DE3783831D1 - Verfahren und vorrichtung zur kontrolle des organischen kontaminationspegels in einem platierungsbad ohne elektrode. - Google Patents

Verfahren und vorrichtung zur kontrolle des organischen kontaminationspegels in einem platierungsbad ohne elektrode.

Info

Publication number
DE3783831D1
DE3783831D1 DE8787106898T DE3783831T DE3783831D1 DE 3783831 D1 DE3783831 D1 DE 3783831D1 DE 8787106898 T DE8787106898 T DE 8787106898T DE 3783831 T DE3783831 T DE 3783831T DE 3783831 D1 DE3783831 D1 DE 3783831D1
Authority
DE
Germany
Prior art keywords
electrode
controlling
plating bath
contamination level
organic contamination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787106898T
Other languages
English (en)
Other versions
DE3783831T2 (de
Inventor
Donald Gene Mcbride
Robert George Rickert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE3783831D1 publication Critical patent/DE3783831D1/de
Application granted granted Critical
Publication of DE3783831T2 publication Critical patent/DE3783831T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1633—Process of electroless plating
    • C23C18/1675—Process conditions
    • C23C18/1683—Control of electrolyte composition, e.g. measurement, adjustment
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
    • H05K3/187—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating means therefor, e.g. baths, apparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)
  • Manufacturing Of Printed Wiring (AREA)
DE8787106898T 1986-07-11 1987-05-12 Verfahren und vorrichtung zur kontrolle des organischen kontaminationspegels in einem platierungsbad ohne elektrode. Expired - Fee Related DE3783831T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/884,330 US4707378A (en) 1986-07-11 1986-07-11 Method and apparatus for controlling the organic contamination level in an electroless plating bath

Publications (2)

Publication Number Publication Date
DE3783831D1 true DE3783831D1 (de) 1993-03-11
DE3783831T2 DE3783831T2 (de) 1993-08-19

Family

ID=25384398

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787106898T Expired - Fee Related DE3783831T2 (de) 1986-07-11 1987-05-12 Verfahren und vorrichtung zur kontrolle des organischen kontaminationspegels in einem platierungsbad ohne elektrode.

Country Status (4)

Country Link
US (1) US4707378A (de)
EP (1) EP0257197B1 (de)
JP (1) JPS6320485A (de)
DE (1) DE3783831T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4865873A (en) * 1986-09-15 1989-09-12 General Electric Company Electroless deposition employing laser-patterned masking layer
US4812210A (en) * 1987-10-16 1989-03-14 The United States Department Of Energy Measuring surfactant concentration in plating solutions
US4808431A (en) * 1987-12-08 1989-02-28 International Business Machines Corp. Method for controlling plating on seeded surfaces
US5117370A (en) * 1988-12-22 1992-05-26 Ford Motor Company Detection system for chemical analysis of zinc phosphate coating solutions
JP2888001B2 (ja) * 1992-01-09 1999-05-10 日本電気株式会社 金属メッキ装置
US5484626A (en) * 1992-04-06 1996-01-16 Shipley Company L.L.C. Methods and apparatus for maintaining electroless plating solutions
GB9318941D0 (en) * 1993-09-14 1993-10-27 Northumbrian Water Group Plc Digital control of a mutli sensor system
JP4304558B2 (ja) 1999-11-14 2009-07-29 ソニー株式会社 携帯機器
US6387801B1 (en) 2000-11-07 2002-05-14 Megic Corporation Method and an apparatus to electroless plate a metal layer while eliminating the photoelectric effect
US20040108213A1 (en) * 2002-12-09 2004-06-10 Talasek Robert T. Plating bath composition control
ATE552494T1 (de) * 2003-07-09 2012-04-15 Univ Auburn Reversible elektochemische sensoren für polyionen
US20050109624A1 (en) * 2003-11-25 2005-05-26 Mackenzie King On-wafer electrochemical deposition plating metrology process and apparatus
US20050224370A1 (en) * 2004-04-07 2005-10-13 Jun Liu Electrochemical deposition analysis system including high-stability electrode
US6984299B2 (en) * 2004-04-27 2006-01-10 Advanced Technology Material, Inc. Methods for determining organic component concentrations in an electrolytic solution
US7435320B2 (en) 2004-04-30 2008-10-14 Advanced Technology Materials, Inc. Methods and apparatuses for monitoring organic additives in electrochemical deposition solutions
US7427346B2 (en) * 2004-05-04 2008-09-23 Advanced Technology Materials, Inc. Electrochemical drive circuitry and method
KR20110110462A (ko) * 2010-04-01 2011-10-07 삼성전기주식회사 도금액의 활성도 측정 장치 및 방법

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4152164A (en) * 1976-04-26 1979-05-01 Michael Gulla Electroless nickel plating
JPS5926660B2 (ja) * 1979-03-07 1984-06-29 株式会社東芝 無電解メツキ反応の測定方法
US4326940A (en) * 1979-05-21 1982-04-27 Rohco Incorporated Automatic analyzer and control system for electroplating baths
US4353933A (en) * 1979-11-14 1982-10-12 C. Uyemura & Co., Ltd. Method for controlling electroless plating bath
US4626446A (en) * 1985-06-03 1986-12-02 International Business Machines Corporation Electroless plating bath monitor
US4631116A (en) * 1985-06-05 1986-12-23 Hughes Aircraft Company Method of monitoring trace constituents in plating baths

Also Published As

Publication number Publication date
EP0257197B1 (de) 1993-01-27
DE3783831T2 (de) 1993-08-19
JPS6320485A (ja) 1988-01-28
EP0257197A2 (de) 1988-03-02
US4707378A (en) 1987-11-17
EP0257197A3 (en) 1989-09-20
JPH022951B2 (de) 1990-01-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee