DE3744245C1 - Hot pressing process for bonding silicon carbide shaped parts and also silicon carbide intermediary for bonding the shaped parts - Google Patents

Hot pressing process for bonding silicon carbide shaped parts and also silicon carbide intermediary for bonding the shaped parts

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Publication number
DE3744245C1
DE3744245C1 DE19873744245 DE3744245A DE3744245C1 DE 3744245 C1 DE3744245 C1 DE 3744245C1 DE 19873744245 DE19873744245 DE 19873744245 DE 3744245 A DE3744245 A DE 3744245A DE 3744245 C1 DE3744245 C1 DE 3744245C1
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Prior art keywords
silicon carbide
shaped parts
bonding
hot pressing
titanium
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Expired
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DE19873744245
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German (de)
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Bernd Gottselig
Ernoe Gyarmati
Aristides Naoumidis
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Forschungszentrum Juelich GmbH
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Kernforschungsanlage Juelich GmbH
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Priority to DE19873744245 priority Critical patent/DE3744245C1/en
Priority to US07/287,342 priority patent/US4961529A/en
Priority to AT88121379T priority patent/ATE101385T1/en
Priority to DE88121379T priority patent/DE3887747D1/en
Priority to EP88121379A priority patent/EP0322732B1/en
Application granted granted Critical
Publication of DE3744245C1 publication Critical patent/DE3744245C1/en
Priority to JP63323807A priority patent/JPH01197374A/en
Expired legal-status Critical Current

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    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64Burning or sintering processes
    • C04B35/645Pressure sintering
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    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/003Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
    • C04B37/005Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of glass or ceramic material
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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    • C04B37/00Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/003Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
    • C04B37/006Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of metals or metal salts
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    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658Atmosphere during thermal treatment
    • C04B2235/6582Hydrogen containing atmosphere
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    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/04Ceramic interlayers
    • C04B2237/08Non-oxidic interlayers
    • C04B2237/083Carbide interlayers, e.g. silicon carbide interlayers
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    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12Metallic interlayers
    • C04B2237/122Metallic interlayers based on refractory metals
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    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32Ceramic
    • C04B2237/36Non-oxidic
    • C04B2237/365Silicon carbide
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    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/60Forming at the joining interface or in the joining layer specific reaction phases or zones, e.g. diffusion of reactive species from the interlayer to the substrate or from a substrate to the joining interface, carbide forming at the joining interface
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    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/708Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the interlayers
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    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/72Forming laminates or joined articles comprising at least two interlayers directly next to each other

Abstract

For the bonding of silicon carbide shaped parts, a 1-3 mu m thick titanium layer is applied to at least one of the contact surfaces, after which the parts are joined by hot pressing at 1200-1600@C, in particular 1450-1500@C, and pressing pressures of 5-100 MPa, in particular 15-30 MPa, in reducing protective gas, (in particular Ar/H2 mixtures) for at least 0.5 hour, in particular about 1 hour. For the joining process, use is particularly advantageously made of a SiC intermediary (in particular a ring for binding sections of pipe) fitted to the shaped parts to be bonded and having a thickness of 1-10 mm, which intermediary is coated on both sides with 1-3 mu m of titanium in each case. Under the specified conditions, a titanium carbosilicide of the composition Ti3SiC2 of sufficient plasticity is formed along the joint seam, which compound contributes to the reduction of internal stresses of the composite after joining.

Description

Die Erfindung bezieht sich auf ein Verfahren zum Verbinden von Siliciumcarbidformteilen durch Heißpressen, bei dem vorangehend auf zumindest eine der polierten Paßflächen eine dünne Titanschicht als haftvermittelnde Zwischenschicht aufgebracht wird.The invention relates to a method for joining molded silicon carbide parts by hot pressing, in the foregoing at least one of the polished mating surfaces one thin titanium layer as adhesion-promoting intermediate layer is applied.

Siliciumcarbid ist als Material für Hochtemperaturanwendungen von erheblichem Interesse. Wegen seiner hohen Härte bestehen allerdings Formgebungsschwierigkeiten, und insbesondere kompliziert gestaltete Körper werden daher durch Verbinden von Teilkörpern erzeugt.Silicon carbide is a material for high temperature applications of considerable interest. Because of however, due to its high hardness, there are design difficulties, and especially complicated designed bodies are therefore through Connecting partial bodies created.

Zum Verbinden von Siliciumcarbidformteilen sind bereits unterschiedliche Fügetechniken bekannt, zu denen Fügeverfahren in der Heißpresse gehören, bei denen ggf. haftvermittelnde Schichten längs der Fügenaht vorgesehen werden.For joining molded silicon carbide parts are already different joining techniques known, to which joining process in the hot press belong, where appropriate, adhesion-promoting layers can be provided along the seam.

So wird in der DE-PS 30 03 186 ein Verfahren beschrieben, bei dem freies Silicium enthaltende Oberflächen durch Diffusionsschweißen bis ca. 1400°C bei Drücken von z. B. 400 bar miteinander verbunden werden. A method is described in DE-PS 30 03 186 described in which contains free silicon Surfaces by diffusion welding up to approx. 1400 ° C when pressing z. B. 400 bar with each other get connected.  

Gemäß der DE-OS 35 18 710 werden aus drucklos gesintertem SiC oder heißgepreßtem SiC bestehende Formteile in der Heißpresse miteinander verbunden, wobei auf zumindest eine der polierten Paßflächen eine aktivierend wirkende Schicht eines Carbid- und/oder Silicidbildners der Gruppe Ag, Al, Au, B, Be, Co, Cr, Cu, Fe, Mg, Mn, Mo, Nb, Ni, Pd, Pt, Ti, V, W und Zr in maximal 1 µm Schichtdicke aufgebracht wird.According to DE-OS 35 18 710 are depressurized sintered SiC or hot pressed SiC Molded parts joined together in the hot press, being on at least one of the polished mating surfaces an activating layer of a Carbide and / or silicide formers of the group Ag, Al, Au, B, Be, Co, Cr, Cu, Fe, Mg, Mn, Mo, Nb, Ni, Pd, Pt, Ti, V, W and Zr in maximum 1 µm layer thickness is applied.

In der DE-PS 36 08 559 wird ein Verfahren zum Verbinden von Siliciumcarbidformteilen in der Heißpresse beschrieben, bei dem längs der Fügenaht eine haftvermittelnde Schicht aus einer Kupfer oder Kobalt enthaltenden Manganlegierung vorgesehen wird, die zusätzlich Cr, Ti, Zr, Fe, Ni und/oder Ta aufweisen kann.In DE-PS 36 08 559 a method for Joining silicon carbide moldings in the Hot press described in which along the seam an adhesion-promoting layer made of a copper or manganese alloy containing cobalt which is additionally Cr, Ti, Zr, Fe, Ni and / or Ta can have.

Schließlich wird in den "Fortschrittsberichten der Deutschen Keramischen Gesellschaft", Band 1 (1985), Heft 2, Seiten 188-198, über Untersuchungen zum Diffusionsschweißen von Siliciumcarbidformteilen berichtet, bei denen als Haftvermittler längs der Fügenaht Carbid- und Silicidbildner wie Pt, Pd, Cu, Ni, Co, Fe, Mn, Cr, Mo, Zr, Nb, Hf, Al, Ti, V, Ta und W in Betracht gezogen wurden.Finally, the "progress reports the German Ceramic Society ", Volume 1 (1985), Issue 2, pages 188-198, about investigations for diffusion welding of silicon carbide molded parts reported where as an adhesion promoter along the seam, carbide and silicide formers like Pt, Pd, Cu, Ni, Co, Fe, Mn, Cr, Mo, Zr, Nb, Hf, Al, Ti, V, Ta and W are considered were.

Temperaturverhalten und Festigkeit der erhaltenen Körper, insbesondere längs der Fügenaht, sind jedoch noch nicht voll befriedigend, und es ist daher Aufgabe der vorliegenden Erfindung, ein Fügeverfahren für Siliciumcarbid vorzusehen, bei dem die Festigkeit des erhaltenen Körpers auch längs der Fügenaht im wesentlichen derjenigen des Grundmaterials entspricht.Temperature behavior and strength of the obtained Bodies, especially along the seam, are however not fully satisfactory, and it is therefore the object of the present invention, to provide a joining process for silicon carbide, in which the strength of the body obtained  also essentially along the seam of the basic material.

Das zu diesem Zweck entwickelte erfindungsgemäße Verfahren ist im wesentlichen dadurch gekennzeichnet, daß eine Titanschicht von 1 bis 3 µm Dicke aufgebracht wird und das Heißpressen bei 1200-1600°C und Preßdrücken von 5 bis 100 MPa in reduzierendem Schutzgas über zumindest 0,5 Stunden erfolgt.The invented for this purpose developed Process is essentially characterized by that a titanium layer of 1 to 3 microns Thickness is applied and the hot pressing at 1200-1600 ° C and pressures from 5 to 100 MPa in reducing protective gas over at least 0.5 hours.

Auf diese Weise entsteht unter den genannten Bedingungen längs der Fügenaht ein Titancarbosilicid der Zusammensetzung Ti₃SiC₂, mit dem die inneren Spannungen des Verbundes nach dem Fügen aufgrund ausreichender Plastizität abgebaut werden, so daß die Biegefestigkeit der gefügten Produkte innerhalb der Standardabweichung der Festigkeitswerte des Grundmaterials liegt, während bislang lediglich 30-50% der Grundfestigkeit erzielt wurden.In this way emerges among the named Conditions along the seam of a titanium carbosilicide the composition Ti₃SiC₂, with the the internal tensions of the composite after Disassembled due to sufficient plasticity be so that the bending strength of the added products within the standard deviation the strength values of the base material lies, whereas so far only 30-50% the basic strength was achieved.

Optimale Fügetemperaturen liegen bei 1450-1500°C, und es werden Preßdrücke zwischen 15 und 30 MPa bevorzugt. Als reduzierendes Schutzgas zur Verhinderung einer Oxidation der Titanschicht eignen sich insbesondere wasserstoffhaltige Argongemische, wobei speziell Ar/4% H₂ verwendet wurde. Andere Schutzgase können ebenfalls vorgesehen werden, sofern sie einen geringen Sauerstoffpartialdruck über dem Titan gewährleisten.Optimal joining temperatures are 1450-1500 ° C, and there are pressures between 15 and 30 MPa preferred. As a reducing protective gas to prevent oxidation of the titanium layer Hydrogen-containing ones are particularly suitable Argon mixtures, specifically Ar / 4% H₂ has been used. Other shielding gases can also provided that they are low Ensure oxygen partial pressure over the titanium.

Die Haltezeiten auf dem Niveau der Fügetemperatur hängen von den Titanschichtdicken ab. Zeiten von zumindest ½ Std. sind für die genannten Dickenbereiche bereits ausreichend. Fügezeiten von 1 Std. ergaben die besten Ergebnisse. Längere Fügezeiten sind nicht erforderlich, aber ohne Nachteil anwendbar.The holding times at the level of the joining temperature depend on the titanium layer thickness. Times  of at least ½ hours are for the above Thickness ranges already sufficient. Joining times of 1 hour gave the best results. Longer Joining times are not necessary, but without Disadvantage applicable.

Die erforderliche Titanschichtdicke liegt für optimale Ergebnisse (besonders auch unter Berücksichtigung eines späteren Einsatzes des Verbundes unter korrosiven Bedingungen) zwischen 1 und 3 µm. Unterhalb von 1 µm Titanschichtdicke wird auch ein Verbund unter den genannten Fügebedingungen erreicht, es können aber die inneren Spannungen des Verbundes beim Abkühlen nicht so gut abgebaut werden. Dickere Schichten aus Titan bewirken gleichfalls, daß ein Verbund mit hohen Festigkeiten erreicht wird, aber die Anfälligkeit des Verbundes im Einsatz unter korrosiven Bedingungen wird erhöht.The required titanium layer thickness is for optimal results (especially taking into account a later deployment of the association under corrosive conditions) between 1 and 3 µm. Below 1 µm titanium layer thickness will also be a composite under the mentioned joining conditions achieved, but the inner Tensions of the composite do not when cooling be broken down so well. Thicker layers out Titan also cause a bond is achieved with high strengths, however the vulnerability of the network in use corrosive conditions is increased.

Die Fügeflächen der zu verbindenden Keramikpartner sollten im polierten Zustand vorliegen (Ra: 0,05-0,1 µm). Im Falle höherer Rauhigkeiten ist darauf zu achten, daß die aufzubringende Titanschicht um mindestens 1 µm dicker ist als die Oberflächenrauhigkeit des Siliciumcarbids.The joining surfaces of the ceramic partners to be joined should be in a polished condition (Ra: 0.05-0.1 µm). In the case of higher roughness care must be taken that the Titanium layer is at least 1 µm thicker than the surface roughness of the silicon carbide.

In den Fügeflächen des Siliciumcarbids sind im allgemeinen nach der Vorbereitung für den Fügeprozeß Verunreinigungen vorhanden, die als Sinterhilfsmittel oder durch vorgeschaltete Reinigungs- oder Mahlprozesse oder auch durch gezielte Infiltration in das Keramikmaterial eingetragen werden. Solche Verunreinigungen üben keinen negativen Einfluß auf das Festigkeitsverhalten des Verbundes aus.In the joining surfaces of the silicon carbide generally after preparing for the Joining process impurities present as sintering aids or through upstream Cleaning or grinding processes or through targeted infiltration into the ceramic material be entered. Such impurities have no negative influence on the strength behavior  of the association.

Besonders zweckmäßig ist die Verbindung von SiC-Teilkörpern unter Zwischenschaltung eines SiC-Zwischenstücks (z. B. eines SiC-Ringes zur Verbindung von Rohrenden), das beidseitig mit dem gewünschten Titanfilm versehen wird. Auf diese Weise kann eine Titanbeschichtung größerer und ggf. unhandlicher Teile vermieden werden.The connection of Partial SiC bodies with the interposition of a SiC intermediate piece (e.g. an SiC ring for Connection of pipe ends), which on both sides with the desired titanium film is provided. On this way a titanium coating can be larger and possibly unwieldy parts can be avoided.

Nachfolgend wird die Erfindung anhand von Beispielen näher erläutert:The invention is illustrated below by means of examples explained in more detail:

Beispiele 1 bis 3Examples 1 to 3

Bei den nachfolgend beschriebenen Beispielen 1 bis 3 wurde jeweils eine rechteckige Platte aus Siliciumcarbid zerteilt. Die einzelnen Teile wurden nach Beschichtung der Trennflächen mit Titan in der Presse wieder miteinander verbunden, wobei unter unterschiedlichen Fügebedingungen, wie unten angegeben, gearbeitet wurde.In the examples described below 1 to 3 each became a rectangular plate cut from silicon carbide. The single ones Parts became after coating the parting surfaces with Titan in the press together again connected, under different joining conditions, worked as indicated below has been.

In jedem Falle wurde die SiC-Platte in drei Teile geschnitten, mit einem mittleren Segment von etwa 3 mm Stärke. Die Schnittflächen wurden geschliffen und poliert und das mittlere Segment in einer Sputteranlage beidseits mit Titan beschichtet. Die wieder zusammengebrachten Teilkörper wurden dann in eine mit Führung versehene Presse gebracht, die so während des Heißpressens bei Einwirkung des Preßstempels ihre gewünschte Position beibehielten.In each case, the SiC plate was divided into three Parts cut, with a middle segment about 3 mm thick. The cut surfaces were ground and polished and the middle segment in a sputtering system with titanium on both sides coated. The brought together again Partial bodies were then in a guided tour provided press that so during the Hot pressing with the action of the press ram maintained their desired position.

Nach Aufbringen eines geringen Vordrucks auf die zu fügenden Teile wurde die Presse geschlossen und der Fügeraum evakuiert. Nach ausreichender Druckverminderung (auf 1,33 Pa) wurde Schutzgas durch die Apparatur geleitet, die dann auf Fügetemperatur aufgeheizt wurde. Nach Ablauf der eigentlichen Fügezeit wurde die Stromzufuhr unterbrochen und die Apparatur der Abkühlung bis auf Raumtemperatur durch Konvektion überlassen. Nach der Abkühlung wurde die gefügte Probe der Presse entnommen und getestet.After applying a small form on the parts to be joined the press was closed  and the joining room evacuated. After sufficient Pressure reduction (to 1.33 Pa) became protective gas passed through the apparatus, which then on Joining temperature was heated. After expiration the actual joining time was the power supply interrupted and the apparatus of cooling left to room temperature by convection. After cooling, the joined sample taken from the press and tested.

Die nachfolgende Tabelle zeigt die unterschiedlichen Verfahrensbedingungen, die bei den Beispielen 1 bis 3 eingehalten wurden.The following table shows the different ones Process conditions in the examples 1 to 3 were observed.

Die bei allen drei Beispielen erzielten Festigkeitswerte entsprachen der Festigkeit des Grundmaterials.The strength values achieved in all three examples corresponded to the strength of the base material.

Claims (7)

1. Verfahren zum Verbinden von Siliciumcarbid-Formteilen durch Heißpressen bei dem vorangehend auf zumindest eine der polierten Paßflächen eine dünne Titanschicht als haftvermittelnde Zwischenschicht aufgebracht wird, dadurch gekennzeichnet, daß eine Titanschicht von 1 bis 3 µm Dicke aufgebracht wird und das Heißpressen bei 1200-1600°C und Preßdrücken von 5 bis 100 MPa in reduzierendem Schutzgas über zumindest 0,5 Stunden erfolgt.1. A method for connecting silicon carbide moldings by hot pressing in which a thin titanium layer is applied as an adhesion-promoting intermediate layer to at least one of the polished mating surfaces, characterized in that a titanium layer of 1 to 3 µm thick is applied and the hot pressing at 1200-1600 ° C and pressures from 5 to 100 MPa in reducing protective gas over at least 0.5 hours. 2. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß das Heißpressen bei 1450-1500°C erfolgt.2. The method according to claim 1, characterized, that the hot pressing takes place at 1450-1500 ° C. 3. Verfahren nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß Preßdrücke zwischen 15 und 30 MPa angewandt werden.3. The method according to claim 1 or 2, characterized, that pressures between 15 and 30 MPa applied will. 4. Verfahren nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, daß eine Fügezeit von einer Stunde gewählt wird.4. The method according to any one of the preceding claims, characterized, that a joining time of one hour is selected. 5. Verfahren nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, daß als reduzierendes Schutzgas wasserstoffhaltiges Argon, insbesondere ein Ar/4%-H₂-Gemisch verwendet wird. 5. The method according to any one of the preceding claims, characterized, that as a reducing protective gas containing hydrogen Argon, especially an Ar / 4% H₂ mixture used becomes.   6. Verfahren nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, daß die Verbindung der Formteile unter Zwischenschaltung eines beidseits mit Titan beschichteten Zwischenstücks aus Siliciumcarbid erfolgt.6. Method according to one of the preceding Expectations, characterized, that the connection of the molded parts with interposition one coated on both sides with titanium Intermediate piece made of silicon carbide he follows. 7. Den Fügeflächen von zu verbindenden Siliciumcarbid-Formteilen angepaßtes SiC-Zwischenstück von 1-10 mm Dicke, das beidseits jeweils mit 1-3 µm Titan beschichtet ist.7. The joining surfaces of to be joined SiC adapter matched to silicon carbide moldings of 1-10 mm thick, both sides is coated with 1-3 µm titanium.
DE19873744245 1987-12-24 1987-12-24 Hot pressing process for bonding silicon carbide shaped parts and also silicon carbide intermediary for bonding the shaped parts Expired DE3744245C1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE19873744245 DE3744245C1 (en) 1987-12-24 1987-12-24 Hot pressing process for bonding silicon carbide shaped parts and also silicon carbide intermediary for bonding the shaped parts
US07/287,342 US4961529A (en) 1987-12-24 1988-12-20 Method and components for bonding a silicon carbide molded part to another such part or to a metallic part
AT88121379T ATE101385T1 (en) 1987-12-24 1988-12-21 METHOD OF JOINING A SILICON CARBIDE PART WITH ANOTHER SILICON CARBIDE OR METAL PART.
DE88121379T DE3887747D1 (en) 1987-12-24 1988-12-21 Method for connecting a silicon carbide molded part to a further molded part made of silicon carbide or metal.
EP88121379A EP0322732B1 (en) 1987-12-24 1988-12-21 Method of joining an article of silicon carbide to another article of silicon carbide or metal
JP63323807A JPH01197374A (en) 1987-12-24 1988-12-23 Method for bonding silicon carbide molded body to silicon carbide or metal molded body

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DE19873744245 DE3744245C1 (en) 1987-12-24 1987-12-24 Hot pressing process for bonding silicon carbide shaped parts and also silicon carbide intermediary for bonding the shaped parts

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3003186C2 (en) * 1980-01-30 1983-01-27 Dornier System Gmbh, 7990 Friedrichshafen Use of diffusion welding to join components made of silicon composite materials
DE3518710A1 (en) * 1985-05-24 1986-11-27 Kernforschungsanlage Jülich GmbH, 5170 Jülich Process for joining silicon carbide mouldings
DE3608559A1 (en) * 1986-03-14 1987-09-17 Kernforschungsanlage Juelich METHOD FOR JOINING SIC MOLDED PARTS WITH CERAMIC OR METAL AND FOR TREATING SISIC SURFACES, AND AN ALLOY ALLOY

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3003186C2 (en) * 1980-01-30 1983-01-27 Dornier System Gmbh, 7990 Friedrichshafen Use of diffusion welding to join components made of silicon composite materials
DE3518710A1 (en) * 1985-05-24 1986-11-27 Kernforschungsanlage Jülich GmbH, 5170 Jülich Process for joining silicon carbide mouldings
DE3608559A1 (en) * 1986-03-14 1987-09-17 Kernforschungsanlage Juelich METHOD FOR JOINING SIC MOLDED PARTS WITH CERAMIC OR METAL AND FOR TREATING SISIC SURFACES, AND AN ALLOY ALLOY

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Fortschrittsberichte der Deutschen Keramischen Gesellschaft, Bd.1, 1985, 2, S.188-198 *

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