DE3781086T2 - Methode zur steigerung des haftvermoegens von polymeren materialien auf metallen. - Google Patents

Methode zur steigerung des haftvermoegens von polymeren materialien auf metallen.

Info

Publication number
DE3781086T2
DE3781086T2 DE8787114913T DE3781086T DE3781086T2 DE 3781086 T2 DE3781086 T2 DE 3781086T2 DE 8787114913 T DE8787114913 T DE 8787114913T DE 3781086 T DE3781086 T DE 3781086T DE 3781086 T2 DE3781086 T2 DE 3781086T2
Authority
DE
Germany
Prior art keywords
metal
copper
fluorocarbon
plasma
metal oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787114913T
Other languages
German (de)
English (en)
Other versions
DE3781086D1 (de
Inventor
Kevin Kok Chan
Vicki Jean Malueg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3781086D1 publication Critical patent/DE3781086D1/de
Publication of DE3781086T2 publication Critical patent/DE3781086T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00—Ancillary operations in connection with laminating processes
    • B32B38/0008—Electrical discharge treatment, e.g. corona, plasma treatment; wave energy or particle radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • B32B37/24—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer not being coherent before laminating, e.g. made up from granular material sprinkled onto a substrate
    • B32B2037/246—Vapour deposition
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2309/00—Parameters for the laminating or treatment process; Apparatus details
    • B32B2309/04—Time
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2309/00—Parameters for the laminating or treatment process; Apparatus details
    • B32B2309/12—Pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2311/00—Metals, their alloys or their compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2311/00—Metals, their alloys or their compounds
    • B32B2311/12—Copper
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2363/00—Epoxy resins
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment
    • B32B2457/08—PCBs, i.e. printed circuit boards
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/02—Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
    • H05K2203/025—Abrading, e.g. grinding or sand blasting
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/09—Treatments involving charged particles
    • H05K2203/095—Plasma, e.g. for treating a substrate to improve adhesion with a conductor or for cleaning holes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Insulated Metal Substrates For Printed Circuits (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Manufacturing Of Printed Wiring (AREA)
DE8787114913T 1986-10-28 1987-10-13 Methode zur steigerung des haftvermoegens von polymeren materialien auf metallen. Expired - Fee Related DE3781086T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/923,977 US4689111A (en) 1986-10-28 1986-10-28 Process for promoting the interlaminate adhesion of polymeric materials to metal surfaces

Publications (2)

Publication Number Publication Date
DE3781086D1 DE3781086D1 (de) 1992-09-17
DE3781086T2 true DE3781086T2 (de) 1993-03-18

Family

ID=25449539

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787114913T Expired - Fee Related DE3781086T2 (de) 1986-10-28 1987-10-13 Methode zur steigerung des haftvermoegens von polymeren materialien auf metallen.

Country Status (4)

Country Link
US (1) US4689111A (OSRAM)
EP (1) EP0265765B1 (OSRAM)
JP (1) JPS63112679A (OSRAM)
DE (1) DE3781086T2 (OSRAM)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8501773A (nl) * 1985-06-20 1987-01-16 Philips Nv Werkwijze voor het vervaardigen van halfgeleiderinrichtingen.
CA1286586C (en) * 1987-03-26 1991-07-23 Chukoh Chemical Industries Ltd. Finish laminates for high frequency circuits
US4797178A (en) * 1987-05-13 1989-01-10 International Business Machines Corporation Plasma etch enhancement with large mass inert gas
US4810326A (en) * 1987-08-31 1989-03-07 International Business Machines Corporation Interlaminate adhesion between polymeric materials and electrolytic copper surfaces
USH650H (en) 1988-04-14 1989-07-04 The United States Of America As Represented By The United States Department Of Energy Double sided circuit board and a method for its manufacture
US5443455A (en) * 1993-07-27 1995-08-22 Target Therapeutics, Inc. Guidewire and method of pretreating metal surfaces for subsequent polymer coating
GB9405518D0 (en) * 1994-03-21 1994-05-04 Mupor Ltd Porous metal composite body
US5840402A (en) * 1994-06-24 1998-11-24 Sheldahl, Inc. Metallized laminate material having ordered distribution of conductive through holes
US6743319B2 (en) * 1998-09-30 2004-06-01 Paralec Inc. Adhesiveless transfer lamination method and materials for producing electronic circuits
US6212769B1 (en) * 1999-06-29 2001-04-10 International Business Machines Corporation Process for manufacturing a printed wiring board
EP1138804A3 (de) * 2000-03-27 2003-06-25 Infineon Technologies AG Bauelement mit zumindest zwei aneinander grenzenden Isolierschichten und Herstellungsverfahren dazu
US7645832B2 (en) * 2006-03-08 2010-01-12 Exxonmobil Chemical Patents Inc. Use of metal oxides and salts to enhance adhesion to steels
JP5234011B2 (ja) * 2010-01-07 2013-07-10 豊田合成株式会社 金属と樹脂との複合体の製造方法
TWI404615B (zh) * 2010-04-01 2013-08-11 A method of manufacturing an in-mold formed film having a metal surface
DE102015108237A1 (de) * 2015-05-26 2016-12-01 Thyssenkrupp Ag Herstellung von Verbundmaterial mittels Plasmabeschichtung
CN118283963B (zh) * 2023-07-03 2025-08-15 荣耀终端股份有限公司 结构件、结构件的制备方法和电子设备

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3455775A (en) * 1966-05-26 1969-07-15 Bell Telephone Labor Inc Metal-plastic laminate and method for the preparation thereof
US4087300A (en) * 1974-01-07 1978-05-02 Edward Adler Process for producing metal-plastic laminate
US4277321A (en) * 1979-04-23 1981-07-07 Bell Telephone Laboratories, Incorporated Treating multilayer printed wiring boards
JPS5930832A (ja) * 1982-08-13 1984-02-18 Shin Etsu Chem Co Ltd 表面特性の改質されたフツ素系樹脂成形品
JPS5938268A (ja) * 1982-08-26 1984-03-02 Sumitomo Chem Co Ltd ポリオレフイン樹脂の接着方法
US4416725A (en) * 1982-12-30 1983-11-22 International Business Machines Corporation Copper texturing process
DE3376186D1 (en) * 1983-08-02 1988-05-05 Ibm Deutschland Dry-etching process and its use

Also Published As

Publication number Publication date
EP0265765A3 (en) 1990-03-07
EP0265765A2 (en) 1988-05-04
US4689111A (en) 1987-08-25
DE3781086D1 (de) 1992-09-17
EP0265765B1 (en) 1992-08-12
JPS63112679A (ja) 1988-05-17
JPH0238620B2 (OSRAM) 1990-08-31

Similar Documents

Publication Publication Date Title
DE3874867T2 (de) Verfahren zur behandlung einer kupferoberflaeche.
US4810326A (en) Interlaminate adhesion between polymeric materials and electrolytic copper surfaces
DE69213360T2 (de) Verfahren zur Metallbeschichtung von Diamant
US6212769B1 (en) Process for manufacturing a printed wiring board
DE69009973T2 (de) Verfahren zur Behandlung einer Polyimidoberfläche im Hinblick auf eine anschliessend darauf aufzubringende Plattierung.
DE69534804T2 (de) Beschichtung von Kupfer
US5788830A (en) Electroplating process
US4689111A (en) Process for promoting the interlaminate adhesion of polymeric materials to metal surfaces
CA1229266A (en) Process for preparing a substrate for subsequent electroless deposition of a metal
WO1996012051A1 (de) Verfahren zur abscheidung von metallschichten
DE3140082C2 (de) Verfahren zur Herstellung gedruckter Schaltungen
EP1241209B1 (en) Solvent swell composition containing heterocyclic nitrogen compounds and glycols for texturing resinous material and desmearing and removing resinous material
CN1204291C (zh) 微多孔性铜覆膜及用于制备该铜覆膜的化学镀铜液
US4702793A (en) Method for manufacturing a laminated layered printed wiring board using a sulfuroxy acid and an oxiding treatment of the metallic wiring patterns to insure the integrity of the laminate product
EP0195332A2 (de) Elektrische Leiterplatten
DE2425223A1 (de) Verfahren zum verbessern des haftens metallischer schichten auf der oberflaeche eines kunststoffsubstrats
JPH01195281A (ja) 無電解めつき用触媒
Akahoshi et al. A new fully additive fabrication process for printed wiring boards
DE3146164C2 (OSRAM)
EP0788727B1 (de) Verfahren zur herstellung elektrischer schaltungsträger
DE2145905B2 (de) Verfahren zur Herstellung von oberflächlich metallisierten Isolierstoffen durch stromlose Metallabscheidung
JPH0680886B2 (ja) 印刷配線板の製造法
JPH01169990A (ja) 表面実装用基板
JPH08232084A (ja) 銅箔の表面処理液並びにその処理液を用いた多層プリント配線板の製造方法
DE3510201A1 (de) Elektrische leiterplatten

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee