DE3365475D1 - Pattern generator for integrated circuits and process using this generator - Google Patents

Pattern generator for integrated circuits and process using this generator

Info

Publication number
DE3365475D1
DE3365475D1 DE8383402275T DE3365475T DE3365475D1 DE 3365475 D1 DE3365475 D1 DE 3365475D1 DE 8383402275 T DE8383402275 T DE 8383402275T DE 3365475 T DE3365475 T DE 3365475T DE 3365475 D1 DE3365475 D1 DE 3365475D1
Authority
DE
Germany
Prior art keywords
generator
integrated circuits
pattern
pattern generator
circuits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383402275T
Other languages
German (de)
English (en)
Inventor
Catherine Gueugnon
Pierre Bernstein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CII HONEYWELL BULL
Original Assignee
CII HONEYWELL BULL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CII HONEYWELL BULL filed Critical CII HONEYWELL BULL
Application granted granted Critical
Publication of DE3365475D1 publication Critical patent/DE3365475D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Thin Magnetic Films (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
  • Medicines That Contain Protein Lipid Enzymes And Other Medicines (AREA)
DE8383402275T 1982-11-29 1983-11-25 Pattern generator for integrated circuits and process using this generator Expired DE3365475D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8219997A FR2536872A1 (fr) 1982-11-29 1982-11-29 Generateur de motifs pour circuits integres et procede de generation de motifs utilisant ce generateur

Publications (1)

Publication Number Publication Date
DE3365475D1 true DE3365475D1 (en) 1986-09-25

Family

ID=9279626

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383402275T Expired DE3365475D1 (en) 1982-11-29 1983-11-25 Pattern generator for integrated circuits and process using this generator

Country Status (4)

Country Link
US (1) US4514082A (OSRAM)
EP (1) EP0112217B1 (OSRAM)
DE (1) DE3365475D1 (OSRAM)
FR (1) FR2536872A1 (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2601465B1 (fr) * 1986-07-11 1988-10-21 Bull Sa Dispositif modulateur haute frequence de polarisation de la lumiere
KR950002172B1 (ko) * 1991-06-13 1995-03-14 금성일렉트론주식회사 편광자를 사용한 편광노광장치 및 편광마스크 제조방법
US5442184A (en) * 1993-12-10 1995-08-15 Texas Instruments Incorporated System and method for semiconductor processing using polarized radiant energy
US6251550B1 (en) * 1998-07-10 2001-06-26 Ball Semiconductor, Inc. Maskless photolithography system that digitally shifts mask data responsive to alignment data

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2030468A5 (OSRAM) * 1969-01-29 1970-11-13 Thomson Brandt Csf
US3909130A (en) * 1973-08-24 1975-09-30 Ilya Mikhailovich Glaskov Microphotocomposing apparatus for making artworks
US4110762A (en) * 1974-05-10 1978-08-29 Commissariat A L'energie Atomique Drawing machines especially for integrated circuit masks
DE2905636C2 (de) * 1979-02-14 1985-06-20 Censor Patent- Und Versuchs-Anstalt, Vaduz Verfahren zum Kopieren von Masken auf ein Werkstück
JPS57176746A (en) * 1981-04-21 1982-10-30 Nippon Telegr & Teleph Corp <Ntt> Semiconductor integrated circuit and manufacture thereof

Also Published As

Publication number Publication date
US4514082A (en) 1985-04-30
FR2536872B1 (OSRAM) 1985-04-12
EP0112217B1 (fr) 1986-08-20
FR2536872A1 (fr) 1984-06-01
EP0112217A1 (fr) 1984-06-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee