DE3500613A1 - Piezo-resistive pressure-measurement cell - Google Patents

Piezo-resistive pressure-measurement cell

Info

Publication number
DE3500613A1
DE3500613A1 DE19853500613 DE3500613A DE3500613A1 DE 3500613 A1 DE3500613 A1 DE 3500613A1 DE 19853500613 DE19853500613 DE 19853500613 DE 3500613 A DE3500613 A DE 3500613A DE 3500613 A1 DE3500613 A1 DE 3500613A1
Authority
DE
Germany
Prior art keywords
pressure
measurement
film
measurement cell
super
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19853500613
Other languages
German (de)
Inventor
Hans W Dipl Phys Keller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Keller hans W dipl-Physeth
Original Assignee
Keller hans W dipl-Physeth
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to DE19848407322 priority Critical patent/DE8407322U1/en
Application filed by Keller hans W dipl-Physeth filed Critical Keller hans W dipl-Physeth
Priority to DE19853500613 priority patent/DE3500613A1/en
Publication of DE3500613A1 publication Critical patent/DE3500613A1/en
Application status is Ceased legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061Electrical connection means
    • G01L19/0084Electrical connection means to the outside of the housing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627Protection against aggressive medium in general
    • G01L19/0645Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/142Multiple part housings
    • G01L19/143Two part housings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Abstract

A piezo-resistive pressure-measurement cell (1) normally has a measurement membrane (11) which is provided with resistors and has supply leads which originate from the connecting points of the resistor on the measurement membrane. In order to create a pressure-measurement cell which, with a very simple construction, can be used universally, and can be used as desired in accordance with the requirements, primarily by initial fitters, with pressure-measurement sensors, and which additionally permits a super-small, especially super-flat configuration, it is provided that the supply leads (19) be constructed on a plastic-film-material section (17) at whose one end the connecting points (15) of the resistor (3) make contact, via contact humps (21), with the supply leads (19) on the film-material section (17). In a special application case for producing a super-flat pressure-measurement cell, it is provided that said cell be arranged in a floating manner in the pressure cavity (79) and be held above the plastic-film-material section (17) (Figure 8). <IMAGE>
DE19853500613 1984-03-09 1985-01-10 Piezo-resistive pressure-measurement cell Ceased DE3500613A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE19848407322 DE8407322U1 (en) 1984-03-09 1984-03-09 Piezoresestive pressure measuring cell
DE19853500613 DE3500613A1 (en) 1984-03-09 1985-01-10 Piezo-resistive pressure-measurement cell

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19853500613 DE3500613A1 (en) 1984-03-09 1985-01-10 Piezo-resistive pressure-measurement cell

Publications (1)

Publication Number Publication Date
DE3500613A1 true DE3500613A1 (en) 1985-09-19

Family

ID=25828448

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19853500613 Ceased DE3500613A1 (en) 1984-03-09 1985-01-10 Piezo-resistive pressure-measurement cell

Country Status (1)

Country Link
DE (1) DE3500613A1 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0255084A2 (en) * 1986-07-30 1988-02-03 Pfister GmbH Pressure measuring cell
DE8802411U1 (en) * 1988-02-24 1989-06-29 Keller Ag Fuer Druckmesstechnik, Winterthur, Ch
EP0353880A2 (en) * 1988-08-01 1990-02-07 Pi (Medical) Corporation Catheter assembly
EP0384934A1 (en) * 1989-03-02 1990-09-05 Siemens Aktiengesellschaft Pressure sensor
DE4308718A1 (en) * 1993-03-15 1994-09-22 Siemens Ag Differential pressure transmitters
WO1995001557A1 (en) * 1993-06-30 1995-01-12 Ranco Incorporated Of Delaware Process for producing miniature components
DE102007017981A1 (en) 2007-04-05 2008-10-09 Bizerba Gmbh & Co. Kg Load cell, has retainer with retaining regions in which strain gauge devices are arranged, and third retaining region connecting former retaining regions, where third region exhibits smaller width than widths of former retaining regions
DE202009013919U1 (en) 2009-10-14 2010-06-24 Keller AG für Druckmeßtechnik pressure transmitters
DE202013002475U1 (en) 2013-03-14 2014-06-16 Keller AG für Druckmeßtechnik Pressure transducer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3088323A (en) * 1960-02-10 1963-05-07 Gulton Ind Inc Piezoresistive transducer
DE2630640B2 (en) * 1975-07-08 1980-09-18 Hans W. Dipl.-Phys. Eth Winterthur Keller (Schweiz)

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3088323A (en) * 1960-02-10 1963-05-07 Gulton Ind Inc Piezoresistive transducer
DE2630640B2 (en) * 1975-07-08 1980-09-18 Hans W. Dipl.-Phys. Eth Winterthur Keller (Schweiz)

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
European Electronics, Europa-Fachpresse Verlag GmbH, München 2/1982, S. 3 *
Feinwerktechnik & Meßtechnik 90/1982, H. 7, S. 329-332 *
H. Delfs, Hybridschaltungen, Verlag Berliner Union GmbH, Stuttgart 1973, S. 136, 145 *
Instruments & Control Systems, April 1978, H. 4, p. 19-26 *
Rev. Sci. Instr. Vol. 31, No. 9, Sep. 1960, p. 987-991 *

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3625842A1 (en) * 1986-07-30 1988-02-04 Pfister Gmbh Pressure measuring cell
EP0255084A3 (en) * 1986-07-30 1990-02-21 Pfister GmbH Pressure measuring cell
EP0255084A2 (en) * 1986-07-30 1988-02-03 Pfister GmbH Pressure measuring cell
US4967600A (en) * 1988-02-24 1990-11-06 Killer AG fur Druckmebrechnik Manometer
DE8802411U1 (en) * 1988-02-24 1989-06-29 Keller Ag Fuer Druckmesstechnik, Winterthur, Ch
EP0353880A2 (en) * 1988-08-01 1990-02-07 Pi (Medical) Corporation Catheter assembly
EP0353880A3 (en) * 1988-08-01 1991-07-24 Pi (Medical) Corporation Catheter assembly
EP0384934A1 (en) * 1989-03-02 1990-09-05 Siemens Aktiengesellschaft Pressure sensor
DE4308718A1 (en) * 1993-03-15 1994-09-22 Siemens Ag Differential pressure transmitters
US5596148A (en) * 1993-03-15 1997-01-21 Siemens Aktiengesellschaft Pressure difference measurement transducer with electric lead-through in bore parallel to housing longitudinal axis
WO1995001557A1 (en) * 1993-06-30 1995-01-12 Ranco Incorporated Of Delaware Process for producing miniature components
DE102007017981A1 (en) 2007-04-05 2008-10-09 Bizerba Gmbh & Co. Kg Load cell, has retainer with retaining regions in which strain gauge devices are arranged, and third retaining region connecting former retaining regions, where third region exhibits smaller width than widths of former retaining regions
DE102007017981B4 (en) * 2007-04-05 2008-12-04 Bizerba Gmbh & Co. Kg Load cell and method of manufacturing a load cell
DE202009013919U1 (en) 2009-10-14 2010-06-24 Keller AG für Druckmeßtechnik pressure transmitters
DE202013002475U1 (en) 2013-03-14 2014-06-16 Keller AG für Druckmeßtechnik Pressure transducer

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8131 Rejection