DE3779124D1 - CAPILLARY CHROMATOGRAPHY DEVICE AND METHOD FOR THE PRODUCTION THEREOF. - Google Patents

CAPILLARY CHROMATOGRAPHY DEVICE AND METHOD FOR THE PRODUCTION THEREOF.

Info

Publication number
DE3779124D1
DE3779124D1 DE8787890212T DE3779124T DE3779124D1 DE 3779124 D1 DE3779124 D1 DE 3779124D1 DE 8787890212 T DE8787890212 T DE 8787890212T DE 3779124 T DE3779124 T DE 3779124T DE 3779124 D1 DE3779124 D1 DE 3779124D1
Authority
DE
Germany
Prior art keywords
micrometre
capillary column
substrate
vapour deposition
cover layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787890212T
Other languages
German (de)
Inventor
Dr Dipl Ing Prohaska
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Otto Sensors Corp
Original Assignee
Otto Sensors Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Otto Sensors Corp filed Critical Otto Sensors Corp
Priority claimed from EP87890212A external-priority patent/EP0307530B1/en
Application granted granted Critical
Publication of DE3779124D1 publication Critical patent/DE3779124D1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The device ahs a measuring sensor with at least one capillary column (6) between a carrier (7) and a cover layer (4) supplied with a mobile phase and/or a measuring material. The carrier layer (7) comprises a substrate with an applied photo lacquer allowing formation of a capillary column (6) with a width between 0.5 and 20 micrometre and a height of between 0.5 and 3 micrometre. The coverlying cover layer (4) has a thickness of between 0.5 and 20 micrometre, e.g. 3 mcirometre applied via vapour deposition and/or sputtering, e.g. a plasma enhanced chemical vapour deposition method. The photolacquer is then selectively removed to provide hollow spaces between the 2 layers (7,4) for the capillary column (6). Pref. the substrate is etched before applying the photo lacquer. (First major country equivalent to AT8301689)
DE8787890212T 1987-09-14 1987-09-14 CAPILLARY CHROMATOGRAPHY DEVICE AND METHOD FOR THE PRODUCTION THEREOF. Expired - Fee Related DE3779124D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP87890212A EP0307530B1 (en) 1983-05-09 1987-09-14 Capillary chromatography device and method for manufacturing

Publications (1)

Publication Number Publication Date
DE3779124D1 true DE3779124D1 (en) 1992-06-17

Family

ID=8198529

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787890212T Expired - Fee Related DE3779124D1 (en) 1987-09-14 1987-09-14 CAPILLARY CHROMATOGRAPHY DEVICE AND METHOD FOR THE PRODUCTION THEREOF.

Country Status (1)

Country Link
DE (1) DE3779124D1 (en)

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee