DE3374552D1 - Method and apparatus for transporting and treating an article in vacuum - Google Patents

Method and apparatus for transporting and treating an article in vacuum

Info

Publication number
DE3374552D1
DE3374552D1 DE8383401070T DE3374552T DE3374552D1 DE 3374552 D1 DE3374552 D1 DE 3374552D1 DE 8383401070 T DE8383401070 T DE 8383401070T DE 3374552 T DE3374552 T DE 3374552T DE 3374552 D1 DE3374552 D1 DE 3374552D1
Authority
DE
Germany
Prior art keywords
transporting
article
treating
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383401070T
Other languages
English (en)
Inventor
Masayasu Nagashima
Nobuo Iijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Application granted granted Critical
Publication of DE3374552D1 publication Critical patent/DE3374552D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
  • Air Transport Of Granular Materials (AREA)
  • Chemical Vapour Deposition (AREA)
DE8383401070T 1982-05-28 1983-05-27 Method and apparatus for transporting and treating an article in vacuum Expired DE3374552D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57091629A JPS58207217A (ja) 1982-05-28 1982-05-28 真空中に於ける物体の移送方法

Publications (1)

Publication Number Publication Date
DE3374552D1 true DE3374552D1 (en) 1987-12-23

Family

ID=14031838

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383401070T Expired DE3374552D1 (en) 1982-05-28 1983-05-27 Method and apparatus for transporting and treating an article in vacuum

Country Status (5)

Country Link
US (1) US4690591A (de)
EP (1) EP0095980B1 (de)
JP (1) JPS58207217A (de)
DE (1) DE3374552D1 (de)
IE (2) IE54478B1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6074626A (ja) * 1983-09-30 1985-04-26 Fujitsu Ltd ウエハー処理方法及び装置
FR2596070A1 (fr) * 1986-03-21 1987-09-25 Labo Electronique Physique Dispositif comprenant un suscepteur plan tournant parallelement a un plan de reference autour d'un axe perpendiculaire a ce plan
DE3635542A1 (de) * 1986-10-18 1988-04-28 Philips Patentverwaltung Verfahren und vorrichtung zum trocknen keramischer gruenkoerper
NL8703024A (nl) * 1986-12-18 1988-07-18 De Beers Ind Diamond Werkwijze voor het bepalen van een stralingsdosis alsmede inrichting voor het uitvoeren van de werkwijze.
DE58909880D1 (de) * 1988-05-24 2001-12-20 Unaxis Balzers Ag Vakuumanlage
DE4100526A1 (de) * 1991-01-10 1992-07-16 Wacker Chemitronic Vorrichtung und verfahren zum automatischen vereinzeln von gestapelten scheiben
US5290504A (en) * 1992-10-30 1994-03-01 International Business Machines Corporation Continuous air bearing vapor stabilization system and method
MY117325A (en) * 1997-08-04 2004-06-30 Matsushita Electric Ind Co Ltd Method of heat treating object and apparatus for the same.
WO2001082338A1 (de) * 2000-04-20 2001-11-01 Linde Ag Verfahren und vorrichtung zum transport von wafern
DE10319379A1 (de) 2003-04-30 2004-11-25 Applied Films Gmbh & Co. Kg Vorrichtung zum Transportieren eines flachen Substrats in einer Vakuumkammer
US10332770B2 (en) * 2014-09-24 2019-06-25 Sandisk Technologies Llc Wafer transfer system
TWI711071B (zh) * 2019-02-18 2020-11-21 啟端光電股份有限公司 真空轉移裝置及其形成方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH350797A (fr) * 1957-12-23 1960-12-15 Applic Ind Plastiques Soc D Procédé pour le conditionnement et le transport de films plastiques et dispositif pour sa mise en oeuvre
US3773391A (en) * 1971-09-07 1973-11-20 Rex Chainbelt Inc Air conveyor
BE791031A (nl) * 1971-11-26 1973-03-01 Rex Luchstraaltransporteur
US3947236A (en) * 1971-11-29 1976-03-30 Lasch Jr Cecil A Fluid bearing transfer and heat treating apparatus and method
US4010981A (en) * 1973-09-20 1977-03-08 Hodge Trevor A Air conveyor with tunnel guide
US3980024A (en) * 1974-11-18 1976-09-14 Futer Rudolph E Air propelled vehicle transportation system
US4069595A (en) * 1975-01-24 1978-01-24 Aktiebolaget Svenska Flaktfabriken Arrangement for conveying web material through a treating plant
US3975057A (en) * 1975-02-06 1976-08-17 The Motch & Merryweather Machinery Company Stopping device for air conveyor
JPS5375683A (en) * 1976-12-17 1978-07-05 Hitachi Ltd Wafer transporting apparatus
US4293249A (en) * 1980-03-03 1981-10-06 Texas Instruments Incorporated Material handling system and method for manufacturing line
US4414757A (en) * 1981-10-07 1983-11-15 Overly, Incorporated Web dryer nozzle assembly

Also Published As

Publication number Publication date
EP0095980B1 (de) 1987-11-19
JPS58207217A (ja) 1983-12-02
IE54478B1 (en) 1989-10-25
US4690591A (en) 1987-09-01
EP0095980A3 (en) 1984-03-07
EP0095980A2 (de) 1983-12-07
JPH034459B2 (de) 1991-01-23
IE831272L (en) 1983-12-11

Similar Documents

Publication Publication Date Title
GB2117168B (en) Method and apparatus for use in processing signals
DE3374239D1 (en) Apparatus and method for processing documents
DE3377171D1 (en) Apparatus and method for processing documents
DE3379243D1 (en) Apparatus and method for processing documents
EP0140294A3 (en) Plasma processing method and apparatus for carrying out the same
DE3374180D1 (en) Method and apparatus for sorting articles
OA07351A (en) Method and apparatus for inventigating stand-off in aborehole.
ZA834925B (en) Apparatus and method for processing fruit and the like
EP0106056A3 (en) Device for the loading and in particular unloading of processing machines
EP0119075A3 (en) Faulty-memory processing method and apparatus
EP0105453A3 (en) Apparatus and method for processing fruit and the like
GB2124927B (en) Apparatus and method for processing bagged refuse
ZA888975B (en) Carriage and apparatus for transporting articles
GB2121012B (en) Process and apparatus for transporting sheet piles
GB2147563B (en) Article handling apparatus and method
DE3374552D1 (en) Method and apparatus for transporting and treating an article in vacuum
GB2112340B (en) Method and apparatus for transporting and guiding articles
GB2120627B (en) Workpiece accumulating and transporting apparatus
DE3271519D1 (en) Method and apparatus for conveying linear articles
DE3175795D1 (en) Apparatus and method for sorting articles
GB2148234B (en) Method and apparatus for de-bagging can ends and like articles
GB2204307B (en) Process and apparatus for transporting containers
GB9126836D0 (en) Method and apparatus for processing used batteries
GB2082441B (en) Method and apparatus for transporting rod-shaped articles
GB2078658B (en) Vacuum packaging process and apparatus

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee