DE3666897D1 - Electron beam apparatus comprising an integrated anode/beam blanking unit - Google Patents

Electron beam apparatus comprising an integrated anode/beam blanking unit

Info

Publication number
DE3666897D1
DE3666897D1 DE8686200454T DE3666897T DE3666897D1 DE 3666897 D1 DE3666897 D1 DE 3666897D1 DE 8686200454 T DE8686200454 T DE 8686200454T DE 3666897 T DE3666897 T DE 3666897T DE 3666897 D1 DE3666897 D1 DE 3666897D1
Authority
DE
Germany
Prior art keywords
blanking unit
electron beam
integrated anode
beam apparatus
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8686200454T
Other languages
English (en)
Inventor
Harm Tolner
Hans-Peter Feuerbam
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of DE3666897D1 publication Critical patent/DE3666897D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
DE8686200454T 1985-03-28 1986-03-20 Electron beam apparatus comprising an integrated anode/beam blanking unit Expired DE3666897D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8500907 1985-03-28

Publications (1)

Publication Number Publication Date
DE3666897D1 true DE3666897D1 (en) 1989-12-14

Family

ID=19845750

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686200454T Expired DE3666897D1 (en) 1985-03-28 1986-03-20 Electron beam apparatus comprising an integrated anode/beam blanking unit

Country Status (4)

Country Link
EP (1) EP0197579B1 (de)
JP (1) JPH0626104B2 (de)
KR (1) KR860007716A (de)
DE (1) DE3666897D1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2341720A (en) * 1998-09-16 2000-03-22 Leica Microsys Lithography Ltd Electron beam aperture element with beam sheilding

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2705417A1 (de) * 1977-02-09 1978-08-10 Siemens Ag Anordnung zum ein- und austasten des elektronenstrahls eines elektronenmikroskops
DE2743200A1 (de) * 1977-09-26 1979-04-05 Siemens Ag Verbesserung an einer vorrichtung zur elektronenstrahleintastung
DE3204897A1 (de) * 1982-02-12 1983-08-25 Siemens AG, 1000 Berlin und 8000 München Korpuskularstrahlerzeugendes system und verfahren zu seinem betrieb
JPS60150626A (ja) * 1984-01-19 1985-08-08 Toshiba Corp 荷電粒子線描画装置
DE3407050A1 (de) * 1984-02-27 1985-09-05 Siemens AG, 1000 Berlin und 8000 München Korpuskelbeschleunigende elektrode

Also Published As

Publication number Publication date
EP0197579A1 (de) 1986-10-15
JPS61225747A (ja) 1986-10-07
EP0197579B1 (de) 1989-11-08
KR860007716A (ko) 1986-10-15
JPH0626104B2 (ja) 1994-04-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PHILIPS ELECTRONICS N.V., EINDHOVEN, NL

8339 Ceased/non-payment of the annual fee