DE3273808D1 - Boatless evaporation method - Google Patents
Boatless evaporation methodInfo
- Publication number
- DE3273808D1 DE3273808D1 DE8282102981T DE3273808T DE3273808D1 DE 3273808 D1 DE3273808 D1 DE 3273808D1 DE 8282102981 T DE8282102981 T DE 8282102981T DE 3273808 T DE3273808 T DE 3273808T DE 3273808 D1 DE3273808 D1 DE 3273808D1
- Authority
- DE
- Germany
- Prior art keywords
- boatless
- evaporation method
- evaporation
- boatless evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/278,932 US4390571A (en) | 1981-06-30 | 1981-06-30 | Boatless point source evaporation method |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3273808D1 true DE3273808D1 (en) | 1986-11-20 |
Family
ID=23067001
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8282102981T Expired DE3273808D1 (en) | 1981-06-30 | 1982-04-07 | Boatless evaporation method |
Country Status (4)
Country | Link |
---|---|
US (1) | US4390571A (de) |
EP (1) | EP0068087B1 (de) |
JP (1) | JPS6037869B2 (de) |
DE (1) | DE3273808D1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4508612A (en) * | 1984-03-07 | 1985-04-02 | International Business Machines Corporation | Shield for improved magnetron sputter deposition into surface recesses |
DE3530106A1 (de) * | 1985-08-23 | 1987-02-26 | Kempten Elektroschmelz Gmbh | Aufdampfgut zum aufdampfen anorganischer verbindungen mittels einer photonen-erzeugenden strahlungsheizquelle in kontinuierlich betriebenen vakuumbedampfungsanlagen |
JPH0676607B2 (ja) * | 1986-09-02 | 1994-09-28 | 三井東圧化学株式会社 | 強磁性金属粉末の製造方法 |
JP2005091345A (ja) * | 2003-08-13 | 2005-04-07 | Fuji Photo Film Co Ltd | 蒸着型蛍光体シートの製造方法および装置並びに蒸着型蛍光体シート |
CN103993266B (zh) * | 2014-04-17 | 2016-07-06 | 京东方科技集团股份有限公司 | 真空蒸镀设备 |
JP6488928B2 (ja) * | 2015-07-15 | 2019-03-27 | アイシン精機株式会社 | 蒸着装置 |
WO2019111183A1 (en) | 2017-12-06 | 2019-06-13 | Arizona Thin Film Research Llc | Systems and methods for additive manufacturing for the deposition of metal and ceramic materials |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL6600179A (de) * | 1966-01-07 | 1967-07-10 | ||
BE795116A (fr) * | 1972-02-08 | 1973-05-29 | Cockerill | Procede d'alimentation de bain d'evaporation |
US4061800A (en) * | 1975-02-06 | 1977-12-06 | Applied Materials, Inc. | Vapor desposition method |
US4183975A (en) * | 1978-03-16 | 1980-01-15 | Dare Pafco, Inc. | Vacuum metallizing process |
US4276855A (en) * | 1979-05-02 | 1981-07-07 | Optical Coating Laboratory, Inc. | Coating apparatus |
JPS5512100A (en) * | 1979-07-09 | 1980-01-28 | Shichifuku Shiyokuhin Kk | Egg tofu sealed container |
US4263872A (en) * | 1980-01-31 | 1981-04-28 | Rca Corporation | Radiation heated reactor for chemical vapor deposition on substrates |
US4406252A (en) * | 1980-12-29 | 1983-09-27 | Rockwell International Corporation | Inductive heating arrangement for evaporating thin film alloy onto a substrate |
-
1981
- 1981-06-30 US US06/278,932 patent/US4390571A/en not_active Expired - Lifetime
-
1982
- 1982-04-07 DE DE8282102981T patent/DE3273808D1/de not_active Expired
- 1982-04-07 EP EP82102981A patent/EP0068087B1/de not_active Expired
- 1982-04-16 JP JP57062664A patent/JPS6037869B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
EP0068087A1 (de) | 1983-01-05 |
US4390571A (en) | 1983-06-28 |
JPS583971A (ja) | 1983-01-10 |
EP0068087B1 (de) | 1986-10-15 |
JPS6037869B2 (ja) | 1985-08-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |