DE3375029D1 - Protected vapor-deposited metal layers - Google Patents

Protected vapor-deposited metal layers

Info

Publication number
DE3375029D1
DE3375029D1 DE8383300897T DE3375029T DE3375029D1 DE 3375029 D1 DE3375029 D1 DE 3375029D1 DE 8383300897 T DE8383300897 T DE 8383300897T DE 3375029 T DE3375029 T DE 3375029T DE 3375029 D1 DE3375029 D1 DE 3375029D1
Authority
DE
Germany
Prior art keywords
vapor
protected
metal layers
deposited metal
deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383300897T
Other languages
English (en)
Inventor
Barbara M Cederberg
Edward J Downing
Richard S Fisch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/350,437 external-priority patent/US4405678A/en
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Application granted granted Critical
Publication of DE3375029D1 publication Critical patent/DE3375029D1/de
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G03F1/48—Protective coatings

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Jellies, Jams, And Syrups (AREA)
  • Confectionery (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
DE8383300897T 1982-02-22 1983-02-21 Protected vapor-deposited metal layers Expired DE3375029D1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US35072282A 1982-02-22 1982-02-22
US35072482A 1982-02-22 1982-02-22
US06/350,437 US4405678A (en) 1982-02-22 1982-02-22 Protected vapor-deposited metal layers

Publications (1)

Publication Number Publication Date
DE3375029D1 true DE3375029D1 (en) 1988-02-04

Family

ID=27407948

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383300897T Expired DE3375029D1 (en) 1982-02-22 1983-02-21 Protected vapor-deposited metal layers

Country Status (5)

Country Link
EP (2) EP0087309B1 (de)
AU (1) AU1168783A (de)
BR (1) BR8300826A (de)
DE (1) DE3375029D1 (de)
GR (1) GR77811B (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8712789D0 (en) * 1986-06-25 1989-10-18 Secr Defence Pyrotechnic train
DE3782983T2 (de) * 1986-07-30 1993-04-08 Hitachi Ltd Verfahren zur herstellung eines polyimidfilms durch chemische ablagerung aus der dampfphase.
GB8905747D0 (en) * 1989-03-13 1989-04-26 Secr Defence Pyrotechnic material
US6218004B1 (en) 1995-04-06 2001-04-17 David G. Shaw Acrylate polymer coated sheet materials and method of production thereof
GB9712483D0 (en) 1997-06-17 1997-08-20 Kathirgamanathan Poopathy Fabrication of light emitting devices from chelates of transition metals, lanthanides and actinides
GB9823761D0 (en) 1998-11-02 1998-12-23 South Bank Univ Entpr Ltd Novel electroluminescent materials
GB9826407D0 (en) 1998-12-02 1999-01-27 South Bank Univ Entpr Ltd Novel electroluminescent materials
GB9826405D0 (en) * 1998-12-02 1999-01-27 South Bank Univ Entpr Ltd Method for forming films or layers
GB9901971D0 (en) 1999-02-01 1999-03-17 South Bank Univ Entpr Ltd Electroluminescent material
GB0109755D0 (en) 2001-04-20 2001-06-13 Elam T Ltd Devices incorporating mixed metal organic complexes
TWI303533B (en) 2001-06-15 2008-11-21 Oled T Ltd Electroluminescent devices
GB0116644D0 (en) 2001-07-09 2001-08-29 Elam T Ltd Electroluminescent materials and devices
WO2003014256A1 (en) 2001-08-04 2003-02-20 Elam-T Limited Electroluminescent device
EP2300225A1 (de) * 2008-07-08 2011-03-30 DSM IP Assets B.V. Laminat und verbundschicht aus einem substrat und einer deckschicht sowie verfahren und vorrichtung zu seiner herstellung

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2340995A1 (fr) * 1976-02-16 1977-09-09 Fuji Photo Film Co Ltd Procede de fabrication d'un materiau en feuille comportant une couche metallique deposee sous vide, et procede de fabrication d'un materiau d'enregistrement

Also Published As

Publication number Publication date
EP0176693A3 (de) 1988-04-13
EP0087309B1 (de) 1987-12-23
EP0087309A1 (de) 1983-08-31
AU1168783A (en) 1983-09-01
BR8300826A (pt) 1983-11-16
EP0176693A2 (de) 1986-04-09
GR77811B (de) 1984-09-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition