DE3373384D1 - Piezoelectric sensor - Google Patents
Piezoelectric sensorInfo
- Publication number
- DE3373384D1 DE3373384D1 DE8383109771T DE3373384T DE3373384D1 DE 3373384 D1 DE3373384 D1 DE 3373384D1 DE 8383109771 T DE8383109771 T DE 8383109771T DE 3373384 T DE3373384 T DE 3373384T DE 3373384 D1 DE3373384 D1 DE 3373384D1
- Authority
- DE
- Germany
- Prior art keywords
- piezoelectric sensor
- piezoelectric
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/302—Sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
- G01F1/32—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow using swirl flowmeters
- G01F1/325—Means for detecting quantities used as proxy variables for swirl
- G01F1/3259—Means for detecting quantities used as proxy variables for swirl for detecting fluid pressure oscillations
- G01F1/3266—Means for detecting quantities used as proxy variables for swirl for detecting fluid pressure oscillations by sensing mechanical vibrations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57173250A JPS5963537A (ja) | 1982-10-04 | 1982-10-04 | 圧電センサ |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3373384D1 true DE3373384D1 (en) | 1987-10-08 |
Family
ID=15956945
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8383109771T Expired DE3373384D1 (en) | 1982-10-04 | 1983-09-29 | Piezoelectric sensor |
Country Status (6)
Country | Link |
---|---|
US (1) | US4511819A (de) |
EP (1) | EP0105483B1 (de) |
JP (1) | JPS5963537A (de) |
KR (1) | KR890000690B1 (de) |
CA (1) | CA1200117A (de) |
DE (1) | DE3373384D1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100850644B1 (ko) * | 2007-07-03 | 2008-08-07 | 한국과학기술연구원 | 압전액츄에이터를 이용한 파일롯밸브 |
CN106441665A (zh) * | 2016-09-26 | 2017-02-22 | 郑州航空工业管理学院 | 基于压电石英晶片弯曲效应的弯矩测量方法及传感器 |
CN112654842A (zh) * | 2018-08-30 | 2021-04-13 | 微动公司 | 用于涡旋流量计的非侵入式传感器 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2289954A (en) * | 1942-01-08 | 1942-07-14 | Brush Dev Co | Leakage reducing means |
US2483677A (en) * | 1946-06-24 | 1949-10-04 | Brush Dev Co | Moistureproof piezoelectric crystal and method of making same |
US2558563A (en) * | 1948-10-29 | 1951-06-26 | Gen Electric | Piezoelectric strain gauge |
FR1098774A (fr) * | 1953-02-12 | 1955-08-22 | Philips Nv | élément piézo-électrique |
GB739632A (en) * | 1953-02-12 | 1955-11-02 | Philips Electrical Ind Ltd | Improvements in or relating to piezo-electric elements |
US3054982A (en) * | 1959-02-16 | 1962-09-18 | Robert J Kieser | Hydrostatic pressure transducer |
US3031591A (en) * | 1959-05-27 | 1962-04-24 | Gen Electric | Pressure measuring gage |
US3509389A (en) * | 1969-03-05 | 1970-04-28 | Us Army | Piezo-electric crystal construction |
GB1411968A (en) * | 1972-12-19 | 1975-10-29 | Standard Telephones Cables Ltd | Pressure transducer |
US3821747A (en) * | 1973-04-23 | 1974-06-28 | Atomic Energy Commission | Recording system having piezoelectric stylus drive means |
US4093883A (en) * | 1975-06-23 | 1978-06-06 | Yujiro Yamamoto | Piezoelectric multimorph switches |
-
1982
- 1982-10-04 JP JP57173250A patent/JPS5963537A/ja active Granted
-
1983
- 1983-09-22 US US06/534,915 patent/US4511819A/en not_active Expired - Lifetime
- 1983-09-27 CA CA000437654A patent/CA1200117A/en not_active Expired
- 1983-09-27 KR KR1019830004528A patent/KR890000690B1/ko not_active IP Right Cessation
- 1983-09-29 DE DE8383109771T patent/DE3373384D1/de not_active Expired
- 1983-09-29 EP EP83109771A patent/EP0105483B1/de not_active Expired
Also Published As
Publication number | Publication date |
---|---|
EP0105483A3 (en) | 1984-09-12 |
EP0105483A2 (de) | 1984-04-18 |
KR890000690B1 (ko) | 1989-03-24 |
CA1200117A (en) | 1986-02-04 |
US4511819A (en) | 1985-04-16 |
JPH0225446B2 (de) | 1990-06-04 |
EP0105483B1 (de) | 1987-09-02 |
KR840006694A (ko) | 1984-12-01 |
JPS5963537A (ja) | 1984-04-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |