DE3769979D1 - Elektromagnetischer streuenergiediskriminator fuer elektrooptische inspektionssysteme. - Google Patents
Elektromagnetischer streuenergiediskriminator fuer elektrooptische inspektionssysteme.Info
- Publication number
- DE3769979D1 DE3769979D1 DE8787906491T DE3769979T DE3769979D1 DE 3769979 D1 DE3769979 D1 DE 3769979D1 DE 8787906491 T DE8787906491 T DE 8787906491T DE 3769979 T DE3769979 T DE 3769979T DE 3769979 D1 DE3769979 D1 DE 3769979D1
- Authority
- DE
- Germany
- Prior art keywords
- electrooptic
- inspection systems
- energy discriminator
- scatter energy
- electromagnetic scatter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/898,561 US4771182A (en) | 1986-08-21 | 1986-08-21 | Spurious electromagnetic energy discriminator for electro-optical inspection systems |
PCT/US1987/001927 WO1988001367A2 (en) | 1986-08-21 | 1987-08-12 | Spurious electromagnetic energy discriminator for electro-optical inspection systems |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3769979D1 true DE3769979D1 (de) | 1991-06-13 |
Family
ID=26776097
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8787906491T Expired - Fee Related DE3769979D1 (de) | 1986-08-21 | 1987-08-12 | Elektromagnetischer streuenergiediskriminator fuer elektrooptische inspektionssysteme. |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE3769979D1 (de) |
-
1987
- 1987-08-12 DE DE8787906491T patent/DE3769979D1/de not_active Expired - Fee Related
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8128 | New person/name/address of the agent |
Representative=s name: VOIGT, R., DIPL.-ING., PAT.-ANW., 6232 BAD SODEN |
|
8339 | Ceased/non-payment of the annual fee |