DE3763253D1 - Resonatorvorrichtung. - Google Patents

Resonatorvorrichtung.

Info

Publication number
DE3763253D1
DE3763253D1 DE8787302706T DE3763253T DE3763253D1 DE 3763253 D1 DE3763253 D1 DE 3763253D1 DE 8787302706 T DE8787302706 T DE 8787302706T DE 3763253 T DE3763253 T DE 3763253T DE 3763253 D1 DE3763253 D1 DE 3763253D1
Authority
DE
Germany
Prior art keywords
resonator device
resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787302706T
Other languages
English (en)
Inventor
John Christopher Greenwood
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nortel Networks Ltd
Original Assignee
STC PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STC PLC filed Critical STC PLC
Application granted granted Critical
Publication of DE3763253D1 publication Critical patent/DE3763253D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0013—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a string
    • G01L9/0014—Optical excitation or measuring of vibrations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/10—Measuring force or stress, in general by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings
    • G01L1/103—Measuring force or stress, in general by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings optical excitation or measuring of vibrations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G01L1/183—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material by measuring variations of frequency of vibrating piezo-resistive material
    • G01L1/186—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material by measuring variations of frequency of vibrating piezo-resistive material optical excitation or measuring of vibrations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
    • G01L9/002—Optical excitation or measuring
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S73/00—Measuring and testing
    • Y10S73/01—Vibration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
DE8787302706T 1986-04-26 1987-03-30 Resonatorvorrichtung. Expired - Fee Related DE3763253D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB868610253A GB8610253D0 (en) 1986-04-26 1986-04-26 Resonator device

Publications (1)

Publication Number Publication Date
DE3763253D1 true DE3763253D1 (de) 1990-07-19

Family

ID=10596901

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787302706T Expired - Fee Related DE3763253D1 (de) 1986-04-26 1987-03-30 Resonatorvorrichtung.

Country Status (5)

Country Link
US (1) US4813271A (de)
EP (1) EP0244086B1 (de)
DE (1) DE3763253D1 (de)
GB (2) GB8610253D0 (de)
NO (1) NO167602C (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2197069B (en) * 1986-11-03 1990-10-24 Stc Plc Sensor device
GB8701556D0 (en) * 1987-01-24 1987-02-25 Schlumberger Electronics Uk Sensors
GB2215052B (en) * 1988-02-13 1992-02-12 Stc Plc Temperature sensor
GB2215053B (en) * 1988-02-13 1991-09-11 Stc Plc Transducer device
JPH07104217B2 (ja) * 1988-05-27 1995-11-13 横河電機株式会社 振動式トランスデューサとその製造方法
FR2639114B1 (fr) * 1988-05-27 1994-02-04 Yokogawa Electric Corp Transducteur de type vibrant servant a mesurer une grandeur physique associee a une deformation
GB2225854B (en) * 1988-12-08 1992-08-05 Marconi Gec Ltd Torque sensor
US4945773A (en) * 1989-03-06 1990-08-07 Ford Motor Company Force transducer etched from silicon
US5060526A (en) * 1989-05-30 1991-10-29 Schlumberger Industries, Inc. Laminated semiconductor sensor with vibrating element
EP0419021A3 (en) * 1989-08-30 1991-10-09 Schlumberger Industries Limited Sensors with vibrating elements
HU212353B (en) * 1990-02-22 1996-06-28 Istvan Almasi Path-frequency signal transducer
US5090254A (en) * 1990-04-11 1992-02-25 Wisconsin Alumni Research Foundation Polysilicon resonating beam transducers
US5188983A (en) * 1990-04-11 1993-02-23 Wisconsin Alumni Research Foundation Polysilicon resonating beam transducers and method of producing the same
DE69105809T2 (de) * 1990-05-10 1995-05-11 Yokogawa Electric Corp Druckaufnehmer mit schwingendem Element.
FR2664979B1 (fr) * 1990-07-20 1992-11-06 Sextant Avionique Micro-capteur de pression.
GB9018148D0 (en) * 1990-08-17 1990-10-03 De Beers Ind Diamond Vibration rod transducer
US5101664A (en) * 1990-10-15 1992-04-07 United Technologies Corporation Optical pressure transducer
GB9105799D0 (en) * 1991-03-19 1991-06-12 Lucas Ind Plc Vibrating sensor
US5338929A (en) * 1992-03-30 1994-08-16 Shell Oil Company Micromachined sensor device using a beam of light with a frequency swept modulated intensity to activate at least two resonance modes of the sensor element
US5274345A (en) * 1992-05-13 1993-12-28 Andersen Laboratories Dual function reflector structures for interdigital saw transducer
DE4332653C1 (de) * 1993-09-24 1994-09-01 Hahn Schickard Ges Monolithisch integriertes Halbleiterelement, dessen Verwendung sowie Verfahren zur Herstellung eines solchen Halbleiterelementes
GB9321398D0 (en) * 1993-10-16 1993-12-08 Lucas Ind Plc Differential pressure transducer
US5473944A (en) * 1994-08-18 1995-12-12 Kulite Semi Conductor Products, Inc. Seam pressure sensor employing dielectically isolated resonant beams and related method of manufacture
JP3689958B2 (ja) * 1995-02-23 2005-08-31 マツダ株式会社 応力検出方法およびその実施に使用する装置
US5528939A (en) * 1995-03-21 1996-06-25 Martin; Jacob H. Micromechanical pressure gauge having extended sensor range
DE19643342A1 (de) * 1996-10-21 1998-04-30 Bosch Gmbh Robert Verfahren und Vorrichtung zum Messen einer physikalischen Größe
US5939635A (en) * 1997-12-02 1999-08-17 Varian Inc. Micromechanical pressure sensor-with improved range
US6085594A (en) * 1998-09-04 2000-07-11 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration High resolution and large dynamic range resonant pressure sensor based on Q-factor measurement
US6182513B1 (en) 1998-12-23 2001-02-06 Radi Medical Systems Ab Resonant sensor and method of making a pressure sensor comprising a resonant beam structure
FR2824909B1 (fr) * 2001-05-17 2003-09-05 Sagem Capteur de force a poutre vibrante et accelerometre en faisant application
JP4320593B2 (ja) * 2002-03-21 2009-08-26 トランセンス テクノロジーズ ピーエルシー Ｓａｗデバイスと併用される圧力モニター
GB2470398B (en) * 2009-05-21 2014-03-19 Ge Infrastructure Sensing Inc A resonant sensor for measuring the pressure of a fluid
GB2508908B (en) * 2012-12-14 2017-02-15 Gen Electric Resonator device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4321500A (en) * 1979-12-17 1982-03-23 Paroscientific, Inc. Longitudinal isolation system for flexurally vibrating force transducers
FR2563626B1 (fr) * 1980-11-28 1986-08-01 Onera (Off Nat Aerospatiale) Perfectionnements aux transducteurs a lame vibrante
JPS58115336A (ja) * 1981-12-29 1983-07-09 Matsushita Electric Works Ltd 圧力計
GB2115551B (en) * 1982-02-09 1985-11-13 Itt Ind Ltd Load sensor
GB2121953B (en) * 1982-06-10 1985-09-04 Itt Ind Ltd Improvements in transducers
JPS59128405A (ja) * 1983-01-13 1984-07-24 Yokogawa Hokushin Electric Corp 水晶歪ゲ−ジ
GB8323685D0 (en) * 1983-09-03 1983-10-05 Gen Electric Co Plc Monitoring displacement
GB8418914D0 (en) * 1984-07-25 1984-08-30 Standard Telephones Cables Ltd Transducer
US4567395A (en) * 1984-10-26 1986-01-28 Texas Instruments Incorporated Piezoelectric pressure transmitter for an internal combustion engine
US4614119A (en) * 1985-03-08 1986-09-30 The Foxboro Company Resonant hollow beam and method

Also Published As

Publication number Publication date
NO871559L (no) 1987-10-27
GB8707601D0 (en) 1987-05-07
GB2189601B (en) 1989-12-28
NO167602B (no) 1991-08-12
EP0244086B1 (de) 1990-06-13
EP0244086A3 (en) 1989-07-19
GB8610253D0 (en) 1986-05-29
NO871559D0 (no) 1987-04-13
GB2189601A (en) 1987-10-28
US4813271A (en) 1989-03-21
EP0244086A2 (de) 1987-11-04
NO167602C (no) 1991-11-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: NORTHERN TELECOM LTD., MONTREAL, QUEBEC, CA

8328 Change in the person/name/address of the agent

Free format text: KOCH, G., DIPL.-ING. HAIBACH, T., DIPL.-PHYS. DR.RER.NAT. FELDKAMP, R., DIPL.-ING., PAT.-ANWAELTE, 80339 MUENCHEN

8339 Ceased/non-payment of the annual fee