DE3771233D1 - Geraet zum messen von spannungen in vakuumabscheidungsschichten. - Google Patents

Geraet zum messen von spannungen in vakuumabscheidungsschichten.

Info

Publication number
DE3771233D1
DE3771233D1 DE8787300271T DE3771233T DE3771233D1 DE 3771233 D1 DE3771233 D1 DE 3771233D1 DE 8787300271 T DE8787300271 T DE 8787300271T DE 3771233 T DE3771233 T DE 3771233T DE 3771233 D1 DE3771233 D1 DE 3771233D1
Authority
DE
Germany
Prior art keywords
vacuum deposition
deposition layers
measuring tensions
tensions
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787300271T
Other languages
English (en)
Inventor
David Wyeth Hoffman
Cassimer Marion Kukla
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ford Werke GmbH
Original Assignee
Ford Werke GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ford Werke GmbH filed Critical Ford Werke GmbH
Application granted granted Critical
Publication of DE3771233D1 publication Critical patent/DE3771233D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
DE8787300271T 1986-01-16 1987-01-13 Geraet zum messen von spannungen in vakuumabscheidungsschichten. Expired - Lifetime DE3771233D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/819,444 US4683758A (en) 1986-01-16 1986-01-16 Device for measuring stresses in vacuum deposition coatings

Publications (1)

Publication Number Publication Date
DE3771233D1 true DE3771233D1 (de) 1991-08-14

Family

ID=25228182

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787300271T Expired - Lifetime DE3771233D1 (de) 1986-01-16 1987-01-13 Geraet zum messen von spannungen in vakuumabscheidungsschichten.

Country Status (5)

Country Link
US (1) US4683758A (de)
EP (1) EP0234693B1 (de)
JP (1) JPS62169029A (de)
CA (1) CA1270524A (de)
DE (1) DE3771233D1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6443735A (en) * 1987-08-12 1989-02-16 Canon Denshi Kk Stress detecting method for thin film
DE8901608U1 (de) * 1989-02-13 1990-04-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 80636 München Vorrichtung zur berührungslosen Erfassung eines Rißstarts bei einer Bruchmechanikprobe
GB2258313B (en) * 1990-04-07 1993-12-15 Richard Dennis Shelton Pressure sensing capacitor, and transducer
GB9007948D0 (en) * 1990-04-07 1990-06-06 Shelton Richard D Designs for low cost,sensitive pressure sensors
DE10022124B4 (de) * 2000-05-06 2010-01-14 Wabco Gmbh Elektronisches Steuergerät
US9053929B1 (en) 2010-05-19 2015-06-09 Corporation For National Research Initiatives Method and system for integrated MEMS and NEMS using deposited thin films having pre-determined stress states

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2920480A (en) * 1956-01-18 1960-01-12 Haas Tibor Methods for indicating the expiration of the assigned or safe life of structural members
US3184188A (en) * 1961-06-19 1965-05-18 Bendix Corp Stress sensor and control system for limiting stresses applied to aircraft
US3602041A (en) * 1969-05-28 1971-08-31 Us Army Engine wear life measurement
US3897324A (en) * 1973-06-25 1975-07-29 Honeywell Inc Material deposition masking for microcircuit structures
NL7410780A (nl) * 1973-09-07 1975-03-11 Kraftwerk Union Ag Inrichting voor het bepalen van oppervlaktevari-
US4079508A (en) * 1975-08-13 1978-03-21 The Board Of Trustees Of The Leland Stanford Junior University Miniature absolute pressure transducer assembly and method
US4277814A (en) * 1979-09-04 1981-07-07 Ford Motor Company Semiconductor variable capacitance pressure transducer assembly
US4386453A (en) * 1979-09-04 1983-06-07 Ford Motor Company Method for manufacturing variable capacitance pressure transducers
US4261086A (en) * 1979-09-04 1981-04-14 Ford Motor Company Method for manufacturing variable capacitance pressure transducers
US4446447A (en) * 1980-12-22 1984-05-01 Ford Motor Company Circuit for converting pressure variation to frequency variation
US4377851A (en) * 1980-12-22 1983-03-22 Ford Motor Company Method for calibrating a transducer for converting pressure variation to frequency variation
US4525264A (en) * 1981-12-07 1985-06-25 Ford Motor Company Cylindrical post magnetron sputtering system
US4550611A (en) * 1984-01-05 1985-11-05 Motorola, Inc. Electronic pressure transducer

Also Published As

Publication number Publication date
US4683758A (en) 1987-08-04
EP0234693A2 (de) 1987-09-02
JPH0581850B2 (de) 1993-11-16
CA1270524A (en) 1990-06-19
EP0234693A3 (en) 1989-06-14
EP0234693B1 (de) 1991-07-10
JPS62169029A (ja) 1987-07-25

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Legal Events

Date Code Title Description
8320 Willingness to grant licences declared (paragraph 23)
8364 No opposition during term of opposition
8330 Complete disclaimer