DE3872227D1 - Opto-elektronischer skalenlese-apparat. - Google Patents

Opto-elektronischer skalenlese-apparat.

Info

Publication number
DE3872227D1
DE3872227D1 DE8989900866T DE3872227T DE3872227D1 DE 3872227 D1 DE3872227 D1 DE 3872227D1 DE 8989900866 T DE8989900866 T DE 8989900866T DE 3872227 T DE3872227 T DE 3872227T DE 3872227 D1 DE3872227 D1 DE 3872227D1
Authority
DE
Germany
Prior art keywords
opto
electronic scale
scale reader
reader
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8989900866T
Other languages
English (en)
Other versions
DE3872227T2 (de
Inventor
Roberts Mcmurtry
Frank Stephens
Edward Pleydell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB878729246A external-priority patent/GB8729246D0/en
Priority claimed from GB888819322A external-priority patent/GB8819322D0/en
Application filed by Renishaw PLC filed Critical Renishaw PLC
Publication of DE3872227D1 publication Critical patent/DE3872227D1/de
Application granted granted Critical
Publication of DE3872227T2 publication Critical patent/DE3872227T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36Forming the light into pulses
    • G01D5/38Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
DE8989900866T 1987-12-15 1988-12-15 Opto-elektronischer skalenlese-apparat. Expired - Lifetime DE3872227T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB878729246A GB8729246D0 (en) 1987-12-15 1987-12-15 Opto-electronic scale-reading apparatus
GB888819322A GB8819322D0 (en) 1988-08-13 1988-08-13 Opto-electronic scale-reading apparatus
PCT/GB1988/001110 WO1989005964A1 (en) 1987-12-15 1988-12-15 Opto-electronic scale-reading apparatus

Publications (2)

Publication Number Publication Date
DE3872227D1 true DE3872227D1 (de) 1992-07-23
DE3872227T2 DE3872227T2 (de) 1992-12-03

Family

ID=26293203

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8989900866T Expired - Lifetime DE3872227T2 (de) 1987-12-15 1988-12-15 Opto-elektronischer skalenlese-apparat.

Country Status (4)

Country Link
EP (1) EP0344291B1 (de)
JP (1) JPH02504553A (de)
DE (1) DE3872227T2 (de)
WO (1) WO1989005964A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2862417B2 (ja) * 1990-11-16 1999-03-03 キヤノン株式会社 変位測定装置及び方法
EP0486050B1 (de) * 1990-11-16 1998-02-04 Canon Kabushiki Kaisha Verfahren und Vorrichtung zum Messen von Verschiebungen
GB9424969D0 (en) * 1994-12-10 1995-02-08 Renishaw Plc Opto-electronic scale reading apparatus
DE19908328A1 (de) 1999-02-26 2000-08-31 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
GB0004120D0 (en) 2000-02-23 2000-04-12 Renishaw Plc Opto-electronic scale reading apparatus
DE102005029917A1 (de) * 2005-06-28 2007-01-04 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP5890531B2 (ja) 2011-11-09 2016-03-22 ザイゴ コーポレーションZygo Corporation 干渉方式エンコーダシステムのための小型エンコーダヘッド
CN104040296B (zh) * 2011-11-09 2016-08-24 齐戈股份有限公司 双通干涉测量编码器系统
DE102013221898A1 (de) * 2013-10-29 2015-04-30 Dr. Johannes Heidenhain Gmbh Vorrichtung zur Positionsbestimmung
US9593826B2 (en) 2013-12-12 2017-03-14 Utc Fire & Security Americas Corporation, Inc. Strobe assembly
JP6760831B2 (ja) * 2016-12-06 2020-09-23 Dmg森精機株式会社 変位検出装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1773428C2 (de) * 1968-05-14 1973-09-13 Secretary Of State For Defence Of The United Kingdom Of Great Britain And Northern Ireland, London Vorrichtung zur Bestimmung der Lage eines beweglichen Bauteils relativ zu einem festen Bezugssystem
GB2185314B (en) * 1986-01-14 1990-09-26 Canon Kk Encoder

Also Published As

Publication number Publication date
WO1989005964A1 (en) 1989-06-29
DE3872227T2 (de) 1992-12-03
EP0344291B1 (de) 1992-06-17
JPH02504553A (ja) 1990-12-20
EP0344291A1 (de) 1989-12-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee