DE3639678A1 - Gas and liquid bearing for rotary motion, version I/II - Google Patents

Gas and liquid bearing for rotary motion, version I/II

Info

Publication number
DE3639678A1
DE3639678A1 DE19863639678 DE3639678A DE3639678A1 DE 3639678 A1 DE3639678 A1 DE 3639678A1 DE 19863639678 DE19863639678 DE 19863639678 DE 3639678 A DE3639678 A DE 3639678A DE 3639678 A1 DE3639678 A1 DE 3639678A1
Authority
DE
Germany
Prior art keywords
gas
bearing
liquid
version
axial support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19863639678
Other languages
German (de)
Inventor
Hans-Joachim Wittemann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WITTEMANN HANS JOACHIM
Original Assignee
WITTEMANN HANS JOACHIM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WITTEMANN HANS JOACHIM filed Critical WITTEMANN HANS JOACHIM
Priority to DE19863639678 priority Critical patent/DE3639678A1/en
Publication of DE3639678A1 publication Critical patent/DE3639678A1/en
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
    • F16C32/0696—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for both radial and axial load
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/50—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism
    • B23Q1/52—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism a single rotating pair
    • B23Q1/522—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism a single rotating pair which is perpendicular to the working surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/04—Headstocks; Working-spindles; Features relating thereto
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/12—Scanning systems using multifaceted mirrors
    • G02B26/121—Mechanical drive devices for polygonal mirrors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2322/00—Apparatus used in shaping articles
    • F16C2322/39—General build up of machine tools, e.g. spindles, slides, actuators

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

It is possible to achieve a highly accurate rotary bearing with simple means using easily produced components of the gas and liquid bearing. The rotating part consists of a spherical segment of two bases. The stationary part consists of a spherical cap matched to the above spherical segment and of an annular disc which assumes the task of axial support. By forcing gas or liquid into the spherical zone (radial-axial support) and the annular plane bearing arrangement (counter-axial support), a gas or liquid film is formed between the stationary and rotating part. By relocating the feed passages for the bearing medium, it is possible to use the stator described above as a rotating part (rotor). By appropriate dimensioning, it is possible to employ the gas and liquid bearing for a range of applications from machine construction to precision engineering and metrology.

Description

Hauptanspruch Version IMain claim version I Lagerbauteile Version IBearing components version I

Der Rotor besteht aus einer Kugelschicht (Teil 1). Der Stator (Teil 2) hat die entsprechend kugelförmige Gegenform mit der axialen Druckscheibe (Teil 4).The rotor consists of a spherical layer (part 1 ). The stator (part 2 ) has the corresponding spherical counter-shape with the axial thrust washer (part 4 ).

Lagerfunktion von Version IWarehouse function of version I

Die Kugelschicht übernimmt die kombinierte Radial- und Axial­ lagerung (Fläche A). Die axiale Gegenlagerung übernimmt die abgeflachte Kugelschicht (Fläche B).The spherical layer takes over the combined radial and axial bearing (surface A) . The flattened spherical layer (surface B) takes over the axial counter bearing.

Durch eine entsprechende Druckmittelzufuhr ergibt sich an den Flächen A und B ein Gleitfilm (Luft- oder Flüssigkeitsfilm), auf welchem der Rotor gleitet.A corresponding pressure medium supply results in a sliding film (air or liquid film) on surfaces A and B , on which the rotor slides.

Der Gleitfilm ist nur wenige Mikrometer dick. (Typisch 5-20 Mikrometer). Durch Umlegen der Druckzuführung kann aber auch Teil 1 als Stator verwendet werden. Das Druckmittel kann sowohl durch Einlaß- als auch als Auslaßdrosseln in den Flächen A und B geführt werden.The sliding film is only a few micrometers thick. (Typically 5-20 microns). By switching the pressure supply, part 1 can also be used as a stator. The pressure medium can be guided through the inlet and outlet throttles in the areas A and B.

Nebenanspruch Version IISubsidiary claim version II Lagerbauteile Version IIBearing components version II

Der Rotor besteht aus einer Kugelschicht (Teil 1) mit einer am größeren Durchmesser der Kugelschicht angebrachten Planscheibe (Teil 3). Der Stator (Teil 2) hat die entsprechende kugelförmi­ ge Gegenform von Teil 1. Die axiale Lagerung übernimmt die axiale Druckscheibe (Teil 4). The rotor consists of a spherical layer (part 1 ) with a face plate attached to the larger diameter of the spherical layer (part 3 ). The stator (part 2 ) has the corresponding kugelförmi ge counterpart of part 1 . The axial thrust washer (part 4 ) takes over the axial support.

Lagerfunktion von Version IIWarehouse function of version II

Die Kugelschicht übernimmt die kombinierte Radial- und Axial­ lagerung (Fläche A). Die axiale Gegenlagerung übernimmt die Planscheibe (Teil 3), welche sich an Fläche B der axialen Druck­ scheibe abstützt.The spherical layer takes over the combined radial and axial bearing (surface A) . The axial counter bearing is taken over by the face plate (part 3 ), which is supported on surface B of the axial pressure plate.

Auch bei Version 2 verhält sich das Lager wie unter Version 1 beschrieben, nur mit dem Unterschied, daß die Version 2 eine höhere Kippsteife, durch den vergrößerten Durchmesser des axia­ len Gegenlagers, hat. In version 2 the bearing behaves as in version 1 described, with the difference that the version 2 a higher stiffness due to the enlarged diameter of the axia len counter bearing.  

Typische AnwendungsbeispieleTypical application examples

  • - Hochgenaues Meßlager- Highly accurate measuring bearing
  • - Hochgenaue Rundtische zum Messen und Feinstbearbeiten- Highly accurate rotary tables for measuring and fine machining
  • - Feinstbearbeitungspindeln z. B. mit Einkristalldiamanten- Fine machining spindles z. B. with single crystal diamonds
  • - Passive und aktive optische Scanner- Passive and active optical scanners
  • - Spindeln zum Lagern und Messen von Computerspeicherplatten- Spindles for storing and measuring computer storage disks
  • - Bohr- und Schleifspindeln- drilling and grinding spindles
  • - Meßspindel zur Aufnahme von Meßtastern- Measuring spindle for holding measuring probes
  • - Winkelmeßtische- Angular measuring tables
  • - Sehr reibungsarme Simulatoren- Very low-friction simulators

Der Erfindung liegt die Aufgabe zugrunde, aus einfachen geome­ trischen Bauteilen ein hochgenaues Rotationslager herzustellen. Diese Aufgabe wird erfindungsgemäß dadurch gelöst, daß das Gas- und Flüssigkeitslager aus maximal 4 einfach herzustellenden und montierbaren Bauteilen besteht.The invention has for its object from simple geome trical components to produce a highly accurate rotary bearing. This object is achieved in that the gas and liquid bearings from a maximum of 4 easy to manufacture and mountable components.

Claims (1)

Gas- und Flüssigkeitslager für Rotationsbewegungen. Gekenn­ zeichnet durch die besondere Rotor-Stator-Anordnung und deren Bauformen, ergibt sich eine genaue statische Lage, dadurch ist das Lager geometrisch bestimmt.Gas and liquid bearings for rotational movements. Characterized by the special rotor-stator arrangement and their designs, an exact static position results, which means that the bearing is geometrically determined.
DE19863639678 1986-11-20 1986-11-20 Gas and liquid bearing for rotary motion, version I/II Ceased DE3639678A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19863639678 DE3639678A1 (en) 1986-11-20 1986-11-20 Gas and liquid bearing for rotary motion, version I/II

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19863639678 DE3639678A1 (en) 1986-11-20 1986-11-20 Gas and liquid bearing for rotary motion, version I/II

Publications (1)

Publication Number Publication Date
DE3639678A1 true DE3639678A1 (en) 1988-06-01

Family

ID=6314379

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19863639678 Ceased DE3639678A1 (en) 1986-11-20 1986-11-20 Gas and liquid bearing for rotary motion, version I/II

Country Status (1)

Country Link
DE (1) DE3639678A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19518088A1 (en) * 1995-05-17 1996-11-21 Ruediger Prof Dr Ing Haberland Fluid bearing with any liquid or gas as fluid suitable for extremely high rpm
EP0780716A1 (en) * 1995-12-22 1997-06-25 Samsung Electronics Co., Ltd. Drive motor for rotating multi-faceted mirror
CN108223571A (en) * 2017-12-22 2018-06-29 江苏大学 A kind of bumps are spaced apart micro- texture guide rail and preparation method thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2304241A1 (en) * 1972-01-31 1973-08-09 Gordon James Watt HYDROSTATICALLY MOUNTED SPINDLE WITH RESTRICTED OUTLET
US4095855A (en) * 1976-09-20 1978-06-20 Fox International, Inc. Gas lubricated spindle bearing assembly

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2304241A1 (en) * 1972-01-31 1973-08-09 Gordon James Watt HYDROSTATICALLY MOUNTED SPINDLE WITH RESTRICTED OUTLET
US4095855A (en) * 1976-09-20 1978-06-20 Fox International, Inc. Gas lubricated spindle bearing assembly

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19518088A1 (en) * 1995-05-17 1996-11-21 Ruediger Prof Dr Ing Haberland Fluid bearing with any liquid or gas as fluid suitable for extremely high rpm
EP0780716A1 (en) * 1995-12-22 1997-06-25 Samsung Electronics Co., Ltd. Drive motor for rotating multi-faceted mirror
CN108223571A (en) * 2017-12-22 2018-06-29 江苏大学 A kind of bumps are spaced apart micro- texture guide rail and preparation method thereof
CN108223571B (en) * 2017-12-22 2024-06-07 江苏大学 Concave-convex interval distribution micro-texture guide rail and manufacturing method thereof

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Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8131 Rejection