DE3531904C2 - - Google Patents
Info
- Publication number
- DE3531904C2 DE3531904C2 DE19853531904 DE3531904A DE3531904C2 DE 3531904 C2 DE3531904 C2 DE 3531904C2 DE 19853531904 DE19853531904 DE 19853531904 DE 3531904 A DE3531904 A DE 3531904A DE 3531904 C2 DE3531904 C2 DE 3531904C2
- Authority
- DE
- Germany
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J9/0215—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods by shearing interferometric methods
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19853531904 DE3531904A1 (de) | 1985-09-05 | 1985-09-05 | Lateral-shearing-interferometer zur phasendifferenzmessung von zwei wellenflaechen konstanter phase |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19853531904 DE3531904A1 (de) | 1985-09-05 | 1985-09-05 | Lateral-shearing-interferometer zur phasendifferenzmessung von zwei wellenflaechen konstanter phase |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3531904A1 DE3531904A1 (de) | 1986-03-27 |
DE3531904C2 true DE3531904C2 (un) | 1987-04-09 |
Family
ID=6280318
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19853531904 Granted DE3531904A1 (de) | 1985-09-05 | 1985-09-05 | Lateral-shearing-interferometer zur phasendifferenzmessung von zwei wellenflaechen konstanter phase |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE3531904A1 (un) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4413758A1 (de) * | 1993-04-21 | 1994-12-08 | Fraunhofer Ges Forschung | Verfahren und Vorrichtung für die Topographieprüfung von Oberflächen |
CN102519609A (zh) * | 2011-12-13 | 2012-06-27 | 中国科学院光电研究院 | 双通道横向剪切干涉仪 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4887899A (en) * | 1987-12-07 | 1989-12-19 | Hung Yau Y | Apparatus and method for electronic analysis of test objects |
GB0402941D0 (en) | 2004-02-11 | 2004-03-17 | Qinetiq Ltd | Surface shape measurement |
EP3652512B1 (en) | 2017-07-14 | 2021-09-01 | Wavesense Engineering GmbH | Optical apparatus |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3572934A (en) * | 1968-09-09 | 1971-03-30 | Ibm | Longitudinally reversed shearing interferometry |
US3661464A (en) * | 1970-03-16 | 1972-05-09 | Jorway Corp | Optical interferometer |
-
1985
- 1985-09-05 DE DE19853531904 patent/DE3531904A1/de active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4413758A1 (de) * | 1993-04-21 | 1994-12-08 | Fraunhofer Ges Forschung | Verfahren und Vorrichtung für die Topographieprüfung von Oberflächen |
DE4413758C2 (de) * | 1993-04-21 | 1998-09-17 | Fraunhofer Ges Forschung | Vorrichtung und Verfahren zur Prüfung der Gestalt einer Oberfläche eines zu vermessenden Objektes |
CN102519609A (zh) * | 2011-12-13 | 2012-06-27 | 中国科学院光电研究院 | 双通道横向剪切干涉仪 |
Also Published As
Publication number | Publication date |
---|---|
DE3531904A1 (de) | 1986-03-27 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
OAV | Applicant agreed to the publication of the unexamined application as to paragraph 31 lit. 2 z1 | ||
OP8 | Request for examination as to paragraph 44 patent law | ||
D2 | Grant after examination | ||
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: THIEME, REINHARD SCHOENFELDER, THOMAS, DIPL.-ING., |
|
8339 | Ceased/non-payment of the annual fee |