BR8201386A - Aparelho e sistema que incluicatodo aperfeicoado para deposicao continua de material amorfo - Google Patents

Aparelho e sistema que incluicatodo aperfeicoado para deposicao continua de material amorfo

Info

Publication number
BR8201386A
BR8201386A BR8201386A BR8201386A BR8201386A BR 8201386 A BR8201386 A BR 8201386A BR 8201386 A BR8201386 A BR 8201386A BR 8201386 A BR8201386 A BR 8201386A BR 8201386 A BR8201386 A BR 8201386A
Authority
BR
Brazil
Prior art keywords
amorfo
appliance
continuous deposition
perfected method
perfected
Prior art date
Application number
BR8201386A
Other languages
English (en)
Portuguese (pt)
Inventor
Masatsugu Izu
Timothy J Barnard
David A Gattuso
Herbert C Ovshinsky
Original Assignee
Atlantic Richfield Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/244,383 external-priority patent/US4369730A/en
Priority claimed from US06/244,386 external-priority patent/US4542711A/en
Application filed by Atlantic Richfield Co filed Critical Atlantic Richfield Co
Publication of BR8201386A publication Critical patent/BR8201386A/pt

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
BR8201386A 1981-03-16 1982-03-15 Aparelho e sistema que incluicatodo aperfeicoado para deposicao continua de material amorfo BR8201386A (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/244,383 US4369730A (en) 1981-03-16 1981-03-16 Cathode for generating a plasma
US06/244,386 US4542711A (en) 1981-03-16 1981-03-16 Continuous system for depositing amorphous semiconductor material

Publications (1)

Publication Number Publication Date
BR8201386A true BR8201386A (pt) 1983-01-25

Family

ID=26936496

Family Applications (1)

Application Number Title Priority Date Filing Date
BR8201386A BR8201386A (pt) 1981-03-16 1982-03-15 Aparelho e sistema que incluicatodo aperfeicoado para deposicao continua de material amorfo

Country Status (9)

Country Link
EP (1) EP0060651B1 (enExample)
AU (2) AU543823B2 (enExample)
BR (1) BR8201386A (enExample)
DE (1) DE3272239D1 (enExample)
EG (1) EG15565A (enExample)
IE (1) IE53099B1 (enExample)
IL (1) IL65261A (enExample)
IN (1) IN165372B (enExample)
MX (1) MX161183A (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4501766A (en) * 1982-02-03 1985-02-26 Tokyo Shibaura Denki Kabushiki Kaisha Film depositing apparatus and a film depositing method
US4462333A (en) * 1982-10-27 1984-07-31 Energy Conversion Devices, Inc. Process gas introduction, confinement and evacuation system for glow discharge deposition apparatus
US4483883A (en) * 1982-12-22 1984-11-20 Energy Conversion Devices, Inc. Upstream cathode assembly
GB2132637A (en) * 1983-01-03 1984-07-11 Lfe Corp Process for depositing dielectric films in a plasma glow discharge
AU584607B2 (en) * 1984-02-17 1989-06-01 Kanegafuchi Kagaku Kogyo Kabushiki Kaisha Film forming method and apparatus
US4514437A (en) * 1984-05-02 1985-04-30 Energy Conversion Devices, Inc. Apparatus for plasma assisted evaporation of thin films and corresponding method of deposition
US4608943A (en) * 1984-10-24 1986-09-02 Sovonics Solar Systems Cathode assembly with localized profiling capabilities
US4626447A (en) * 1985-03-18 1986-12-02 Energy Conversion Devices, Inc. Plasma confining apparatus
US4920917A (en) * 1987-03-18 1990-05-01 Teijin Limited Reactor for depositing a layer on a moving substrate

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB864869A (en) * 1958-03-12 1961-04-12 Ohio Commw Eng Co A method of producing metallic patterns by gas plating
US3683846A (en) * 1968-10-29 1972-08-15 Texaco Inc Filament plating system
US4048953A (en) * 1974-06-19 1977-09-20 Pfizer Inc. Apparatus for vapor depositing pyrolytic carbon on porous sheets of carbon material
DE2538300B2 (de) * 1975-08-28 1977-06-30 Dornier System Gmbh, 7990 Friedrichshafen Verfahren zur herstellung einer solarabsorberschicht
JPS5591968A (en) * 1978-12-28 1980-07-11 Canon Inc Film forming method by glow discharge
US4209357A (en) * 1979-05-18 1980-06-24 Tegal Corporation Plasma reactor apparatus

Also Published As

Publication number Publication date
DE3272239D1 (en) 1986-09-04
AU3904985A (en) 1985-09-19
IE53099B1 (en) 1988-06-22
IL65261A (en) 1985-07-31
EP0060651A2 (en) 1982-09-22
AU8154182A (en) 1982-11-04
AU543823B2 (en) 1985-05-02
EG15565A (en) 1986-09-30
IE820522L (en) 1982-09-16
AU547920B2 (en) 1985-11-14
IN165372B (enExample) 1989-10-07
EP0060651A3 (en) 1983-01-26
EP0060651B1 (en) 1986-07-30
MX161183A (es) 1990-08-14

Similar Documents

Publication Publication Date Title
BR8101012A (pt) Aparelho para o aquecimento seletivo e localmente definido de um objeto
DE3268128D1 (en) Method and device for the determination of biological components
ES499887A0 (es) Procedimiento e instalacion para el tratamiento de residuos agricolas liquidos
BR8207561A (pt) Sistemas de organopolissiloxana modificados processo para sua preparacao e emprego
DK446082A (da) Fremgangsmaade til fremstilling af chlordioxid samt apparat til anvendelse derved
MX7684E (es) Procedimiento para la disolucion de cultivo bacteriano
BR8106107A (pt) Metodo e aparelho para soldagem de material plastico
BR8200487A (pt) Metodo e dispositivo para o preparo anaerobio de residuos
BR8201386A (pt) Aparelho e sistema que incluicatodo aperfeicoado para deposicao continua de material amorfo
BR8201754A (pt) Aperfeicoamento em sistema para atomizar e ministrar material de revestimento
AT378562B (de) System zur fuehrung und fixierung von beschlaegen
BR8106744A (pt) Metodo e aparelho para soldagem de material plastico
DOP1981003032A (es) [procedimiento e instalacion para la depuracion de residuos contaminantes
AR231285A1 (es) Procedimiento para la obtencion de nuevas 2-arilhidrazino-2-tiazolinas y 2-arilazo 2-tiazolinas
AR227091A1 (es) Procedimiento y dispositivo para la formacion de fibras
AR228195A1 (es) Procedimiento microbiologico para la preparacion de hidroquinona
AR228530A1 (es) Nuevos piensos y procedimiento para su obtencion
ES258820Y (es) Dispositivo de freno para puertas giratorias y similares
ES255707Y (es) Dispositivo de fijacion para tuberias y similares
IT8248612A0 (it) Metodo e dispositivo per la mercerizzazione di pezze tessili
BR7801882A (pt) Sistema de aquecimento para liquidos e aparelho calefator
BR6101317U (pt) Sistema de encaixe e perfil desmontavel
ES498730A0 (es) Procedimiento e instalacion para el tratamiento de champino-nes
ES517661A0 (es) Procedimiento de decatizado y dispositivo para su ejecucion.
BR8301704A (pt) Sistema de aquecimento para aviarios e outros

Legal Events

Date Code Title Description
MM Lapse due to non-payment of fees (art. 50)