DE3579358D1 - POSITION MEASUREMENT. - Google Patents
POSITION MEASUREMENT.Info
- Publication number
- DE3579358D1 DE3579358D1 DE8585105739T DE3579358T DE3579358D1 DE 3579358 D1 DE3579358 D1 DE 3579358D1 DE 8585105739 T DE8585105739 T DE 8585105739T DE 3579358 T DE3579358 T DE 3579358T DE 3579358 D1 DE3579358 D1 DE 3579358D1
- Authority
- DE
- Germany
- Prior art keywords
- position measurement
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Radar Systems And Details Thereof (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59093929A JPS60237307A (en) | 1984-05-11 | 1984-05-11 | Laser length measuring machine |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3579358D1 true DE3579358D1 (en) | 1990-10-04 |
Family
ID=14096118
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585105739T Expired - Lifetime DE3579358D1 (en) | 1984-05-11 | 1985-05-10 | POSITION MEASUREMENT. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4707129A (en) |
EP (1) | EP0160999B1 (en) |
JP (1) | JPS60237307A (en) |
DE (1) | DE3579358D1 (en) |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2612628B1 (en) * | 1987-03-17 | 1993-09-10 | Fondeur Bernard | LASER INTERFEROMETRY MEASURING DEVICE |
LU87003A1 (en) * | 1987-09-29 | 1989-04-06 | Europ Communities | TARGET TRACKING SYSTEM |
US4790651A (en) * | 1987-09-30 | 1988-12-13 | Chesapeake Laser Systems, Inc. | Tracking laser interferometer |
DE3833589C1 (en) * | 1988-10-03 | 1990-03-15 | Daimler-Benz Aktiengesellschaft, 7000 Stuttgart, De | Multiple arrangement of simultaneously used laser interferometers for trilaterational determination of the position of a movable point |
US5374991A (en) * | 1991-03-29 | 1994-12-20 | Gradient Lens Corporation | Compact distance measuring interferometer |
US5430537A (en) * | 1993-09-03 | 1995-07-04 | Dynamics Research Corporation | Light beam distance encoder |
JPH07110207A (en) * | 1993-10-08 | 1995-04-25 | Agency Of Ind Science & Technol | Rotating and supporting mechanism of laser measuring instrument |
US5739907A (en) * | 1996-11-22 | 1998-04-14 | Chen; Jenq-Shyong | Laser interference displacement measuring system capable of automatic laser path alignment |
JP4516710B2 (en) * | 1999-07-28 | 2010-08-04 | ライカ・ゲオジステームス・アクチェンゲゼルシャフト | Method and apparatus for determining spatial position and orientation |
US6547397B1 (en) | 2000-04-19 | 2003-04-15 | Laser Projection Technologies, Inc. | Apparatus and method for projecting a 3D image |
US6563569B2 (en) * | 2000-09-25 | 2003-05-13 | Agency Of Industrial Science & Technology, Ministry Of International Trade & Industry | Laser tracking interferometric length measuring instrument and method of measuring length and coordinates using the same |
WO2003062744A1 (en) | 2002-01-16 | 2003-07-31 | Faro Technologies, Inc. | Laser-based coordinate measuring device and laser-based method for measuring coordinates |
CN1846148B (en) * | 2003-09-05 | 2010-12-15 | Faro科技有限公司 | Self-compensating laser tracker |
US7583375B2 (en) * | 2003-09-05 | 2009-09-01 | Faro Technologies, Inc. | Self-compensating laser tracker |
JP5016245B2 (en) * | 2005-03-29 | 2012-09-05 | ライカ・ゲオジステームス・アクチェンゲゼルシャフト | Measurement system for determining the six degrees of freedom of an object |
JP2009229066A (en) * | 2008-03-19 | 2009-10-08 | Mitsutoyo Corp | Estimation method of distance between tracking type laser interferometer and target, and tracking type laser interferometer |
EP2271889A4 (en) * | 2008-03-21 | 2011-11-02 | Variation Reduction Solutions Inc | External system for robotic accuracy enhancement |
WO2012141810A1 (en) | 2011-03-03 | 2012-10-18 | Faro Technologies, Inc. | Target apparatus and method |
US9482755B2 (en) | 2008-11-17 | 2016-11-01 | Faro Technologies, Inc. | Measurement system having air temperature compensation between a target and a laser tracker |
US8223342B2 (en) * | 2009-03-16 | 2012-07-17 | Alliant Techsystems Inc. | Methods and systems for measuring target movement with an interferometer |
US8659749B2 (en) * | 2009-08-07 | 2014-02-25 | Faro Technologies, Inc. | Absolute distance meter with optical switch |
US8619265B2 (en) | 2011-03-14 | 2013-12-31 | Faro Technologies, Inc. | Automatic measurement of dimensional data with a laser tracker |
US9377885B2 (en) | 2010-04-21 | 2016-06-28 | Faro Technologies, Inc. | Method and apparatus for locking onto a retroreflector with a laser tracker |
US9772394B2 (en) | 2010-04-21 | 2017-09-26 | Faro Technologies, Inc. | Method and apparatus for following an operator and locking onto a retroreflector with a laser tracker |
US9400170B2 (en) | 2010-04-21 | 2016-07-26 | Faro Technologies, Inc. | Automatic measurement of dimensional data within an acceptance region by a laser tracker |
DE102010041330A1 (en) * | 2010-09-24 | 2012-03-29 | Dr. Johannes Heidenhain Gmbh | Optical position measuring device |
US8902408B2 (en) | 2011-02-14 | 2014-12-02 | Faro Technologies Inc. | Laser tracker used with six degree-of-freedom probe having separable spherical retroreflector |
US9482529B2 (en) | 2011-04-15 | 2016-11-01 | Faro Technologies, Inc. | Three-dimensional coordinate scanner and method of operation |
WO2012141868A1 (en) | 2011-04-15 | 2012-10-18 | Faro Technologies, Inc. | Enhanced position detector in laser tracker |
US9686532B2 (en) | 2011-04-15 | 2017-06-20 | Faro Technologies, Inc. | System and method of acquiring three-dimensional coordinates using multiple coordinate measurement devices |
US9164173B2 (en) | 2011-04-15 | 2015-10-20 | Faro Technologies, Inc. | Laser tracker that uses a fiber-optic coupler and an achromatic launch to align and collimate two wavelengths of light |
USD688577S1 (en) | 2012-02-21 | 2013-08-27 | Faro Technologies, Inc. | Laser tracker |
JP6099675B2 (en) | 2012-01-27 | 2017-03-22 | ファロ テクノロジーズ インコーポレーテッド | Inspection method by barcode identification |
US9041914B2 (en) | 2013-03-15 | 2015-05-26 | Faro Technologies, Inc. | Three-dimensional coordinate scanner and method of operation |
JP2015118076A (en) * | 2013-12-20 | 2015-06-25 | 株式会社ミツトヨ | Optical interference measurement instrument and program |
US9395174B2 (en) | 2014-06-27 | 2016-07-19 | Faro Technologies, Inc. | Determining retroreflector orientation by optimizing spatial fit |
TWI595252B (en) * | 2016-05-10 | 2017-08-11 | 財團法人工業技術研究院 | Distance measurement device and distance measuring method thereof |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3458259A (en) * | 1966-11-07 | 1969-07-29 | Hewlett Packard Co | Interferometric system |
FR2088675A5 (en) * | 1970-04-21 | 1972-01-07 | Thomson Csf | |
US3788746A (en) * | 1972-10-02 | 1974-01-29 | Hewlett Packard Co | Optical dilatometer |
US4053231A (en) * | 1975-12-18 | 1977-10-11 | Nasa | Interferometer mirror tilt correcting system |
US4243877A (en) * | 1979-03-05 | 1981-01-06 | Cummins Engine Company, Inc. | Electro-optical target for an optical alignment system |
US4319839A (en) * | 1980-03-27 | 1982-03-16 | The United States Of America As Represented By The Secretary Of The Air Force | Beam alignment system |
JPS57172266A (en) * | 1981-04-17 | 1982-10-23 | Auto Process:Kk | Distance measuring device |
US4457625A (en) * | 1981-07-13 | 1984-07-03 | Itek Corporation | Self calibrating contour measuring system using fringe counting interferometers |
GB2117511A (en) * | 1982-02-19 | 1983-10-12 | Dr Paul Derek Cook | Laser beam alignment detection |
-
1984
- 1984-05-11 JP JP59093929A patent/JPS60237307A/en active Granted
-
1985
- 1985-05-10 EP EP85105739A patent/EP0160999B1/en not_active Expired
- 1985-05-10 DE DE8585105739T patent/DE3579358D1/en not_active Expired - Lifetime
- 1985-05-10 US US06/733,558 patent/US4707129A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPS60237307A (en) | 1985-11-26 |
EP0160999B1 (en) | 1990-08-29 |
EP0160999A3 (en) | 1987-05-27 |
JPH051882B2 (en) | 1993-01-11 |
EP0160999A2 (en) | 1985-11-13 |
US4707129A (en) | 1987-11-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |