DE3779523D1 - Veraenderung der eigenschaften eines p-typ-dotierungsstoffes mittels eines anderen p-typ-dotierungsstoffes. - Google Patents
Veraenderung der eigenschaften eines p-typ-dotierungsstoffes mittels eines anderen p-typ-dotierungsstoffes.Info
- Publication number
- DE3779523D1 DE3779523D1 DE8787401927T DE3779523T DE3779523D1 DE 3779523 D1 DE3779523 D1 DE 3779523D1 DE 8787401927 T DE8787401927 T DE 8787401927T DE 3779523 T DE3779523 T DE 3779523T DE 3779523 D1 DE3779523 D1 DE 3779523D1
- Authority
- DE
- Germany
- Prior art keywords
- doper
- type
- changing
- properties
- another
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
- H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
- H01L21/2652—Through-implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- High Energy & Nuclear Physics (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Led Devices (AREA)
- Materials For Photolithography (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/901,502 US4746964A (en) | 1986-08-28 | 1986-08-28 | Modification of properties of p-type dopants with other p-type dopants |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3779523D1 true DE3779523D1 (de) | 1992-07-09 |
DE3779523T2 DE3779523T2 (de) | 1993-01-21 |
Family
ID=25414313
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8787401927T Expired - Fee Related DE3779523T2 (de) | 1986-08-28 | 1987-08-25 | Veraenderung der eigenschaften eines p-typ-dotierungsstoffes mittels eines anderen p-typ-dotierungsstoffes. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4746964A (de) |
EP (1) | EP0258148B1 (de) |
JP (1) | JPS6362227A (de) |
KR (1) | KR880003404A (de) |
DE (1) | DE3779523T2 (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0359852A1 (de) * | 1988-09-21 | 1990-03-28 | Siemens Aktiengesellschaft | Verfahren zur Herstellung von flachen dotierten Bereichen mit niedrigem Schichtwiderstand in einem Siliziumsubstrat |
EP0397014A3 (de) * | 1989-05-10 | 1991-02-06 | National Semiconductor Corporation | Aluminium-/Bor-dotierte P-Wanne |
TW399774U (en) * | 1989-07-03 | 2000-07-21 | Gen Electric | FET, IGBT and MCT structures to enhance operating characteristics |
JPH0797590B2 (ja) * | 1989-11-21 | 1995-10-18 | 株式会社東芝 | バイポーラトランジスタの製造方法 |
US5137838A (en) * | 1991-06-05 | 1992-08-11 | National Semiconductor Corporation | Method of fabricating P-buried layers for PNP devices |
US5192712A (en) * | 1992-04-15 | 1993-03-09 | National Semiconductor Corporation | Control and moderation of aluminum in silicon using germanium and germanium with boron |
US5825052A (en) * | 1994-08-26 | 1998-10-20 | Rohm Co., Ltd. | Semiconductor light emmitting device |
US6331458B1 (en) | 1994-10-11 | 2001-12-18 | Advanced Micro Devices, Inc. | Active region implant methodology using indium to enhance short channel performance of a surface channel PMOS device |
US5970353A (en) | 1998-03-30 | 1999-10-19 | Advanced Micro Devices, Inc. | Reduced channel length lightly doped drain transistor using a sub-amorphous large tilt angle implant to provide enhanced lateral diffusion |
JP2002076332A (ja) * | 2000-08-24 | 2002-03-15 | Hitachi Ltd | 絶縁ゲート型電界効果トランジスタ及びその製造方法 |
US6660608B1 (en) * | 2002-02-25 | 2003-12-09 | Advanced Micro Devices, Inc. | Method for manufacturing CMOS device having low gate resistivity using aluminum implant |
US6599831B1 (en) * | 2002-04-30 | 2003-07-29 | Advanced Micro Devices, Inc. | Metal gate electrode using silicidation and method of formation thereof |
US20040121524A1 (en) * | 2002-12-20 | 2004-06-24 | Micron Technology, Inc. | Apparatus and method for controlling diffusion |
US7297617B2 (en) * | 2003-04-22 | 2007-11-20 | Micron Technology, Inc. | Method for controlling diffusion in semiconductor regions |
US8110469B2 (en) | 2005-08-30 | 2012-02-07 | Micron Technology, Inc. | Graded dielectric layers |
JP2008085355A (ja) * | 2007-10-22 | 2008-04-10 | Toshiba Corp | イオン注入方法 |
US11362221B2 (en) * | 2017-02-06 | 2022-06-14 | Alliance For Sustainable Energy, Llc | Doped passivated contacts |
CN113178385B (zh) * | 2021-03-31 | 2022-12-23 | 青岛惠科微电子有限公司 | 一种芯片的制造方法、制造设备和芯片 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3798079A (en) * | 1972-06-05 | 1974-03-19 | Westinghouse Electric Corp | Triple diffused high voltage transistor |
JPS5457861A (en) * | 1977-10-17 | 1979-05-10 | Hitachi Ltd | Manufacture of semiconductor device |
JPS5492183A (en) * | 1977-12-29 | 1979-07-21 | Fujitsu Ltd | Manufacture of mis type semiconductor device |
JPS55151349A (en) * | 1979-05-15 | 1980-11-25 | Matsushita Electronics Corp | Forming method of insulation isolating region |
JPS5673470A (en) * | 1979-11-21 | 1981-06-18 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Manufacture of semiconductor device |
JPS58106823A (ja) * | 1981-12-18 | 1983-06-25 | Toshiba Corp | イオン注入方法 |
JPS58111324A (ja) * | 1981-12-25 | 1983-07-02 | Hitachi Ltd | 半導体装置の製造方法 |
US4512816A (en) * | 1982-02-26 | 1985-04-23 | National Semiconductor Corporation | High-density IC isolation technique capacitors |
-
1986
- 1986-08-28 US US06/901,502 patent/US4746964A/en not_active Expired - Lifetime
-
1987
- 1987-08-21 KR KR870009163A patent/KR880003404A/ko not_active Application Discontinuation
- 1987-08-25 EP EP87401927A patent/EP0258148B1/de not_active Expired - Lifetime
- 1987-08-25 DE DE8787401927T patent/DE3779523T2/de not_active Expired - Fee Related
- 1987-08-28 JP JP62213171A patent/JPS6362227A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0258148B1 (de) | 1992-06-03 |
EP0258148A3 (en) | 1988-06-01 |
DE3779523T2 (de) | 1993-01-21 |
US4746964A (en) | 1988-05-24 |
EP0258148A2 (de) | 1988-03-02 |
JPS6362227A (ja) | 1988-03-18 |
KR880003404A (ko) | 1988-05-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3779523T2 (de) | Veraenderung der eigenschaften eines p-typ-dotierungsstoffes mittels eines anderen p-typ-dotierungsstoffes. | |
DE3579810D1 (de) | Epidermalisierung der oberflaeche eines kuenstlichen dermas. | |
DE3786247D1 (de) | Lanzette mit rueckfuehrung. | |
NO864359L (no) | Kildedannende dopplerinterferometer. | |
DE3767909D1 (de) | Bauelement mit akustischen eigenschaften. | |
DE69013311T2 (de) | Stethoskop mit Kopfmembranvorsatz. | |
FI851637L (fi) | 1,4-dihydro-4-oxonaftyridinderivat och deras salter, foerfarande foer framstaellning av dessa och dessa omfattande antibakteriella aemnen. | |
DE68907613D1 (de) | Anordnung mit bandsperrfiltern. | |
DE3668891D1 (de) | Benzothiazolone, ihre herstellung und anwendung. | |
DE3864268D1 (de) | Turbine mit regelbarem durchfluss. | |
DE3768236D1 (de) | Anordnung mit ventilfunktion. | |
NO905204D0 (no) | Vaapenmagasin med stort bruksomraade. | |
NO873148D0 (no) | Strupelegeme med innvendig anordnet anemometer. | |
FI893304A (fi) | Akrylcyklobutenylamidoalkensyror och deras salter. | |
SE8801297D0 (sv) | Lyftningstillsats | |
FI870832A0 (fi) | Konserveringsmedel foer trae. | |
FI922790A (fi) | Koncentrerade vattenhaltiga, vaetskeformiga blekmedelskompositioner. | |
DE3784893T2 (de) | Benzothiazolone, ihre herstellung und ihre anwendung. | |
IT8920189A0 (it) | Nuovi silani contenenti almeno due gruppi oxazolidinici, loro preparazione ed impiego. | |
DE3779526D1 (de) | Herstellung eines sich verjuengenden stabes. | |
ATE74051T1 (de) | Anordnung mit arbeitskopf. | |
NO870184D0 (no) | Kanne med skjenketut. | |
FI893240A0 (fi) | Byggnadselement med maongsidig anvaendning. | |
DE3765755D1 (de) | Windmuehle mit verstellbaren schaufeln. | |
ATE57745T1 (de) | Windmuehle mit verstellbaren schaufeln. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |