DE3460840D1 - An apparatus for measuring carrier lifetimes in a semiconductor - Google Patents
An apparatus for measuring carrier lifetimes in a semiconductorInfo
- Publication number
- DE3460840D1 DE3460840D1 DE8484300626T DE3460840T DE3460840D1 DE 3460840 D1 DE3460840 D1 DE 3460840D1 DE 8484300626 T DE8484300626 T DE 8484300626T DE 3460840 T DE3460840 T DE 3460840T DE 3460840 D1 DE3460840 D1 DE 3460840D1
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor
- carrier lifetimes
- measuring carrier
- measuring
- lifetimes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
- G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S136/00—Batteries: thermoelectric and photoelectric
- Y10S136/29—Testing, calibrating, treating, e.g. aging
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58015174A JPS59141238A (ja) | 1983-02-01 | 1983-02-01 | キヤリア寿命測定装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3460840D1 true DE3460840D1 (en) | 1986-11-06 |
Family
ID=11881442
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8484300626T Expired DE3460840D1 (en) | 1983-02-01 | 1984-02-01 | An apparatus for measuring carrier lifetimes in a semiconductor |
Country Status (5)
Country | Link |
---|---|
US (1) | US4581578A (de) |
EP (1) | EP0118199B1 (de) |
JP (1) | JPS59141238A (de) |
CA (1) | CA1203325A (de) |
DE (1) | DE3460840D1 (de) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4706018A (en) * | 1984-11-01 | 1987-11-10 | International Business Machines Corporation | Noncontact dynamic tester for integrated circuits |
EP0226913A3 (de) * | 1985-12-17 | 1988-10-05 | Siemens Aktiengesellschaft | Verfahren und Anordnung zur Lokalisierung und/oder Abbildung der ein bestimmtes zeitabhängiges Signal führenden Punkte einer Probe |
US4786865A (en) * | 1986-03-03 | 1988-11-22 | The Boeing Company | Method and apparatus for testing integrated circuit susceptibility to cosmic rays |
IT1216540B (it) * | 1988-03-29 | 1990-03-08 | Sgs Thomson Microelectronics | Metodo e apparecchiatura per la misura del tempo di vita su giunzioni p_n a semiconduttore tramite effetto fotovoltaiico. |
US5025145A (en) * | 1988-08-23 | 1991-06-18 | Lagowski Jacek J | Method and apparatus for determining the minority carrier diffusion length from linear constant photon flux photovoltage measurements |
JP2889307B2 (ja) * | 1990-03-26 | 1999-05-10 | 株式会社東芝 | ▲iv▼族半導体のキャリアライフタイム測定法 |
US5053699A (en) * | 1990-05-25 | 1991-10-01 | Texas Instruments Incorporated | Scanning electron microscope based parametric testing method and apparatus |
JP2702807B2 (ja) * | 1990-08-09 | 1998-01-26 | 東芝セラミックス株式会社 | 半導体中の深い不純物準位の測定方法及びその装置 |
JPH07105427B2 (ja) * | 1992-10-19 | 1995-11-13 | 学校法人幾徳学園 | 半導体材料のライフタイム評価方法とその装置 |
US5661408A (en) | 1995-03-01 | 1997-08-26 | Qc Solutions, Inc. | Real-time in-line testing of semiconductor wafers |
US6037797A (en) * | 1997-07-11 | 2000-03-14 | Semiconductor Diagnostics, Inc. | Measurement of the interface trap charge in an oxide semiconductor layer interface |
US6325078B2 (en) | 1998-01-07 | 2001-12-04 | Qc Solutions, Inc., | Apparatus and method for rapid photo-thermal surface treatment |
US6154034A (en) * | 1998-10-20 | 2000-11-28 | Lovelady; James N. | Method and apparatus for testing photovoltaic solar cells using multiple pulsed light sources |
US6512384B1 (en) | 2000-06-29 | 2003-01-28 | Semiconductor Diagnostics, Inc. | Method for fast and accurate determination of the minority carrier diffusion length from simultaneously measured surface photovoltages |
US6836139B2 (en) * | 2002-10-22 | 2004-12-28 | Solid State Measurments, Inc. | Method and apparatus for determining defect and impurity concentration in semiconducting material of a semiconductor wafer |
US6911350B2 (en) * | 2003-03-28 | 2005-06-28 | Qc Solutions, Inc. | Real-time in-line testing of semiconductor wafers |
US7119569B2 (en) * | 2004-03-05 | 2006-10-10 | Qc Solutions, Inc. | Real-time in-line testing of semiconductor wafers |
US7200825B2 (en) * | 2004-08-27 | 2007-04-03 | International Business Machines Corporation | Methodology of quantification of transmission probability for minority carrier collection in a semiconductor chip |
US20070115460A1 (en) * | 2005-11-21 | 2007-05-24 | Capaldo Kevin P | Method for examining molds and apparatus for accomplishing the same |
US8816715B2 (en) * | 2011-05-12 | 2014-08-26 | Nanya Technology Corp. | MOS test structure, method for forming MOS test structure and method for performing wafer acceptance test |
RU2484551C1 (ru) * | 2012-01-31 | 2013-06-10 | Закрытое Акционерное Общество "ТЕЛЕКОМ-СТВ" | Способ измерения времени жизни неосновных носителей заряда в кремнии |
RU2486629C1 (ru) * | 2012-01-31 | 2013-06-27 | Закрытое Акционерное Общество "ТЕЛЕКОМ-СТВ" | Способ контроля времени жизни неосновных носителей заряда в слитках кремния |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5266373A (en) * | 1975-11-28 | 1977-06-01 | Sharp Corp | Determination of lifetime and surface recombination speed of semicondu ctor device |
US4273421A (en) * | 1977-01-17 | 1981-06-16 | Motorola, Inc. | Semiconductor lifetime measurement method |
US4122383A (en) * | 1977-12-16 | 1978-10-24 | Nasa | Method and apparatus for measuring minority carrier lifetimes and bulk diffusion length in P-N junction solar cells |
US4211488A (en) * | 1978-10-03 | 1980-07-08 | Rca Corporation | Optical testing of a semiconductor |
US4333051A (en) * | 1980-05-28 | 1982-06-01 | Rca Corporation | Method and apparatus for determining minority carrier diffusion length in semiconductors |
US4563642A (en) * | 1981-10-09 | 1986-01-07 | Hitachi, Ltd. | Apparatus for nondestructively measuring characteristics of a semiconductor wafer with a junction |
-
1983
- 1983-02-01 JP JP58015174A patent/JPS59141238A/ja active Pending
-
1984
- 1984-01-31 US US06/575,691 patent/US4581578A/en not_active Expired - Lifetime
- 1984-01-31 CA CA000446381A patent/CA1203325A/en not_active Expired
- 1984-02-01 DE DE8484300626T patent/DE3460840D1/de not_active Expired
- 1984-02-01 EP EP84300626A patent/EP0118199B1/de not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS59141238A (ja) | 1984-08-13 |
US4581578A (en) | 1986-04-08 |
CA1203325A (en) | 1986-04-15 |
EP0118199B1 (de) | 1986-10-01 |
EP0118199A1 (de) | 1984-09-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Free format text: STREHL, P., DIPL.-ING. DIPL.-WIRTSCH.-ING. SCHUEBEL-HOPF, U., DIPL.-CHEM. DR.RER.NAT. GROENING, H., DIPL.-ING., PAT.-ANWAELTE, 8000 MUENCHEN |
|
8339 | Ceased/non-payment of the annual fee |