DE3751209D1 - Deposition and dopants useful in the manufacture of hydrogenated, amorphous silicon alloys for photovoltaic and other semiconductor devices. - Google Patents
Deposition and dopants useful in the manufacture of hydrogenated, amorphous silicon alloys for photovoltaic and other semiconductor devices.Info
- Publication number
- DE3751209D1 DE3751209D1 DE3751209T DE3751209T DE3751209D1 DE 3751209 D1 DE3751209 D1 DE 3751209D1 DE 3751209 T DE3751209 T DE 3751209T DE 3751209 T DE3751209 T DE 3751209T DE 3751209 D1 DE3751209 D1 DE 3751209D1
- Authority
- DE
- Germany
- Prior art keywords
- photovoltaic
- useful
- amorphous silicon
- silicon alloys
- fabrication
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 5
- 229910045601 alloy Inorganic materials 0.000 title abstract 4
- 239000000956 alloy Substances 0.000 title abstract 4
- 229910021417 amorphous silicon Inorganic materials 0.000 title abstract 4
- 239000002019 doping agent Substances 0.000 title abstract 3
- 230000008021 deposition Effects 0.000 title abstract 2
- 239000004065 semiconductor Substances 0.000 title 1
- 229910052736 halogen Inorganic materials 0.000 abstract 4
- 125000004429 atom Chemical group 0.000 abstract 3
- 150000002367 halogens Chemical group 0.000 abstract 3
- 229910052739 hydrogen Inorganic materials 0.000 abstract 3
- 239000001257 hydrogen Substances 0.000 abstract 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 abstract 3
- 239000000203 mixture Chemical group 0.000 abstract 3
- 230000015572 biosynthetic process Effects 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052787 antimony Inorganic materials 0.000 abstract 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 abstract 1
- 229910052785 arsenic Inorganic materials 0.000 abstract 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 abstract 1
- 229910052797 bismuth Inorganic materials 0.000 abstract 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 abstract 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 abstract 1
- 125000005843 halogen group Chemical group 0.000 abstract 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
- H01L31/202—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
- H01L31/202—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic Table
- H01L31/204—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic Table including AIVBIV alloys, e.g. SiGe, SiC
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Electromagnetism (AREA)
- Photovoltaic Devices (AREA)
- Silicon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Compounds having the formula (MX3)n M'X4-n wherein M and M' are different Group 4A atoms, at least one of M and M' is silicon, X is hydrogen, halogen or mixtures thereof, and n is an integer between 1 and 4, inclusive, are useful as deposition feedstock materials in the formation of hydrogenated amorphous silicon alloys useful in the fabrication of photovoltaic and other electronically active devices. Dopants having the formula (SiX3)m L X3-m wherein L is a Group 5A atom selected from the group of phosphorous, arsenic, antimony and bismuth, X is hydrogen, halogen or mixtures thereof and m is an integer between 1 and 3, inclusive, are useful in the fabrication of negatively-doped hydrogenated amorphous silicon alloys useful in the fabrication of photovoltaic and other electronically active devices. Dopants having the formula YJX2 wherein Y is halogen or carbonyl, J is a Group 3A atom and X is hydrogen, halogen or mixtures thereof, are useful in the formation of postively-doped hydrogenated amorphous silicon alloys useful in the fabrication of photovoltaic and other electronically active devices.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US83007386A | 1986-02-18 | 1986-02-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3751209D1 true DE3751209D1 (en) | 1995-05-11 |
DE3751209T2 DE3751209T2 (en) | 1995-08-10 |
Family
ID=25256250
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3751209T Expired - Fee Related DE3751209T2 (en) | 1986-02-18 | 1987-02-13 | Deposition and dopants useful in the manufacture of hydrogenated, amorphous silicon alloys for photovoltaic and other semiconductor devices. |
Country Status (12)
Country | Link |
---|---|
EP (1) | EP0233613B1 (en) |
JP (1) | JPH06103667B2 (en) |
KR (1) | KR910001876B1 (en) |
CN (1) | CN1024929C (en) |
AT (1) | ATE120884T1 (en) |
AU (3) | AU604227B2 (en) |
CA (1) | CA1332343C (en) |
DE (1) | DE3751209T2 (en) |
EG (1) | EG18056A (en) |
ES (1) | ES2074041T3 (en) |
IE (1) | IE870367L (en) |
IN (1) | IN168381B (en) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EG18056A (en) * | 1986-02-18 | 1991-11-30 | Solarex Corp | Dispositif feedstock materials useful in the fabrication of hydrogenated amorphous silicon alloys for photo-voltaic devices and other semiconductor devices |
EP0407088B1 (en) * | 1989-06-28 | 1998-05-06 | Mitsui Chemicals, Inc. | Method of forming an amorphous semiconductor film |
DE3942058A1 (en) * | 1989-12-20 | 1991-06-27 | Phototronics Solartechnik Gmbh | New tetra:silyl methane and prepn. from aryl halo-silane - and carbon tetra:halide by redn. halogenation and hydrogenation, for amorphous silicon prodn. |
DE3941997C1 (en) * | 1989-12-20 | 1991-01-24 | Phototronics Solartechnik Gmbh, 8011 Putzbrunn, De | Prepn. of di-, tri- or tetra-silyl-methane - by reacting aryl-halo-silane with di-, tri- or tetra -halo-methane in presence of reducing metal, and reacting prod. with hydrogen halide |
EP1092755A4 (en) * | 1999-03-30 | 2004-12-22 | Jsr Corp | Coating composition |
EP1421607A2 (en) | 2001-02-12 | 2004-05-26 | ASM America, Inc. | Improved process for deposition of semiconductor films |
US7186630B2 (en) | 2002-08-14 | 2007-03-06 | Asm America, Inc. | Deposition of amorphous silicon-containing films |
WO2006031240A1 (en) * | 2004-09-14 | 2006-03-23 | Arizona Board Of Regents | Hydride compounds with silicon and germanium core atoms and method of synthesizing same |
US7312128B2 (en) * | 2004-12-01 | 2007-12-25 | Applied Materials, Inc. | Selective epitaxy process with alternating gas supply |
WO2007062056A2 (en) * | 2005-11-23 | 2007-05-31 | The Arizona Board Of Regents, A Body Corporate Acting On Behalf Of Arizona State University | Silicon-germanium hydrides and methods for making and using same |
EP1918966A1 (en) | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Method for forming a film with a graded bandgap by deposition of an amorphous material from a plasma |
EP1919264A1 (en) | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Device for forming a film by deposition from a plasma |
EP1918414A1 (en) | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Film deposition of amorphous films with a graded bandgap by electron cyclotron resonance |
EP1923483A1 (en) | 2006-11-02 | 2008-05-21 | Dow Corning Corporation | Deposition of amorphous silicon films by electron cyclotron resonance |
EP1918967B1 (en) | 2006-11-02 | 2013-12-25 | Dow Corning Corporation | Method of forming a film by deposition from a plasma |
EP1918965A1 (en) | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Method and apparatus for forming a film by deposition from a plasma |
DE102008016696A1 (en) | 2007-03-30 | 2008-12-11 | Rev Renewable Energy Ventures, Inc. | Plasma-assisted organofunctionalization of silicon tetrahalides or organohalosilanes |
KR101501700B1 (en) * | 2007-04-02 | 2015-03-11 | 아리조나 보드 오브 리전트스, 아리조나주의 아리조나 주립대 대행법인 | Novel methods for making and using halosilylgermanes |
NO342873B1 (en) | 2008-02-11 | 2018-08-20 | Inst Energiteknik | Semiconductor Component |
CN103628044A (en) * | 2013-11-07 | 2014-03-12 | 中山市创科科研技术服务有限公司 | Device for preparing alpha-SiH film by photochemical vapor deposition |
CN109686802A (en) * | 2018-11-09 | 2019-04-26 | 惠州凯珑光电有限公司 | A kind of packaging technology of electronic component and mould group |
CN115117201B (en) * | 2022-06-24 | 2024-03-12 | 英利能源发展有限公司 | Silicon wafer phosphorus or boron doping method |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4226897A (en) * | 1977-12-05 | 1980-10-07 | Plasma Physics Corporation | Method of forming semiconducting materials and barriers |
FR2485810A1 (en) * | 1980-06-24 | 1981-12-31 | Thomson Csf | PROCESS FOR PRODUCING A LAYER CONTAINING SILICON AND PHOTOELECTRIC CONVERSION DEVICE USING THE SAME |
JPS59182521A (en) * | 1983-04-01 | 1984-10-17 | Mitsui Toatsu Chem Inc | Formation of silicon hydrite thin film |
JPS59200248A (en) * | 1983-04-28 | 1984-11-13 | Canon Inc | Production of image forming member |
DE3429899A1 (en) * | 1983-08-16 | 1985-03-07 | Canon K.K., Tokio/Tokyo | METHOD FOR FORMING A DEPOSITION FILM |
JPS60117712A (en) * | 1983-11-30 | 1985-06-25 | Toshiba Corp | Forming method of thin film |
JPS60154521A (en) * | 1984-01-23 | 1985-08-14 | Semiconductor Energy Lab Co Ltd | Manufacture of silicon carbide film |
JPH0669029B2 (en) * | 1984-07-25 | 1994-08-31 | 工業技術院長 | Method for forming p-type semiconductor thin film |
US4695331A (en) * | 1985-05-06 | 1987-09-22 | Chronar Corporation | Hetero-augmentation of semiconductor materials |
GB2177119B (en) * | 1985-06-26 | 1989-04-26 | Plessey Co Plc | Organometallic chemical vapour deposition |
IL79612A0 (en) * | 1985-08-09 | 1986-11-30 | American Cyanamid Co | Method and apparatus for the chemical vapor deposition of iii-v semiconductors utilizing organometallic and elemental pnictide sources |
US4690830A (en) * | 1986-02-18 | 1987-09-01 | Solarex Corporation | Activation by dehydrogenation or dehalogenation of deposition feedstock and dopant materials useful in the fabrication of hydrogenated amorphous silicon alloys for photovoltaic devices and other semiconductor devices |
EG18056A (en) * | 1986-02-18 | 1991-11-30 | Solarex Corp | Dispositif feedstock materials useful in the fabrication of hydrogenated amorphous silicon alloys for photo-voltaic devices and other semiconductor devices |
-
1987
- 1987-02-10 EG EG77/87A patent/EG18056A/en active
- 1987-02-12 IE IE721419A patent/IE870367L/en unknown
- 1987-02-13 IN IN123/CAL/87A patent/IN168381B/en unknown
- 1987-02-13 ES ES87102090T patent/ES2074041T3/en not_active Expired - Lifetime
- 1987-02-13 EP EP87102090A patent/EP0233613B1/en not_active Expired - Lifetime
- 1987-02-13 DE DE3751209T patent/DE3751209T2/en not_active Expired - Fee Related
- 1987-02-13 AT AT87102090T patent/ATE120884T1/en active
- 1987-02-16 AU AU68839/87A patent/AU604227B2/en not_active Ceased
- 1987-02-16 CA CA000529799A patent/CA1332343C/en not_active Expired - Fee Related
- 1987-02-17 JP JP62034388A patent/JPH06103667B2/en not_active Expired - Lifetime
- 1987-02-18 CN CN87100729A patent/CN1024929C/en not_active Expired - Fee Related
- 1987-02-18 KR KR1019870001347A patent/KR910001876B1/en not_active IP Right Cessation
-
1990
- 1990-09-24 AU AU63080/90A patent/AU640408B2/en not_active Ceased
- 1990-11-30 AU AU67671/90A patent/AU637852B2/en not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
JPH06103667B2 (en) | 1994-12-14 |
CA1332343C (en) | 1994-10-11 |
KR870008376A (en) | 1987-09-26 |
IE870367L (en) | 1987-08-18 |
DE3751209T2 (en) | 1995-08-10 |
CN1024929C (en) | 1994-06-08 |
IN168381B (en) | 1991-03-23 |
ATE120884T1 (en) | 1995-04-15 |
AU6883987A (en) | 1987-08-20 |
ES2074041T3 (en) | 1995-09-01 |
AU6767190A (en) | 1991-03-14 |
AU604227B2 (en) | 1990-12-13 |
CN87100729A (en) | 1987-11-25 |
AU640408B2 (en) | 1993-08-26 |
EP0233613B1 (en) | 1995-04-05 |
AU6308090A (en) | 1990-12-13 |
AU637852B2 (en) | 1993-06-10 |
EG18056A (en) | 1991-11-30 |
EP0233613A3 (en) | 1990-11-28 |
EP0233613A2 (en) | 1987-08-26 |
KR910001876B1 (en) | 1991-03-28 |
JPS6351680A (en) | 1988-03-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |