DE3769979D1 - Elektromagnetischer streuenergiediskriminator fuer elektrooptische inspektionssysteme. - Google Patents

Elektromagnetischer streuenergiediskriminator fuer elektrooptische inspektionssysteme.

Info

Publication number
DE3769979D1
DE3769979D1 DE8787906491T DE3769979T DE3769979D1 DE 3769979 D1 DE3769979 D1 DE 3769979D1 DE 8787906491 T DE8787906491 T DE 8787906491T DE 3769979 T DE3769979 T DE 3769979T DE 3769979 D1 DE3769979 D1 DE 3769979D1
Authority
DE
Germany
Prior art keywords
electrooptic
inspection systems
energy discriminator
scatter energy
electromagnetic scatter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787906491T
Other languages
English (en)
Inventor
Mitchell Fulkerson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/898,561 external-priority patent/US4771182A/en
Application filed by General Electric Co filed Critical General Electric Co
Application granted granted Critical
Publication of DE3769979D1 publication Critical patent/DE3769979D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

DE8787906491T 1986-08-21 1987-08-12 Elektromagnetischer streuenergiediskriminator fuer elektrooptische inspektionssysteme. Expired - Fee Related DE3769979D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/898,561 US4771182A (en) 1986-08-21 1986-08-21 Spurious electromagnetic energy discriminator for electro-optical inspection systems
PCT/US1987/001927 WO1988001367A2 (en) 1986-08-21 1987-08-12 Spurious electromagnetic energy discriminator for electro-optical inspection systems

Publications (1)

Publication Number Publication Date
DE3769979D1 true DE3769979D1 (de) 1991-06-13

Family

ID=26776097

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787906491T Expired - Fee Related DE3769979D1 (de) 1986-08-21 1987-08-12 Elektromagnetischer streuenergiediskriminator fuer elektrooptische inspektionssysteme.

Country Status (1)

Country Link
DE (1) DE3769979D1 (de)

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8128 New person/name/address of the agent

Representative=s name: VOIGT, R., DIPL.-ING., PAT.-ANW., 6232 BAD SODEN

8339 Ceased/non-payment of the annual fee