DE3566579D1 - Device for analyzing and correcting wavefront surfaces in real time - Google Patents
Device for analyzing and correcting wavefront surfaces in real timeInfo
- Publication number
- DE3566579D1 DE3566579D1 DE8585400919T DE3566579T DE3566579D1 DE 3566579 D1 DE3566579 D1 DE 3566579D1 DE 8585400919 T DE8585400919 T DE 8585400919T DE 3566579 T DE3566579 T DE 3566579T DE 3566579 D1 DE3566579 D1 DE 3566579D1
- Authority
- DE
- Germany
- Prior art keywords
- analyzing
- real time
- correcting wavefront
- wavefront surfaces
- correcting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J9/0215—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods by shearing interferometric methods
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Optical Communication System (AREA)
- Holo Graphy (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8407370A FR2564198B1 (fr) | 1984-05-11 | 1984-05-11 | Dispositif d'analyse et de correction de surfaces d'onde en temps reel |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3566579D1 true DE3566579D1 (en) | 1989-01-05 |
Family
ID=9303911
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585400919T Expired DE3566579D1 (en) | 1984-05-11 | 1985-05-10 | Device for analyzing and correcting wavefront surfaces in real time |
Country Status (5)
Country | Link |
---|---|
US (1) | US4645346A (de) |
EP (1) | EP0168270B1 (de) |
JP (1) | JPS60253940A (de) |
DE (1) | DE3566579D1 (de) |
FR (1) | FR2564198B1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4743118A (en) * | 1985-04-04 | 1988-05-10 | Ricoh Company, Ltd. | Method of detecting origin of shear and measuring amount of shear in shearing interferometer systems |
EP0539571A4 (en) * | 1991-05-14 | 1993-12-15 | Blue Sky Research, Inc. | Dynamic shearing interferometer |
JP3043979B2 (ja) * | 1995-10-20 | 2000-05-22 | サンデン株式会社 | スクロール型圧縮機用ボトムプレート |
US7146060B2 (en) * | 2002-12-27 | 2006-12-05 | Cicchiello James M | Real-time correction of phase distortion |
US7283251B1 (en) * | 2005-10-26 | 2007-10-16 | Lockheed Martin Corporation | Black fringe wavefront sensor |
US7511826B2 (en) * | 2006-02-27 | 2009-03-31 | Asml Holding N.V. | Symmetrical illumination forming system and method |
CN106767391B (zh) * | 2016-12-23 | 2019-06-14 | 浙江大学 | 四波前横向剪切干涉波前传感器的灵敏度增强装置及方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2163861A5 (de) * | 1971-12-03 | 1973-07-27 | Anvar | |
US3923400A (en) * | 1974-01-03 | 1975-12-02 | Itek Corp | Real-time wavefront correction system |
JPS54119706U (de) * | 1978-02-07 | 1979-08-22 | ||
JPS5533941U (de) * | 1978-08-23 | 1980-03-05 |
-
1984
- 1984-05-11 FR FR8407370A patent/FR2564198B1/fr not_active Expired
-
1985
- 1985-05-08 US US06/731,896 patent/US4645346A/en not_active Expired - Fee Related
- 1985-05-10 EP EP85400919A patent/EP0168270B1/de not_active Expired
- 1985-05-10 DE DE8585400919T patent/DE3566579D1/de not_active Expired
- 1985-05-10 JP JP60098144A patent/JPS60253940A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
US4645346A (en) | 1987-02-24 |
JPS60253940A (ja) | 1985-12-14 |
EP0168270A1 (de) | 1986-01-15 |
EP0168270B1 (de) | 1988-11-30 |
FR2564198B1 (fr) | 1986-09-19 |
FR2564198A1 (fr) | 1985-11-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |