DE3531904C2 - - Google Patents

Info

Publication number
DE3531904C2
DE3531904C2 DE19853531904 DE3531904A DE3531904C2 DE 3531904 C2 DE3531904 C2 DE 3531904C2 DE 19853531904 DE19853531904 DE 19853531904 DE 3531904 A DE3531904 A DE 3531904A DE 3531904 C2 DE3531904 C2 DE 3531904C2
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19853531904
Other languages
German (de)
Other versions
DE3531904A1 (de
Inventor
Reinhard 1000 Berlin De Thieme
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
THIEME, REINHARD SCHOENFELDER, THOMAS, DIPL.-ING.,
Original Assignee
STUDIO S - GESELLSCHAFT fur ELEKTRONIK DATENVERARBEITUNG und OPTIK MBH 1000 BERLIN DE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STUDIO S - GESELLSCHAFT fur ELEKTRONIK DATENVERARBEITUNG und OPTIK MBH 1000 BERLIN DE filed Critical STUDIO S - GESELLSCHAFT fur ELEKTRONIK DATENVERARBEITUNG und OPTIK MBH 1000 BERLIN DE
Priority to DE19853531904 priority Critical patent/DE3531904A1/de
Publication of DE3531904A1 publication Critical patent/DE3531904A1/de
Application granted granted Critical
Publication of DE3531904C2 publication Critical patent/DE3531904C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J9/0215—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods by shearing interferometric methods
DE19853531904 1985-09-05 1985-09-05 Lateral-shearing-interferometer zur phasendifferenzmessung von zwei wellenflaechen konstanter phase Granted DE3531904A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19853531904 DE3531904A1 (de) 1985-09-05 1985-09-05 Lateral-shearing-interferometer zur phasendifferenzmessung von zwei wellenflaechen konstanter phase

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19853531904 DE3531904A1 (de) 1985-09-05 1985-09-05 Lateral-shearing-interferometer zur phasendifferenzmessung von zwei wellenflaechen konstanter phase

Publications (2)

Publication Number Publication Date
DE3531904A1 DE3531904A1 (de) 1986-03-27
DE3531904C2 true DE3531904C2 (xx) 1987-04-09

Family

ID=6280318

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19853531904 Granted DE3531904A1 (de) 1985-09-05 1985-09-05 Lateral-shearing-interferometer zur phasendifferenzmessung von zwei wellenflaechen konstanter phase

Country Status (1)

Country Link
DE (1) DE3531904A1 (xx)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4413758A1 (de) * 1993-04-21 1994-12-08 Fraunhofer Ges Forschung Verfahren und Vorrichtung für die Topographieprüfung von Oberflächen
CN102519609A (zh) * 2011-12-13 2012-06-27 中国科学院光电研究院 双通道横向剪切干涉仪

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4887899A (en) * 1987-12-07 1989-12-19 Hung Yau Y Apparatus and method for electronic analysis of test objects
GB0402941D0 (en) 2004-02-11 2004-03-17 Qinetiq Ltd Surface shape measurement
WO2019010507A1 (en) 2017-07-14 2019-01-17 Wavesense Engineering Gmbh OPTICAL APPARATUS

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3572934A (en) * 1968-09-09 1971-03-30 Ibm Longitudinally reversed shearing interferometry
US3661464A (en) * 1970-03-16 1972-05-09 Jorway Corp Optical interferometer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4413758A1 (de) * 1993-04-21 1994-12-08 Fraunhofer Ges Forschung Verfahren und Vorrichtung für die Topographieprüfung von Oberflächen
DE4413758C2 (de) * 1993-04-21 1998-09-17 Fraunhofer Ges Forschung Vorrichtung und Verfahren zur Prüfung der Gestalt einer Oberfläche eines zu vermessenden Objektes
CN102519609A (zh) * 2011-12-13 2012-06-27 中国科学院光电研究院 双通道横向剪切干涉仪

Also Published As

Publication number Publication date
DE3531904A1 (de) 1986-03-27

Similar Documents

Publication Publication Date Title
DE3531904C2 (xx)
DE8508940U1 (xx)
DE8533153U1 (xx)
DE3690546T1 (xx)
DE8523585U1 (xx)
DE8533769U1 (xx)
DE3590816T1 (xx)
AU549439B2 (xx)
DE8511999U1 (xx)
DE8531896U1 (xx)
AU3954685A (xx)
AU4708385A (xx)
DE8503270U1 (xx)
DE8505863U1 (xx)
AU4121285A (xx)
BA96126A (xx)
DE8512742U1 (xx)
DE8529931U1 (xx)
BG44563A1 (xx)
BE905108A (xx)
BG44571A1 (xx)
BG44572A1 (xx)
BG44581A1 (xx)
BE901679A (xx)
BG45174A1 (xx)

Legal Events

Date Code Title Description
OAV Applicant agreed to the publication of the unexamined application as to paragraph 31 lit. 2 z1
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: THIEME, REINHARD SCHOENFELDER, THOMAS, DIPL.-ING.,

8339 Ceased/non-payment of the annual fee