DE3779124D1 - CAPILLARY CHROMATOGRAPHY DEVICE AND METHOD FOR THE PRODUCTION THEREOF. - Google Patents
CAPILLARY CHROMATOGRAPHY DEVICE AND METHOD FOR THE PRODUCTION THEREOF.Info
- Publication number
- DE3779124D1 DE3779124D1 DE8787890212T DE3779124T DE3779124D1 DE 3779124 D1 DE3779124 D1 DE 3779124D1 DE 8787890212 T DE8787890212 T DE 8787890212T DE 3779124 T DE3779124 T DE 3779124T DE 3779124 D1 DE3779124 D1 DE 3779124D1
- Authority
- DE
- Germany
- Prior art keywords
- micrometre
- capillary column
- substrate
- vapour deposition
- cover layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Treatment Of Liquids With Adsorbents In General (AREA)
Abstract
The device ahs a measuring sensor with at least one capillary column (6) between a carrier (7) and a cover layer (4) supplied with a mobile phase and/or a measuring material. The carrier layer (7) comprises a substrate with an applied photo lacquer allowing formation of a capillary column (6) with a width between 0.5 and 20 micrometre and a height of between 0.5 and 3 micrometre. The coverlying cover layer (4) has a thickness of between 0.5 and 20 micrometre, e.g. 3 mcirometre applied via vapour deposition and/or sputtering, e.g. a plasma enhanced chemical vapour deposition method. The photolacquer is then selectively removed to provide hollow spaces between the 2 layers (7,4) for the capillary column (6). Pref. the substrate is etched before applying the photo lacquer. (First major country equivalent to AT8301689)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP87890212A EP0307530B1 (en) | 1983-05-09 | 1987-09-14 | Capillary chromatography device and method for manufacturing |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3779124D1 true DE3779124D1 (en) | 1992-06-17 |
Family
ID=8198529
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8787890212T Expired - Fee Related DE3779124D1 (en) | 1987-09-14 | 1987-09-14 | CAPILLARY CHROMATOGRAPHY DEVICE AND METHOD FOR THE PRODUCTION THEREOF. |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE3779124D1 (en) |
-
1987
- 1987-09-14 DE DE8787890212T patent/DE3779124D1/en not_active Expired - Fee Related
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |