DE3272239D1 - Apparatus including improved cathode for continuous deposition of amorphous material - Google Patents

Apparatus including improved cathode for continuous deposition of amorphous material

Info

Publication number
DE3272239D1
DE3272239D1 DE8282301080T DE3272239T DE3272239D1 DE 3272239 D1 DE3272239 D1 DE 3272239D1 DE 8282301080 T DE8282301080 T DE 8282301080T DE 3272239 T DE3272239 T DE 3272239T DE 3272239 D1 DE3272239 D1 DE 3272239D1
Authority
DE
Germany
Prior art keywords
apparatus including
amorphous material
including improved
continuous deposition
improved cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8282301080T
Other languages
German (de)
English (en)
Inventor
Masatsugu Izu
David A Gattuso
Timothy J Barnard
Herbert C Ovshinsky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Energy Conversion Devices Inc
Original Assignee
Energy Conversion Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/244,383 external-priority patent/US4369730A/en
Priority claimed from US06/244,386 external-priority patent/US4542711A/en
Application filed by Energy Conversion Devices Inc filed Critical Energy Conversion Devices Inc
Application granted granted Critical
Publication of DE3272239D1 publication Critical patent/DE3272239D1/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
DE8282301080T 1981-03-16 1982-03-03 Apparatus including improved cathode for continuous deposition of amorphous material Expired DE3272239D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/244,383 US4369730A (en) 1981-03-16 1981-03-16 Cathode for generating a plasma
US06/244,386 US4542711A (en) 1981-03-16 1981-03-16 Continuous system for depositing amorphous semiconductor material

Publications (1)

Publication Number Publication Date
DE3272239D1 true DE3272239D1 (en) 1986-09-04

Family

ID=26936496

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8282301080T Expired DE3272239D1 (en) 1981-03-16 1982-03-03 Apparatus including improved cathode for continuous deposition of amorphous material

Country Status (9)

Country Link
EP (1) EP0060651B1 (enExample)
AU (2) AU543823B2 (enExample)
BR (1) BR8201386A (enExample)
DE (1) DE3272239D1 (enExample)
EG (1) EG15565A (enExample)
IE (1) IE53099B1 (enExample)
IL (1) IL65261A (enExample)
IN (1) IN165372B (enExample)
MX (1) MX161183A (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4501766A (en) * 1982-02-03 1985-02-26 Tokyo Shibaura Denki Kabushiki Kaisha Film depositing apparatus and a film depositing method
US4462333A (en) * 1982-10-27 1984-07-31 Energy Conversion Devices, Inc. Process gas introduction, confinement and evacuation system for glow discharge deposition apparatus
US4483883A (en) * 1982-12-22 1984-11-20 Energy Conversion Devices, Inc. Upstream cathode assembly
GB2132637A (en) * 1983-01-03 1984-07-11 Lfe Corp Process for depositing dielectric films in a plasma glow discharge
AU584607B2 (en) * 1984-02-17 1989-06-01 Kanegafuchi Kagaku Kogyo Kabushiki Kaisha Film forming method and apparatus
US4514437A (en) * 1984-05-02 1985-04-30 Energy Conversion Devices, Inc. Apparatus for plasma assisted evaporation of thin films and corresponding method of deposition
US4608943A (en) * 1984-10-24 1986-09-02 Sovonics Solar Systems Cathode assembly with localized profiling capabilities
US4626447A (en) * 1985-03-18 1986-12-02 Energy Conversion Devices, Inc. Plasma confining apparatus
US4920917A (en) * 1987-03-18 1990-05-01 Teijin Limited Reactor for depositing a layer on a moving substrate

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB864869A (en) * 1958-03-12 1961-04-12 Ohio Commw Eng Co A method of producing metallic patterns by gas plating
US3683846A (en) * 1968-10-29 1972-08-15 Texaco Inc Filament plating system
US4048953A (en) * 1974-06-19 1977-09-20 Pfizer Inc. Apparatus for vapor depositing pyrolytic carbon on porous sheets of carbon material
DE2538300B2 (de) * 1975-08-28 1977-06-30 Dornier System Gmbh, 7990 Friedrichshafen Verfahren zur herstellung einer solarabsorberschicht
JPS5591968A (en) * 1978-12-28 1980-07-11 Canon Inc Film forming method by glow discharge
US4209357A (en) * 1979-05-18 1980-06-24 Tegal Corporation Plasma reactor apparatus

Also Published As

Publication number Publication date
AU3904985A (en) 1985-09-19
IE53099B1 (en) 1988-06-22
BR8201386A (pt) 1983-01-25
IL65261A (en) 1985-07-31
EP0060651A2 (en) 1982-09-22
AU8154182A (en) 1982-11-04
AU543823B2 (en) 1985-05-02
EG15565A (en) 1986-09-30
IE820522L (en) 1982-09-16
AU547920B2 (en) 1985-11-14
IN165372B (enExample) 1989-10-07
EP0060651A3 (en) 1983-01-26
EP0060651B1 (en) 1986-07-30
MX161183A (es) 1990-08-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition