic scale-reading apparatus |
GB888819322A GB8819322D0 (en) | 1988-08-13 | 1988-08-13 | Opto-electronic scale-reading apparatus |
PCT/GB1988/001110 WO1989005964A1 (en) | 1987-12-15 | 1988-12-15 | Opto-electronic scale-reading apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3872227D1 true DE3872227D1 (de) | 1992-07-23 |
DE3872227T2 DE3872227T2 (de) | 1992-12-03 |
Family
ID=26293203
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8989900866T Expired - Lifetime DE3872227T2 (de) | 1987-12-15 | 1988-12-15 | Opto-elektronischer skalenlese-apparat. |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0344291B1 (de) |
JP (1) | JPH02504553A (de) |
DE (1) | DE3872227T2 (de) |
WO (1) | WO1989005964A1 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2862417B2 (ja) * | 1990-11-16 | 1999-03-03 | キヤノン株式会社 | 変位測定装置及び方法 |
EP0486050B1 (de) * | 1990-11-16 | 1998-02-04 | Canon Kabushiki Kaisha | Verfahren und Vorrichtung zum Messen von Verschiebungen |
GB9424969D0 (en) * | 1994-12-10 | 1995-02-08 | Renishaw Plc | Opto-electronic scale reading apparatus |
DE19908328A1 (de) | 1999-02-26 | 2000-08-31 | Heidenhain Gmbh Dr Johannes | Optische Positionsmeßeinrichtung |
GB0004120D0 (en) | 2000-02-23 | 2000-04-12 | Renishaw Plc | Opto-electronic scale reading apparatus |
DE102005029917A1 (de) * | 2005-06-28 | 2007-01-04 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
JP5890531B2 (ja) | 2011-11-09 | 2016-03-22 | ザイゴ コーポレーションZygo Corporation | 干渉方式エンコーダシステムのための小型エンコーダヘッド |
CN104040296B (zh) * | 2011-11-09 | 2016-08-24 | 齐戈股份有限公司 | 双通干涉测量编码器系统 |
DE102013221898A1 (de) * | 2013-10-29 | 2015-04-30 | Dr. Johannes Heidenhain Gmbh | Vorrichtung zur Positionsbestimmung |
US9593826B2 (en) | 2013-12-12 | 2017-03-14 | Utc Fire & Security Americas Corporation, Inc. | Strobe assembly |
JP6760831B2 (ja) * | 2016-12-06 | 2020-09-23 | Dmg森精機株式会社 | 変位検出装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1773428C2 (de) * | 1968-05-14 | 1973-09-13 | Secretary Of State For Defence Of The United Kingdom Of Great Britain And Northern Ireland, London | Vorrichtung zur Bestimmung der Lage eines beweglichen Bauteils relativ zu einem festen Bezugssystem |
GB2185314B (en) * | 1986-01-14 | 1990-09-26 | Canon Kk | Encoder |
-
1988
- 1988-12-15 WO PCT/GB1988/001110 patent/WO1989005964A1/en active IP Right Grant
- 1988-12-15 EP EP89900866A patent/EP0344291B1/de not_active Expired - Lifetime
- 1988-12-15 JP JP50079389A patent/JPH02504553A/ja active Pending
- 1988-12-15 DE DE8989900866T patent/DE3872227T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
WO1989005964A1 (en) | 1989-06-29 |
DE3872227T2 (de) | 1992-12-03 |
EP0344291B1 (de) | 1992-06-17 |
JPH02504553A (ja) | 1990-12-20 |
EP0344291A1 (de) | 1989-12-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |