DE3377685D1 - Process and apparatus for unsoldering solder bonded semiconductor devices - Google Patents

Process and apparatus for unsoldering solder bonded semiconductor devices

Info

Publication number
DE3377685D1
DE3377685D1 DE8383104480T DE3377685T DE3377685D1 DE 3377685 D1 DE3377685 D1 DE 3377685D1 DE 8383104480 T DE8383104480 T DE 8383104480T DE 3377685 T DE3377685 T DE 3377685T DE 3377685 D1 DE3377685 D1 DE 3377685D1
Authority
DE
Germany
Prior art keywords
unsoldering
semiconductor devices
bonded semiconductor
solder bonded
solder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383104480T
Other languages
English (en)
Inventor
Karl Schink
Herbert Wenskus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3377685D1 publication Critical patent/DE3377685D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/018—Unsoldering; Removal of melted solder or other residues
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/75—Apparatus for connecting with bump connectors or layer connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/799—Apparatus for disconnecting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/98—Methods for disconnecting semiconductor or solid-state bodies
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components
    • H05K13/0486—Replacement and removal of components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/40—Semiconductor devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/7525—Means for applying energy, e.g. heating means
    • H01L2224/75252—Means for applying energy, e.g. heating means in the upper part of the bonding apparatus, e.g. in the bonding head
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/757—Means for aligning
    • H01L2224/75702—Means for aligning in the upper part of the bonding apparatus, e.g. in the bonding head
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/818—Bonding techniques
    • H01L2224/81801—Soldering or alloying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01005—Boron [B]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01006—Carbon [C]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/0105—Tin [Sn]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01075—Rhenium [Re]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01077—Iridium [Ir]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01078—Platinum [Pt]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01082—Lead [Pb]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013—Alloys
    • H01L2924/014—Solder alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/102—Material of the semiconductor or solid state bodies
    • H01L2924/1025—Semiconducting materials
    • H01L2924/10251—Elemental semiconductors, i.e. Group IV
    • H01L2924/10253—Silicon [Si]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/14—Integrated circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/156—Material
    • H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
    • H01L2924/15787—Ceramics, e.g. crystalline carbides, nitrides or oxides

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Die Bonding (AREA)
  • Wire Bonding (AREA)
DE8383104480T 1982-06-28 1983-05-06 Process and apparatus for unsoldering solder bonded semiconductor devices Expired DE3377685D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/392,905 US4444559A (en) 1982-06-28 1982-06-28 Process and apparatus for unsoldering solder bonded semiconductor devices

Publications (1)

Publication Number Publication Date
DE3377685D1 true DE3377685D1 (en) 1988-09-15

Family

ID=23552495

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383104480T Expired DE3377685D1 (en) 1982-06-28 1983-05-06 Process and apparatus for unsoldering solder bonded semiconductor devices

Country Status (4)

Country Link
US (1) US4444559A (de)
EP (1) EP0097796B1 (de)
JP (1) JPS598342A (de)
DE (1) DE3377685D1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60231391A (ja) * 1984-04-29 1985-11-16 横田機械株式会社 電子部品の半田溶解装置
JPS61141197A (ja) * 1984-12-14 1986-06-28 富士通株式会社 フラツトリ−ド形電子部品の取外し方法及びその装置
US4632294A (en) * 1984-12-20 1986-12-30 International Business Machines Corporation Process and apparatus for individual pin repair in a dense array of connector pins of an electronic packaging structure
JPS625680U (de) * 1985-06-26 1987-01-14
JPH0316298Y2 (de) * 1985-07-25 1991-04-08
US4626205A (en) * 1985-08-08 1986-12-02 Pace, Incorporated Nozzle structure for air flow soldering/desoldering
EP0233018B1 (de) * 1986-02-01 1991-08-07 THE GENERAL ELECTRIC COMPANY, p.l.c. Lötvorrichtung
CA1268022A (en) * 1986-02-13 1990-04-24 Philip J. Bois Surface mount technology repair station and method for repair of surface mount technology circuit boards
FR2604372B1 (fr) * 1986-09-26 1989-02-10 Thomson Csf Buse de debrasage pour generateur d'air chaud et generateur d'air chaud equipe d'une telle buse
DE4320670A1 (de) * 1993-06-22 1995-01-05 Microtronic Microelectronic Co Verfahren und Vorrichtung zur Reparatur von Elektronikplatinen
JP3279940B2 (ja) * 1996-11-27 2002-04-30 シャープ株式会社 電子回路装置の製造方法、半田残渣均一化治具、金属ロウペースト転写用治具及び電子回路装置の製造装置
DE29621604U1 (de) * 1996-12-12 1998-01-02 Cooper Tools GmbH, 74354 Besigheim Löt-/Entlötvorrichtung
US6247630B1 (en) * 1997-12-17 2001-06-19 Sun Microsystems, Inc. Apparatus and method for uniformly melting the solder attaching a surface mount device to a printed circuit board
US6845556B1 (en) * 2002-03-20 2005-01-25 Emc Corporation Techniques for reworking circuit boards with ni/au finish
FR2864419B1 (fr) * 2003-12-19 2006-04-28 Hispano Suiza Sa Procede pour braser un composant electronique sur une carte electronique, procede de reparation de la carte et installation pour la mise en oeuvre du procede
DE102007021269B4 (de) * 2007-05-03 2009-07-09 Siemens Ag Reparaturlötkopf für oberflächenmontiertes Bauelement und Verfahren zu dessen Betrieb
JP2010010359A (ja) * 2008-06-26 2010-01-14 Fujitsu Ltd リペア装置及びリペア方法
JP2015050286A (ja) * 2013-08-30 2015-03-16 株式会社東芝 剥離装置及び剥離方法
US10269762B2 (en) * 2015-10-29 2019-04-23 Taiwan Semiconductor Manufacturing Company, Ltd. Rework process and tool design for semiconductor package
US10256204B2 (en) 2016-11-08 2019-04-09 Globalfoundries Inc. Separation of integrated circuit structure from adjacent chip
US11310950B2 (en) 2019-10-22 2022-04-19 International Business Machines Corporation Liquid metal infiltration rework of electronic assembly
US11278977B2 (en) 2019-10-22 2022-03-22 International Business Machines Corporation Liquid metal infiltration rework of electronic assembly

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3389896A (en) * 1966-10-10 1968-06-25 Phillips Petroleum Co Method and apparatus for heating thermoplastic containers for sealing
US3761550A (en) * 1968-12-13 1973-09-25 Phillips Petroleum Co Internal heating of rotating parison
AT297076B (de) * 1968-12-27 1972-03-10 Messer Griesheim Gmbh Verfahren und Vorrichtung zur Schnellerwärmung von Rohren mit Brennern
US4014640A (en) * 1970-08-07 1977-03-29 Vern Emery Company, Inc. Pipe belling and chamfering machine
US3735911A (en) * 1971-04-30 1973-05-29 Ibm Integrated circuit chip repair tool
JPS5467915A (en) * 1977-11-08 1979-05-31 Toyota Motor Corp Device for forcibly heating part of car body
US4274576A (en) * 1979-11-13 1981-06-23 International Business Machines Corporation Cryogenic chip removal technique
US4295596A (en) * 1979-12-19 1981-10-20 Western Electric Company, Inc. Methods and apparatus for bonding an article to a metallized substrate
FI811410L (fi) * 1981-05-07 1982-11-08 Asko Upo Oy Foerfarande foer uppvaermning av aendan i ett plastroer och cirkulationsluftugn foer utfoerande av foerfarandet. ec;g;820614:17;l

Also Published As

Publication number Publication date
JPH0144017B2 (de) 1989-09-25
JPS598342A (ja) 1984-01-17
EP0097796B1 (de) 1988-08-10
EP0097796A3 (en) 1985-09-04
EP0097796A2 (de) 1984-01-11
US4444559A (en) 1984-04-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee