DE3672151D1 - Kryopumpe mit refrigerator, deren paneelgeometrie eine hohe wirksamkeit und eine verlaengerte lebensdauer erlaubt. - Google Patents
Kryopumpe mit refrigerator, deren paneelgeometrie eine hohe wirksamkeit und eine verlaengerte lebensdauer erlaubt.Info
- Publication number
- DE3672151D1 DE3672151D1 DE8686830074T DE3672151T DE3672151D1 DE 3672151 D1 DE3672151 D1 DE 3672151D1 DE 8686830074 T DE8686830074 T DE 8686830074T DE 3672151 T DE3672151 T DE 3672151T DE 3672151 D1 DE3672151 D1 DE 3672151D1
- Authority
- DE
- Germany
- Prior art keywords
- cryopum
- refrigerator
- pump
- allows high
- high effectiveness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
- Y10S417/901—Cryogenic pumps
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT09373/85A IT1201263B (it) | 1985-03-26 | 1985-03-26 | Pompa criogenica a refrigeratore con geometria degli scherma atta a raggiungere elevata efficienza e durata prolungata |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3672151D1 true DE3672151D1 (de) | 1990-07-26 |
Family
ID=11129162
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8686830074T Expired - Lifetime DE3672151D1 (de) | 1985-03-26 | 1986-03-25 | Kryopumpe mit refrigerator, deren paneelgeometrie eine hohe wirksamkeit und eine verlaengerte lebensdauer erlaubt. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4691534A (de) |
EP (1) | EP0196281B1 (de) |
DE (1) | DE3672151D1 (de) |
IT (1) | IT1201263B (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4791791A (en) * | 1988-01-20 | 1988-12-20 | Varian Associates, Inc. | Cryosorption surface for a cryopump |
US5092130A (en) * | 1988-11-09 | 1992-03-03 | Mitsubishi Denki Kabushiki Kaisha | Multi-stage cold accumulation type refrigerator and cooling device including the same |
US5251456A (en) * | 1988-11-09 | 1993-10-12 | Mitsubishi Denki Kabushiki Kaisha | Multi-stage cold accumulation type refrigerator and cooling device including the same |
US5293752A (en) * | 1988-11-09 | 1994-03-15 | Mitsubishi Denki Kabushiki Kaisha | Multi-stage cold accumulation type refrigerator and cooling device including the same |
ATE91531T1 (de) * | 1989-02-28 | 1993-07-15 | Leybold Ag | Mit einem zweistufigen refrigerator betriebene kryopumpe. |
WO1993005859A1 (en) * | 1991-09-19 | 1993-04-01 | The United States Of America, As Represented By The Secretary Of The Department Of Health And Human Services | Miniature cryosorption vacuum pump |
JPH10184541A (ja) * | 1996-12-27 | 1998-07-14 | Anelva Corp | 真空排気装置 |
CA2367818C (en) * | 2001-01-18 | 2010-05-11 | Electric Power Research Institute, Inc. | Method and apparatus for renewable mercury sorption |
US7037083B2 (en) | 2003-01-08 | 2006-05-02 | Brooks Automation, Inc. | Radiation shielding coating |
US7313922B2 (en) * | 2004-09-24 | 2008-01-01 | Brooks Automation, Inc. | High conductance cryopump for type III gas pumping |
JP5025492B2 (ja) * | 2005-02-08 | 2012-09-12 | 住友重機械工業株式会社 | 改善されたクライオポンプ |
EP2310681A4 (de) * | 2008-07-01 | 2017-04-12 | Brooks Automation, Inc. | Verfahren und vorrichtung zur bereitstellung von temperaturregelung für eine kryopumpe |
US20100011784A1 (en) * | 2008-07-17 | 2010-01-21 | Sumitomo Heavy Industries, Ltd. | Cryopump louver extension |
UA95153C2 (en) | 2009-12-25 | 2011-07-11 | Анатолий Иванович Степанюк | Ring seal |
US9174144B2 (en) | 2012-04-20 | 2015-11-03 | Sumitomo (Shi) Cryogenics Of America Inc | Low profile cryopump |
US9186601B2 (en) | 2012-04-20 | 2015-11-17 | Sumitomo (Shi) Cryogenics Of America Inc. | Cryopump drain and vent |
GB2596832A (en) * | 2020-07-08 | 2022-01-12 | Edwards Vacuum Llc | Cryopump |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4325220A (en) * | 1979-02-28 | 1982-04-20 | United Technologies Corporation | Cryoadsorption pumps having panels with zeolite plates |
US4212170A (en) * | 1979-04-16 | 1980-07-15 | Oerlikon Buhrle USA Incorporated | Cryopump |
DE3034934A1 (de) * | 1979-09-28 | 1982-04-22 | Varian Associates, Inc., 94303 Palo Alto, Calif. | Kryogenpumpe mit strahlungsschutzschild |
US4295338A (en) * | 1979-10-18 | 1981-10-20 | Varian Associates, Inc. | Cryogenic pumping apparatus with replaceable pumping surface elements |
US4494381A (en) * | 1983-05-13 | 1985-01-22 | Helix Technology Corporation | Cryopump with improved adsorption capacity |
US4530213A (en) * | 1983-06-28 | 1985-07-23 | Air Products And Chemicals, Inc. | Economical and thermally efficient cryopump panel and panel array |
-
1985
- 1985-03-26 IT IT09373/85A patent/IT1201263B/it active
-
1986
- 1986-03-24 US US06/843,102 patent/US4691534A/en not_active Expired - Fee Related
- 1986-03-25 EP EP86830074A patent/EP0196281B1/de not_active Expired - Lifetime
- 1986-03-25 DE DE8686830074T patent/DE3672151D1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0196281A2 (de) | 1986-10-01 |
IT8509373A0 (it) | 1985-03-26 |
US4691534A (en) | 1987-09-08 |
IT1201263B (it) | 1989-01-27 |
EP0196281A3 (en) | 1987-05-27 |
EP0196281B1 (de) | 1990-06-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |