DE3473687D1 - Ionization-gauge - Google Patents

Ionization-gauge

Info

Publication number
DE3473687D1
DE3473687D1 DE8484104713T DE3473687T DE3473687D1 DE 3473687 D1 DE3473687 D1 DE 3473687D1 DE 8484104713 T DE8484104713 T DE 8484104713T DE 3473687 T DE3473687 T DE 3473687T DE 3473687 D1 DE3473687 D1 DE 3473687D1
Authority
DE
Germany
Prior art keywords
ionization
gauge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8484104713T
Other languages
German (de)
English (en)
Inventor
Daniel Granville Bills
Stephen Lerele Dodgen
Paul Clarke Arnold
Cleve Craig Brainard Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Granville Phillips Co
Original Assignee
Granville Phillips Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Granville Phillips Co filed Critical Granville Phillips Co
Application granted granted Critical
Publication of DE3473687D1 publication Critical patent/DE3473687D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
DE8484104713T 1983-05-24 1984-04-26 Ionization-gauge Expired DE3473687D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/497,581 US4636680A (en) 1983-05-24 1983-05-24 Vacuum gauge

Publications (1)

Publication Number Publication Date
DE3473687D1 true DE3473687D1 (en) 1988-09-29

Family

ID=23977441

Family Applications (2)

Application Number Title Priority Date Filing Date
DE8484104713T Expired DE3473687D1 (en) 1983-05-24 1984-04-26 Ionization-gauge
DE198484104713T Pending DE126987T1 (de) 1983-05-24 1984-04-26 Unterdruckmesser.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE198484104713T Pending DE126987T1 (de) 1983-05-24 1984-04-26 Unterdruckmesser.

Country Status (6)

Country Link
US (1) US4636680A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0126987B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS59225326A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CA (1) CA1219087A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (2) DE3473687D1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
IL (1) IL71721A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4808820A (en) * 1987-09-23 1989-02-28 Hewlett-Packard Company Electron-emission filament cutoff for gas chromatography + mass spectrometry systems
US5128617A (en) * 1990-04-11 1992-07-07 Granville-Phillips Company Ionization vacuum gauge with emission of electrons in parallel paths
US6025723A (en) * 1997-08-27 2000-02-15 Granville-Phillips Company Miniature ionization gauge utilizing multiple ion collectors
DE19907994C2 (de) * 1999-02-25 2001-01-18 Luebken Franz Josef Ionisationsmanometer-Ultrahochvakuummeßröhre
US7838850B2 (en) * 1999-12-13 2010-11-23 Semequip, Inc. External cathode ion source
KR100706788B1 (ko) * 2005-11-17 2007-04-12 삼성전자주식회사 필라멘트 부재 및 이를 가지는 이온 주입 장치의 이온 소스
CN101303264B (zh) * 2007-05-09 2010-05-26 清华大学 电离规
JP4568321B2 (ja) * 2007-11-27 2010-10-27 有限会社真空実験室 冷陰極電離真空計
WO2010033427A1 (en) * 2008-09-19 2010-03-25 Brooks Automation, Inc. Ionization gauge with emission current and bias potential control
EP2800960B1 (en) 2012-02-08 2018-10-31 MKS Instruments, Inc. Ionization gauge for high pressure operation
JP6180952B2 (ja) * 2014-01-31 2017-08-16 東芝メモリ株式会社 デバイス製造装置及び磁気デバイスの製造方法
US10132707B2 (en) * 2015-07-09 2018-11-20 Mks Instruments, Inc. Devices and methods for feedthrough leakage current detection and decontamination in ionization gauges

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2605432A (en) * 1949-10-19 1952-07-29 Electrons Inc Indirectly heated cathode structure
US2605431A (en) * 1950-03-30 1952-07-29 Westinghouse Electric Corp Ionization vacuum gauge
US3388290A (en) * 1964-04-15 1968-06-11 Wisconsin Alumni Res Found Electron orbiting device including a flat,ribbon-type,thermionic filament
US3743876A (en) * 1969-10-07 1973-07-03 Canadian Patents Dev Hot-cathode ionization gauge having electrode means for shaping the electric field in the vicinity of the cathode
GB1336126A (en) * 1969-10-29 1973-11-07 Mullard Ltd Ion gauges
DE2060122A1 (de) * 1969-12-09 1971-06-24 Edwards High Vacuum Int Ltd Vakuummessgeraet
US3839655A (en) * 1973-08-24 1974-10-01 Varian Associates Bayard-alpert vacuum ionization tube
US4307323A (en) * 1980-04-04 1981-12-22 Granville-Phillips Company Vacuum gauge
DE3042172A1 (de) * 1980-11-08 1982-06-16 Leybold-Heraeus GmbH, 5000 Köln Ionisationsmanometerroehre nach bayard-alpert

Also Published As

Publication number Publication date
CA1219087A (en) 1987-03-10
US4636680A (en) 1987-01-13
DE126987T1 (de) 1985-12-05
EP0126987A1 (en) 1984-12-05
IL71721A0 (en) 1984-09-30
JPS59225326A (ja) 1984-12-18
EP0126987B1 (en) 1988-08-24
IL71721A (en) 1989-12-15
JPH0372940B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-11-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee