DE3867883D1 - Anlage zur vakuumverdampfung von werkstoffen. - Google Patents

Anlage zur vakuumverdampfung von werkstoffen.

Info

Publication number
DE3867883D1
DE3867883D1 DE8888400590T DE3867883T DE3867883D1 DE 3867883 D1 DE3867883 D1 DE 3867883D1 DE 8888400590 T DE8888400590 T DE 8888400590T DE 3867883 T DE3867883 T DE 3867883T DE 3867883 D1 DE3867883 D1 DE 3867883D1
Authority
DE
Germany
Prior art keywords
materials
vacuum evaporation
evaporation
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8888400590T
Other languages
English (en)
Inventor
D Avitaya Francois Arnaud
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Etat Francais
Original Assignee
Etat Francais
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Etat Francais filed Critical Etat Francais
Application granted granted Critical
Publication of DE3867883D1 publication Critical patent/DE3867883D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • C30B23/06—Heating of the deposition chamber, the substrate or the materials to be evaporated
    • C30B23/066—Heating of the material to be evaporated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE8888400590T 1987-03-13 1988-03-11 Anlage zur vakuumverdampfung von werkstoffen. Expired - Lifetime DE3867883D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8703483A FR2612203A1 (fr) 1987-03-13 1987-03-13 Dispositif pour l'evaporation sous vide de materiaux

Publications (1)

Publication Number Publication Date
DE3867883D1 true DE3867883D1 (de) 1992-03-05

Family

ID=9348952

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888400590T Expired - Lifetime DE3867883D1 (de) 1987-03-13 1988-03-11 Anlage zur vakuumverdampfung von werkstoffen.

Country Status (3)

Country Link
EP (1) EP0286472B1 (de)
DE (1) DE3867883D1 (de)
FR (1) FR2612203A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI477625B (zh) * 2012-12-26 2015-03-21 Au Optronics Corp 蒸鍍裝置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3454814A (en) * 1966-07-29 1969-07-08 Atomic Energy Commission Tubular vapor source
US4490408A (en) * 1983-03-14 1984-12-25 Tektronix, Inc. Method and device for metallizing the internal surface of a hollow object

Also Published As

Publication number Publication date
FR2612203A1 (fr) 1988-09-16
EP0286472B1 (de) 1992-01-22
EP0286472A1 (de) 1988-10-12

Similar Documents

Publication Publication Date Title
DE3888809D1 (de) Gerät zur Verdampfung von Desinfektionsmitteln.
DE3750849D1 (de) Feste kalziumphosphat-materialien.
DE3580924D1 (de) Vorrichtung zur verzoegerten freigabe von wirksubstanzen.
DE3876558D1 (de) Hyposensibilisierend wirksame substanz.
DE3784442D1 (de) Vorrichtung zur handhabung von gestaengen.
DE3888671D1 (de) Deckelhalterungssystem.
PT88313A (pt) Vorrichtung zur halterung von anschlubleisten der fernmeldetechnik
DE3885620D1 (de) Vernichtung von kunststoffabfällen.
DE3887803D1 (de) Mechanismus zur Handhabung von Reaktivstreifen.
DE3852770D1 (de) Vorrichtung zur Handhabung von Wafern.
DE3862953D1 (de) Handhabung von blattartigen materialien.
DE3750847D1 (de) Einrichtung zur Gefriertrocknung.
DE3869007D1 (de) Oxydation von alkanen.
DE68908071D1 (de) Wiederverwendbare verdampfungshalterung.
DE3850802D1 (de) Verbindungen zur Bestimmung von Kationen.
DE3850941D1 (de) Vakuumbeschichtungsanlage.
DE3766430D1 (de) Einrichtung zur zeitweisen einlagerung von flachen gegenstaenden.
FI883581A0 (fi) Anordning foer beskiktning av en materialbana.
FR2621297B1 (fr) Caisse de manutention empilable et emboitable
DE68919346D1 (de) Verfahren zur Gasphasenabscheidung von Polysilanen.
FI881840A (fi) Rekisteröimismateriaali
DE3884616D1 (de) Vorrichtung zur verdampfung von fluessigkeiten.
DE3884157D1 (de) Verfahren zur Alkylierung von Phenolen.
DE3867883D1 (de) Anlage zur vakuumverdampfung von werkstoffen.
DE3780294D1 (de) Anlage zur vorbeugung von katastrophen.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee