DE3767104D1 - Vorrichtung und verfahren zur erzeugung eines nahezu mono-energetischen, hochdichten strahles von atomaren partikeln hoher geschwindigkeit. - Google Patents

Vorrichtung und verfahren zur erzeugung eines nahezu mono-energetischen, hochdichten strahles von atomaren partikeln hoher geschwindigkeit.

Info

Publication number
DE3767104D1
DE3767104D1 DE8787401935T DE3767104T DE3767104D1 DE 3767104 D1 DE3767104 D1 DE 3767104D1 DE 8787401935 T DE8787401935 T DE 8787401935T DE 3767104 T DE3767104 T DE 3767104T DE 3767104 D1 DE3767104 D1 DE 3767104D1
Authority
DE
Germany
Prior art keywords
atomaric
energetic
mono
particles
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787401935T
Other languages
English (en)
Inventor
George E Caledonia
Robert H Krech
Byron D Green
Anthony N Pirri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Physical Sciences Corp
Original Assignee
Physical Sciences Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Physical Sciences Corp filed Critical Physical Sciences Corp
Application granted granted Critical
Publication of DE3767104D1 publication Critical patent/DE3767104D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/02—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
    • H05H1/22—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma for injection heating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H3/00—Production or acceleration of neutral particle beams, e.g. molecular or atomic beams

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Particle Accelerators (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
  • Plasma Technology (AREA)
DE8787401935T 1986-08-26 1987-08-26 Vorrichtung und verfahren zur erzeugung eines nahezu mono-energetischen, hochdichten strahles von atomaren partikeln hoher geschwindigkeit. Expired - Fee Related DE3767104D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/900,616 US4894511A (en) 1986-08-26 1986-08-26 Source of high flux energetic atoms

Publications (1)

Publication Number Publication Date
DE3767104D1 true DE3767104D1 (de) 1991-02-07

Family

ID=25412803

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787401935T Expired - Fee Related DE3767104D1 (de) 1986-08-26 1987-08-26 Vorrichtung und verfahren zur erzeugung eines nahezu mono-energetischen, hochdichten strahles von atomaren partikeln hoher geschwindigkeit.

Country Status (6)

Country Link
US (1) US4894511A (de)
EP (1) EP0262012B1 (de)
JP (1) JPH0787115B2 (de)
CA (1) CA1281819C (de)
DE (1) DE3767104D1 (de)
FR (1) FR2604050A1 (de)

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US5059866A (en) * 1987-10-01 1991-10-22 Apricot S.A. Method and apparatus for cooling electrons, ions or plasma
US4940893A (en) * 1988-03-18 1990-07-10 Apricot S.A. Method and apparatus for forming coherent clusters
IT1237628B (it) * 1989-10-03 1993-06-12 Michele Gennaro De Metodo per misurare l'efficienza di una combustione e apparecchio per attuare il metodo.
JP2568006B2 (ja) * 1990-08-23 1996-12-25 インターナショナル・ビジネス・マシーンズ・コーポレイション イオン化空気により対象物から電荷を放電させる方法及びそのための装置
GB9119919D0 (en) * 1991-09-18 1991-10-30 Boc Group Plc Improved apparatus for the thermic cutting of materials
US5883005A (en) * 1994-03-25 1999-03-16 California Institute Of Technology Semiconductor etching by hyperthermal neutral beams
US5705785A (en) * 1994-12-30 1998-01-06 Plasma-Laser Technologies Ltd Combined laser and plasma arc welding torch
US5631462A (en) * 1995-01-17 1997-05-20 Lucent Technologies Inc. Laser-assisted particle analysis
US5821548A (en) * 1996-12-20 1998-10-13 Technical Visions, Inc. Beam source for production of radicals and metastables
US6454877B1 (en) * 1998-01-02 2002-09-24 Dana Corporation Laser phase transformation and ion implantation in metals
US6011267A (en) * 1998-02-27 2000-01-04 Euv Llc Erosion resistant nozzles for laser plasma extreme ultraviolet (EUV) sources
US6911649B2 (en) * 2002-06-21 2005-06-28 Battelle Memorial Institute Particle generator
JP4660713B2 (ja) * 2003-07-15 2011-03-30 財団法人新産業創造研究機構 細胞接着材料
US7799273B2 (en) 2004-05-06 2010-09-21 Smp Logic Systems Llc Manufacturing execution system for validation, quality and risk assessment and monitoring of pharmaceutical manufacturing processes
US7444197B2 (en) 2004-05-06 2008-10-28 Smp Logic Systems Llc Methods, systems, and software program for validation and monitoring of pharmaceutical manufacturing processes
US7572741B2 (en) * 2005-09-16 2009-08-11 Cree, Inc. Methods of fabricating oxide layers on silicon carbide layers utilizing atomic oxygen
US7723678B2 (en) * 2006-04-04 2010-05-25 Agilent Technologies, Inc. Method and apparatus for surface desorption ionization by charged particles
US20080116055A1 (en) * 2006-11-17 2008-05-22 Lineton Warran B Laser passivation of metal surfaces
JP2008179495A (ja) * 2007-01-23 2008-08-07 Kansai Electric Power Co Inc:The オゾン発生方法およびオゾン発生装置
WO2011030326A1 (en) * 2009-09-11 2011-03-17 Ramot At Tel-Aviv University Ltd. System and method for generating a beam of particles
CN110487708A (zh) * 2019-08-28 2019-11-22 哈尔滨工业大学 一种远紫外激光诱发原子氧装置及方法

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US3300000A (en) * 1965-07-09 1967-01-24 Fairchild Hiller Corp Control system for infinitely variable transmission
US3492074A (en) * 1967-11-24 1970-01-27 Hewlett Packard Co Atomic absorption spectroscopy system having sample dissociation energy control
FR2102741A5 (de) * 1970-08-19 1972-04-07 Commissariat Energie Atomique
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US3992685A (en) * 1972-09-05 1976-11-16 Trw Systems & Energy Chemical laser pump
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US3877334A (en) * 1973-11-23 1975-04-15 Gerber Garment Technology Inc Method and apparatus for cutting sheet material with a fluid jet
US4001136A (en) * 1974-12-30 1977-01-04 The United States Of America As Represented By The Secretary Of The Air Force Fluorine generating formulation for use in chemical lasers
FR2297665A1 (fr) * 1975-01-15 1976-08-13 Comp Generale Electricite Dispositif de separation d'isotopes
US4091256A (en) * 1975-01-16 1978-05-23 The United States Of America As Represented By The Secretary Of The Air Force Pulsed atomic beam apparatus
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US4099140A (en) * 1975-03-14 1978-07-04 Minister Of National Defence Chemical laser process and apparatus
US4036012A (en) * 1976-02-18 1977-07-19 The United States Of America As Represented By The Secretary Of The Army Laser powered rocket engine using a gasdynamic window
US4119509A (en) * 1976-06-11 1978-10-10 Massachusetts Institute Of Technology Method and apparatus for isotope separation from a gas stream
US4129772A (en) * 1976-10-12 1978-12-12 Wisconsin Alumni Research Foundation Electrode structures for high energy high temperature plasmas
US4145668A (en) * 1977-03-31 1979-03-20 Hughes Aircraft Company Optical resonance pumped transfer laser with high multiline photon-to-single-line photon conversion efficiency
US4102950A (en) * 1977-08-12 1978-07-25 Rockwell International Corporation Method for producing singlet molecular oxygen
US4182663A (en) * 1978-03-13 1980-01-08 Vaseen Vesper A Converting oxygen to ozone by U.V. radiation of a halogen saturated hydrocarbon liquid containing dissolved or absorbed oxygen
US4208129A (en) * 1978-06-30 1980-06-17 The United States Of America As Represented By The Secretary Of The Air Force Sensitive laser spectroscopy measurement system
US4214962A (en) * 1978-07-21 1980-07-29 Pincon Andrew J Activated oxygen product and water treatment using same
US4331856A (en) * 1978-10-06 1982-05-25 Wellman Thermal Systems Corporation Control system and method of controlling ion nitriding apparatus
DE2844002A1 (de) * 1978-10-09 1980-05-14 Leybold Heraeus Gmbh & Co Kg Verfahren und vorrichtung zur analyse von fluiden
US4199419A (en) * 1978-12-28 1980-04-22 The United State Of America As Represented By The Department Of Energy Photochemical method for generating superoxide radicals (O2-) in aqueous solutions
US4252623A (en) * 1979-10-03 1981-02-24 Vaseen Vesper A Ozone production via laser light energy
US4360923A (en) * 1979-12-03 1982-11-23 The Boeing Company Reagent tailoring for a chemical gas laser to obtain uniform initial chemical reaction rate
US4327338A (en) * 1980-05-09 1982-04-27 The United States Of America As Represented By The Secretary Of The Army Nuclear activated cw chemical laser
US4299860A (en) * 1980-09-08 1981-11-10 The United States Of America As Represented By The Secretary Of The Navy Surface hardening by particle injection into laser melted surface
US4427636A (en) * 1980-10-27 1984-01-24 Westvaco Corporation Method and apparatus for making ozone
US4426843A (en) * 1980-11-12 1984-01-24 United Technologies Corporation CO2 Coupling material
FR2504727A1 (fr) * 1981-04-28 1982-10-29 Commissariat Energie Atomique Dispositif de traitement d'un echantillon par faisceau electronique impulsionnel
JPS59135730A (ja) * 1983-01-24 1984-08-04 Hitachi Ltd 表面改質装置
US4536252A (en) * 1985-02-07 1985-08-20 The United States Of America As Represented By The Secretary Of The Army Laser-induced production of nitrosyl fluoride for etching of semiconductor surfaces

Also Published As

Publication number Publication date
CA1281819C (en) 1991-03-19
JPS6372100A (ja) 1988-04-01
US4894511A (en) 1990-01-16
FR2604050B1 (de) 1993-02-26
JPH0787115B2 (ja) 1995-09-20
FR2604050A1 (fr) 1988-03-18
EP0262012B1 (de) 1990-12-27
EP0262012A1 (de) 1988-03-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee