DE3586239T2 - Hochfrequenzplasmagenerator. - Google Patents

Hochfrequenzplasmagenerator.

Info

Publication number
DE3586239T2
DE3586239T2 DE8585115668T DE3586239T DE3586239T2 DE 3586239 T2 DE3586239 T2 DE 3586239T2 DE 8585115668 T DE8585115668 T DE 8585115668T DE 3586239 T DE3586239 T DE 3586239T DE 3586239 T2 DE3586239 T2 DE 3586239T2
Authority
DE
Germany
Prior art keywords
high frequency
plasma generator
frequency plasma
generator
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8585115668T
Other languages
English (en)
Other versions
DE3586239D1 (de
Inventor
Yasunori Ohno
Tomoe Kurosawa
Tadashi Sato
Youichi Ohshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE3586239D1 publication Critical patent/DE3586239D1/de
Publication of DE3586239T2 publication Critical patent/DE3586239T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H01J37/32688—Multi-cusp fields
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/02—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
    • H05H1/10—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied magnetic fields only, e.g. Q-machines, Yin-Yang, base-ball
    • H05H1/11—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied magnetic fields only, e.g. Q-machines, Yin-Yang, base-ball using cusp configuration

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Load-Engaging Elements For Cranes (AREA)
DE8585115668T 1984-01-10 1985-12-09 Hochfrequenzplasmagenerator. Expired - Lifetime DE3586239T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984002598U JPS60114176U (ja) 1984-01-10 1984-01-10 外れ止め具付フツク

Publications (2)

Publication Number Publication Date
DE3586239D1 DE3586239D1 (de) 1992-07-23
DE3586239T2 true DE3586239T2 (de) 1992-12-10

Family

ID=30476425

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585115668T Expired - Lifetime DE3586239T2 (de) 1984-01-10 1985-12-09 Hochfrequenzplasmagenerator.

Country Status (2)

Country Link
JP (1) JPS60114176U (de)
DE (1) DE3586239T2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100931661B1 (ko) 2007-08-09 2009-12-14 주식회사 포스코 크레인 후크 분리장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5725887B2 (de) * 1973-03-24 1982-06-01
JPS5942672Y2 (ja) * 1979-07-27 1984-12-14 芝浦メカトロニクス株式会社 軸力計用磁気センサ
JPS57166287A (en) * 1981-04-02 1982-10-13 Riyuutarou Yoritomi Hook for cargo-handling machine

Also Published As

Publication number Publication date
DE3586239D1 (de) 1992-07-23
JPS60114176U (ja) 1985-08-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee