DE3773484D1 - Mikrolaserstrahl-maschine, eingreifend auf objekte mit duennschichtigem material. - Google Patents

Mikrolaserstrahl-maschine, eingreifend auf objekte mit duennschichtigem material.

Info

Publication number
DE3773484D1
DE3773484D1 DE8787402961T DE3773484T DE3773484D1 DE 3773484 D1 DE3773484 D1 DE 3773484D1 DE 8787402961 T DE8787402961 T DE 8787402961T DE 3773484 T DE3773484 T DE 3773484T DE 3773484 D1 DE3773484 D1 DE 3773484D1
Authority
DE
Germany
Prior art keywords
interfering
micro
thick
objects
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787402961T
Other languages
German (de)
English (en)
Inventor
Geoffroy Auvert
Jean-Claude Georgel
Yves Chemin Des Hermenta Guern
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orange SA
Original Assignee
France Telecom SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by France Telecom SA filed Critical France Telecom SA
Application granted granted Critical
Publication of DE3773484D1 publication Critical patent/DE3773484D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Microscoopes, Condenser (AREA)
  • Laser Beam Processing (AREA)
  • Immobilizing And Processing Of Enzymes And Microorganisms (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Lasers (AREA)
DE8787402961T 1986-12-23 1987-12-22 Mikrolaserstrahl-maschine, eingreifend auf objekte mit duennschichtigem material. Expired - Fee Related DE3773484D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8618079A FR2608484B1 (fr) 1986-12-23 1986-12-23 Machine a microfaisceau laser d'intervention sur des objets a couches minces de materiau

Publications (1)

Publication Number Publication Date
DE3773484D1 true DE3773484D1 (de) 1991-11-07

Family

ID=9342235

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787402961T Expired - Fee Related DE3773484D1 (de) 1986-12-23 1987-12-22 Mikrolaserstrahl-maschine, eingreifend auf objekte mit duennschichtigem material.

Country Status (9)

Country Link
US (1) US4825034A (fi)
EP (1) EP0277444B1 (fi)
JP (1) JPS63238988A (fi)
KR (1) KR880007163A (fi)
DE (1) DE3773484D1 (fi)
ES (1) ES2026934T3 (fi)
FR (1) FR2608484B1 (fi)
IL (1) IL84897A (fi)
IN (1) IN172171B (fi)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5059764A (en) * 1988-10-31 1991-10-22 Spectra-Physics, Inc. Diode-pumped, solid state laser-based workstation for precision materials processing and machining
FR2639567B1 (fr) * 1988-11-25 1991-01-25 France Etat Machine a microfaisceau laser d'intervention sur des objets a couche mince, en particulier pour la gravure ou le depot de matiere par voie chimique en presence d'un gaz reactif
FR2657803A1 (fr) * 1990-02-02 1991-08-09 Bertin & Cie Machine a micro-faisceau laser d'intervention sur des objets a couches minces, tels que des circuits integres.
US5171963A (en) * 1990-05-21 1992-12-15 Ntn Corporation Laser processing device and laser processing method
IT1240515B (it) * 1990-07-27 1993-12-17 Prima Ind Spa Dispositivo di regolazione per allineare un raggio laser secondo una linea di riferimento prestabilita
US5464960A (en) * 1993-01-12 1995-11-07 Iatrotech, Inc. Laser calibration device
US5416821A (en) * 1993-05-10 1995-05-16 Trw Inc. Grid formed with a silicon substrate
US5585016A (en) * 1993-07-20 1996-12-17 Integrated Device Technology, Inc. Laser patterned C-V dot
JP3399590B2 (ja) * 1993-08-04 2003-04-21 富士通株式会社 配線の切断装置
US5872051A (en) * 1995-08-02 1999-02-16 International Business Machines Corporation Process for transferring material to semiconductor chip conductive pads using a transfer substrate
US6472671B1 (en) * 2000-02-09 2002-10-29 Jean I. Montagu Quantified fluorescence microscopy
US6794424B2 (en) 2001-12-04 2004-09-21 Agilent Technologies, Inc. Devices for calibrating optical scanners and methods of using the same
US20040094526A1 (en) * 2002-11-15 2004-05-20 Mccoy Edward D. Cutting laser beam nozzle assembly
US7534561B2 (en) 2003-04-02 2009-05-19 Agilent Technologies, Inc. Nucleic acid array in situ fabrication methods and arrays produced using the same
DE102004063692B3 (de) * 2004-12-28 2006-05-11 Georg-August-Universität Göttingen Positioniereinrichtung
DE102005059650B4 (de) * 2005-12-14 2011-08-18 Leica Microsystems CMS GmbH, 35578 Vorrichtung zur Montage für mehrere Laser und Mikroskop
DE102005059649B4 (de) * 2005-12-14 2017-09-07 Leica Microsystems Cms Gmbh Vorrichtung zur Montage für mehrere Laser
WO2009002544A1 (en) * 2007-06-26 2008-12-31 Rolls-Royce Corporation Prism mount for a laser deposition device
US8374818B2 (en) * 2008-12-19 2013-02-12 Affymetrix, Inc. System, method and apparatus for calibrating inspection tools
DE102011000505A1 (de) * 2011-02-04 2012-08-09 A. Monforts Werkzeugmaschinen Gmbh & Co. Kg Werkzeugwechselträger und Werkzeugsystem

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL255532A (fi) * 1959-09-04
US3782823A (en) * 1972-03-23 1974-01-01 American Optical Corp Laser microprobe
US3769663A (en) * 1972-05-04 1973-11-06 T Perl Flashlight attachment clip for spectacles
FR2454635A1 (fr) * 1979-04-18 1980-11-14 Commissariat Energie Atomique Procede et dispositif de reglage de l'impact sur une cible d'un faisceau de lumiere monochromatique emis par une source laser
JPS5720261A (en) * 1980-07-14 1982-02-02 Olympus Optical Co Medical treating device
FR2541468B1 (fr) * 1983-02-17 1986-07-11 Commissariat Energie Atomique Dispositif d'alignement d'un faisceau laser par l'intermediaire de moyens optiques de visee, procede de reperage de l'axe d'emission du faisceau laser et procede de mise en oeuvre du dispositif, pour controler l'alignement

Also Published As

Publication number Publication date
FR2608484B1 (fr) 1989-04-28
ES2026934T3 (es) 1992-05-16
IL84897A (en) 1992-05-25
EP0277444B1 (fr) 1991-10-02
IL84897A0 (en) 1988-06-30
IN172171B (fi) 1993-04-24
FR2608484A1 (fr) 1988-06-24
US4825034A (en) 1989-04-25
KR880007163A (ko) 1988-08-26
JPS63238988A (ja) 1988-10-05
EP0277444A1 (fr) 1988-08-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee