DE3787463D1 - Vorrichtung zum formen eines laserstrahls. - Google Patents
Vorrichtung zum formen eines laserstrahls.Info
- Publication number
- DE3787463D1 DE3787463D1 DE87904116T DE3787463T DE3787463D1 DE 3787463 D1 DE3787463 D1 DE 3787463D1 DE 87904116 T DE87904116 T DE 87904116T DE 3787463 T DE3787463 T DE 3787463T DE 3787463 D1 DE3787463 D1 DE 3787463D1
- Authority
- DE
- Germany
- Prior art keywords
- shaping
- laser beam
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
- B23K26/0732—Shaping the laser spot into a rectangular shape
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0994—Fibers, light pipes
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Lenses (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61158844A JPS6316893A (ja) | 1986-07-08 | 1986-07-08 | リングモ−ド成形装置 |
JP61177666A JPS6336991A (ja) | 1986-07-30 | 1986-07-30 | レ−ザビ−ム成形装置 |
PCT/JP1987/000420 WO1988000108A1 (en) | 1986-07-08 | 1987-06-25 | Laser beam forming apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3787463D1 true DE3787463D1 (de) | 1993-10-21 |
DE3787463T2 DE3787463T2 (de) | 1994-04-28 |
Family
ID=26485842
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE87904116T Expired - Fee Related DE3787463T2 (de) | 1986-07-08 | 1987-06-25 | Vorrichtung zum formen eines laserstrahls. |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0282593B1 (de) |
DE (1) | DE3787463T2 (de) |
WO (1) | WO1988000108A1 (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4004423C2 (de) * | 1989-02-17 | 1998-05-14 | Mezotraslevoj Nt Kompleks Mikr | Vorrichtung zur chirurgischen Behandlung der Ametropie |
NL8902485A (nl) * | 1989-10-06 | 1991-05-01 | Optische Ind De Oude Delft Nv | Inrichting voor het verschaffen van een bundel laserstraling met een homogene energieverdeling. |
US5170029A (en) * | 1990-04-19 | 1992-12-08 | Matsushita Electric Works, Ltd. | Energy-beam welding method |
US5638211A (en) | 1990-08-21 | 1997-06-10 | Nikon Corporation | Method and apparatus for increasing the resolution power of projection lithography exposure system |
US7656504B1 (en) | 1990-08-21 | 2010-02-02 | Nikon Corporation | Projection exposure apparatus with luminous flux distribution |
GB9019123D0 (en) * | 1990-09-01 | 1990-10-17 | Fisons Plc | Analytical device |
US6252647B1 (en) | 1990-11-15 | 2001-06-26 | Nikon Corporation | Projection exposure apparatus |
US6885433B2 (en) | 1990-11-15 | 2005-04-26 | Nikon Corporation | Projection exposure apparatus and method |
US5719704A (en) | 1991-09-11 | 1998-02-17 | Nikon Corporation | Projection exposure apparatus |
US6967710B2 (en) | 1990-11-15 | 2005-11-22 | Nikon Corporation | Projection exposure apparatus and method |
US6710855B2 (en) | 1990-11-15 | 2004-03-23 | Nikon Corporation | Projection exposure apparatus and method |
US6897942B2 (en) | 1990-11-15 | 2005-05-24 | Nikon Corporation | Projection exposure apparatus and method |
KR100259969B1 (ko) * | 1993-09-30 | 2000-06-15 | 로버트 피. 아킨즈 | 전필드마스크 조사 강화방법 및 장치 |
DE4429913C1 (de) * | 1994-08-23 | 1996-03-21 | Fraunhofer Ges Forschung | Vorrichtung und Verfahren zum Plattieren |
US5754719A (en) * | 1996-11-22 | 1998-05-19 | Cogent Light Technologies, Inc. | Method for coupling light from single fiberoptic to a multi-fiber bundle with enhanced field uniformity and better coupling efficiency |
EP0881514A1 (de) * | 1997-05-30 | 1998-12-02 | Lasag Ag | Optisches Koppelelement zur räumlichen Begrenzung und Homogenisierung eines Strahls mit grossem Öffnungswinkel |
DE10323984A1 (de) * | 2003-05-27 | 2004-12-16 | Hentze-Lissotschenko Patentverwaltungs Gmbh & Co.Kg | Vorrichtung zur Transformation eines Lichtstrahls |
EP1508397B1 (de) * | 2003-08-21 | 2006-06-07 | Leister Process Technologies | Verfahren und Vorrichtung zum simultanen Erwärmen von Materialien |
DE10339636B4 (de) * | 2003-08-28 | 2013-02-07 | Limo Patentverwaltung Gmbh & Co. Kg | Verfahren und Vorrichtung zum simultanen Laserschweißen |
US20070127005A1 (en) * | 2005-12-02 | 2007-06-07 | Asml Holding N.V. | Illumination system |
DE102012109937A1 (de) * | 2012-10-18 | 2014-04-24 | Limo Patentverwaltung Gmbh & Co. Kg | Vorrichtung zur Beaufschlagung einer Innenseite eines Zylinders mit Licht sowie Strahltransformationsvorrichtung für eine derartige Vorrichtung |
DE102012110165A1 (de) * | 2012-10-24 | 2014-02-13 | Jenoptik Automatisierungstechnik Gmbh | Vorrichtung zum Verbinden zweier Werkstückteile mit Bereichen unterschiedlicher Eigenschaften mittels Durchstrahlschweißen |
US20160327802A1 (en) * | 2015-05-08 | 2016-11-10 | Synrad, Inc. | Waveguide beam conditioning for a high powered laser |
EP3138650A1 (de) * | 2015-09-03 | 2017-03-08 | Ewm Ag | Vorrichtung und verfahren zum lichtbogenschweissen oder lichtbogenlöten mit einer abschmelzenden elektrode |
DE102016103230B3 (de) * | 2016-02-24 | 2017-07-06 | Jenoptik Automatisierungstechnik Gmbh | Vorrichtung zum Lasertransmissionsschweißen einer ringförmigen Schweißnaht |
CN110058335A (zh) * | 2019-04-30 | 2019-07-26 | 西安炬光科技股份有限公司 | 光学元件、治疗仪和光斑变换的实现方法 |
CN111070700B (zh) * | 2019-12-20 | 2022-01-18 | 浙江舜宇智领技术有限公司 | 激光焊接治具 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3947093A (en) * | 1973-06-28 | 1976-03-30 | Canon Kabushiki Kaisha | Optical device for producing a minute light beam |
US3972599A (en) * | 1974-09-16 | 1976-08-03 | Caterpillar Tractor Co. | Method and apparatus for focussing laser beams |
JPS59150684A (ja) * | 1983-02-18 | 1984-08-28 | Hitachi Ltd | レ−ザ加工装置 |
US4547044A (en) * | 1983-03-31 | 1985-10-15 | International Business Machines Corporation | Beam-folding wedge tunnel |
US4564736A (en) * | 1984-05-07 | 1986-01-14 | General Electric Company | Industrial hand held laser tool and laser system |
JPS61103693A (ja) * | 1984-10-24 | 1986-05-22 | Hitachi Ltd | レ−ザ加工機 |
-
1987
- 1987-06-25 WO PCT/JP1987/000420 patent/WO1988000108A1/ja active IP Right Grant
- 1987-06-25 EP EP19870904116 patent/EP0282593B1/de not_active Expired - Lifetime
- 1987-06-25 DE DE87904116T patent/DE3787463T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE3787463T2 (de) | 1994-04-28 |
WO1988000108A1 (en) | 1988-01-14 |
EP0282593A1 (de) | 1988-09-21 |
EP0282593B1 (de) | 1993-09-15 |
EP0282593A4 (de) | 1989-01-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |