DE3588088D1 - Entladungsangeregter Laser zur Erzeugung kurzer Pulse - Google Patents

Entladungsangeregter Laser zur Erzeugung kurzer Pulse

Info

Publication number
DE3588088D1
DE3588088D1 DE3588088T DE3588088T DE3588088D1 DE 3588088 D1 DE3588088 D1 DE 3588088D1 DE 3588088 T DE3588088 T DE 3588088T DE 3588088 T DE3588088 T DE 3588088T DE 3588088 D1 DE3588088 D1 DE 3588088D1
Authority
DE
Germany
Prior art keywords
discharge
short pulses
generating short
excited laser
excited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3588088T
Other languages
English (en)
Other versions
DE3588088T2 (de
Inventor
Kenyu Haruta
Hitoshi Wakata
Yukio Sato
Haruhiko Nagai
Hajime Nakatani
Hideki Kita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP21284384A external-priority patent/JPS6190486A/ja
Priority claimed from JP21363384A external-priority patent/JPS6191982A/ja
Priority claimed from JP24018184A external-priority patent/JPS61116888A/ja
Priority claimed from JP23926884A external-priority patent/JPS61116889A/ja
Priority claimed from JP2979185A external-priority patent/JPS61188981A/ja
Priority claimed from JP6751685A external-priority patent/JPS61224379A/ja
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Application granted granted Critical
Publication of DE3588088D1 publication Critical patent/DE3588088D1/de
Publication of DE3588088T2 publication Critical patent/DE3588088T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0385—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/041—Arrangements for thermal management for gas lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0384—Auxiliary electrodes, e.g. for pre-ionisation or triggering, or particular adaptations therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
    • H01S3/09713—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
DE19853588088 1984-10-09 1985-10-02 Entladungsangeregter Laser zur Erzeugung kurzer Pulse Expired - Lifetime DE3588088T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP21284384A JPS6190486A (ja) 1984-10-09 1984-10-09 放電励起型短パルスレ−ザ装置
JP21363384A JPS6191982A (ja) 1984-10-11 1984-10-11 放電励起エキシマレ−ザ装置
JP24018184A JPS61116888A (ja) 1984-11-12 1984-11-12 放電励起型短パルスレ−ザ装置
JP23926884A JPS61116889A (ja) 1984-11-13 1984-11-13 放電励起型短パルスレ−ザ装置
JP2979185A JPS61188981A (ja) 1985-02-18 1985-02-18 放電励起短パルスレ−ザ装置
JP6751685A JPS61224379A (ja) 1985-03-28 1985-03-28 放電励起レ−ザ装置

Publications (2)

Publication Number Publication Date
DE3588088D1 true DE3588088D1 (de) 1996-04-04
DE3588088T2 DE3588088T2 (de) 1996-11-14

Family

ID=27549479

Family Applications (3)

Application Number Title Priority Date Filing Date
DE19853588088 Expired - Lifetime DE3588088T2 (de) 1984-10-09 1985-10-02 Entladungsangeregter Laser zur Erzeugung kurzer Pulse
DE19853588137 Expired - Fee Related DE3588137T2 (de) 1984-10-09 1985-10-02 Entladungsangeregtes Lasergerät
DE19853588118 Expired - Lifetime DE3588118T2 (de) 1984-10-09 1985-10-02 Entladungsangeregter Laser zur Erzeugung kurzer Pulse

Family Applications After (2)

Application Number Title Priority Date Filing Date
DE19853588137 Expired - Fee Related DE3588137T2 (de) 1984-10-09 1985-10-02 Entladungsangeregtes Lasergerät
DE19853588118 Expired - Lifetime DE3588118T2 (de) 1984-10-09 1985-10-02 Entladungsangeregter Laser zur Erzeugung kurzer Pulse

Country Status (2)

Country Link
EP (3) EP0637106B1 (de)
DE (3) DE3588088T2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5771258A (en) * 1997-02-11 1998-06-23 Cymer, Inc. Aerodynamic chamber design for high pulse repetition rate excimer lasers
US7545842B2 (en) 2006-09-20 2009-06-09 Coherent, Inc. Pre-ionizer for pulsed gas-discharge laser
US7693207B2 (en) 2007-09-12 2010-04-06 Coherent, Inc. Pre-ionizer for pulsed gas-discharge laser
WO2008036204A2 (en) * 2006-09-20 2008-03-27 Coherent, Inc. Pre-ionizer for pulsed gas-discharge laser

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3486058A (en) * 1967-09-12 1969-12-23 Rca Corp Sputter resistive cold cathode for low pressure gas discharge device
CA897754A (en) * 1969-08-29 1972-04-11 Laflamme Albert Molecular gas laser energized by double discharge
FR2120191A5 (de) * 1970-03-23 1972-08-18 Comp Generale Electricite

Also Published As

Publication number Publication date
DE3588137T2 (de) 1997-07-10
EP0543795A1 (de) 1993-05-26
EP0542718A1 (de) 1993-05-19
DE3588088T2 (de) 1996-11-14
DE3588118T2 (de) 1997-03-27
DE3588118D1 (de) 1996-09-26
DE3588137D1 (de) 1997-01-30
EP0637106A1 (de) 1995-02-01
EP0542718B1 (de) 1996-02-28
EP0637106B1 (de) 1996-12-18
EP0543795B1 (de) 1996-08-21

Similar Documents

Publication Publication Date Title
DE69331453T2 (de) Vorrichtung zur Erzeugung von Laserstrahlen
JPS545394A (en) Method of producing diode laser
DE3485460D1 (de) Taktimpulsgenerator.
DE3856300D1 (de) Gepulstes Lasergerät mit hoher Wiederholungsrate
HUT38784A (en) Pulse laser system
GB8411920D0 (en) Short laser pulses
DE3584497D1 (de) Zeitimpulsgenerator zur erzeugung von mit dem horizontalen videosynchronisationssignal synchronisierten zeitimpulsen.
DE3850808D1 (de) Erzeugung von Taktimpulsen.
DE3579462D1 (de) Schaltungsanordnung zur erzeugung von hochspannungsimpulsen.
DE3683556D1 (de) Verfahren zur generierung von alkali.
DE69006958T2 (de) Generator für Hochleistungs-Laserimpulse.
KR860000752A (ko) 펄스 발생기
DE3588088T2 (de) Entladungsangeregter Laser zur Erzeugung kurzer Pulse
NO170657C (no) Relaksasjonssynkronisator med oscillator for pulset laserdrift
DE3876498T2 (de) Nichtlinearer kondensator zur erzeugung von hochspannungsimpulsen.
KR890700424A (ko) 레이저발진기 제어방법
DE3883521T2 (de) Regelverfahren der laserenergie.
ATA286587A (de) Laserschneidduese
IT1140097B (it) Generatore di impulsi
DE3570812D1 (en) Frequency-stabilised pulsed laser
DE3672046D1 (de) Schaltungsanordnung zur erzeugung eines impulses bestimmter dauer.
GB8606246D0 (en) Sequence pulse solid-state laser
DD129257A1 (de) Anordnung zur erzeugung von pikosekunden-laserimpulsen
KR890010431U (ko) 레이져 프린터 광학계 구동용 펄스 발생 장치
GB2167205B (en) Apparatus for producing pulse trains of light pulses

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)