DE3867123D1 - Einrichtung zur feststellung der kristallisationsgrenzflaechenposition. - Google Patents

Einrichtung zur feststellung der kristallisationsgrenzflaechenposition.

Info

Publication number
DE3867123D1
DE3867123D1 DE8888106650T DE3867123T DE3867123D1 DE 3867123 D1 DE3867123 D1 DE 3867123D1 DE 8888106650 T DE8888106650 T DE 8888106650T DE 3867123 T DE3867123 T DE 3867123T DE 3867123 D1 DE3867123 D1 DE 3867123D1
Authority
DE
Germany
Prior art keywords
crystalization
determining
surface position
crystalization surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888106650T
Other languages
English (en)
Inventor
Nobuo Katsuoka
Masahiko Nigorikawa
Shuji Ohmori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Application granted granted Critical
Publication of DE3867123D1 publication Critical patent/DE3867123D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating
    • C30B13/30—Stabilisation or shape controlling of the molten zone, e.g. by concentrators, by electromagnetic fields; Controlling the section of the crystal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1004—Apparatus with means for measuring, testing, or sensing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE8888106650T 1987-04-27 1988-04-26 Einrichtung zur feststellung der kristallisationsgrenzflaechenposition. Expired - Fee Related DE3867123D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62104084A JPS63269003A (ja) 1987-04-27 1987-04-27 晶出界面位置検出装置

Publications (1)

Publication Number Publication Date
DE3867123D1 true DE3867123D1 (de) 1992-02-06

Family

ID=14371270

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888106650T Expired - Fee Related DE3867123D1 (de) 1987-04-27 1988-04-26 Einrichtung zur feststellung der kristallisationsgrenzflaechenposition.

Country Status (4)

Country Link
US (1) US4918520A (de)
EP (1) EP0290854B1 (de)
JP (1) JPS63269003A (de)
DE (1) DE3867123D1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0651599B2 (ja) * 1987-12-05 1994-07-06 信越半導体株式会社 浮遊帯域制御方法
US5269875A (en) * 1989-10-05 1993-12-14 Shin-Etsu Handotai Company, Limited Method of adjusting concentration of oxygen in silicon single crystal and apparatus for use in the method
JP2601930B2 (ja) * 1990-03-29 1997-04-23 信越半導体株式会社 単結晶ネツク部直径制御方法及び装置
JP2574074B2 (ja) * 1991-04-10 1997-01-22 日鉄鉱業株式会社 Ｆｚ法による単結晶育成状態の異常を検出する方法およびその装置
US5519211A (en) * 1994-06-14 1996-05-21 United States Of America As Represented By The Secretary Of Commerce Method and apparatus for monitoring resin crystallization and shrinkage during polymer molding
JP2004250101A (ja) * 2002-08-13 2004-09-09 Imekkusu Kk 容器
CN115763231A (zh) * 2022-12-07 2023-03-07 西安奕斯伟材料科技有限公司 晶圆的外延生长方法及设备

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE631568A (de) * 1962-04-27
GB1127742A (en) * 1965-02-06 1968-09-18 Metals Res Ltd Improvements in or relating to image analysis systems
FR2139434A5 (de) * 1971-05-11 1973-01-05 Image Analysing Computers Ltd
US4277441A (en) * 1979-01-15 1981-07-07 Mobil Tyco Solar Energy Corporation Apparatus for monitoring crystal growth
US4242589A (en) * 1979-01-15 1980-12-30 Mobil Tyco Solar Energy Corporation Apparatus for monitoring crystal growth
CA1166842A (en) * 1980-12-17 1984-05-08 Edward G. Lucas Bed height measurement
WO1983002464A1 (en) * 1982-01-04 1983-07-21 Seymour, Robert, Stephen Diameter control in czochralski crystal growth
DE3325003A1 (de) * 1983-07-11 1985-01-24 Siemens AG, 1000 Berlin und 8000 München Verfahren zum messen des druchmessers eines durch zonenschmelzen hergestellten halbleiterstabes
JPS5994006A (ja) * 1983-10-26 1984-05-30 Hitachi Ltd 外観検査装置

Also Published As

Publication number Publication date
US4918520A (en) 1990-04-17
EP0290854A1 (de) 1988-11-17
JPS63269003A (ja) 1988-11-07
JPH0535963B2 (de) 1993-05-27
EP0290854B1 (de) 1991-12-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee