DE3270064D1 - Electron beam pattern transfer device and method for aligning mask and semiconductor wafer - Google Patents

Electron beam pattern transfer device and method for aligning mask and semiconductor wafer

Info

Publication number
DE3270064D1
DE3270064D1 DE8282103628T DE3270064T DE3270064D1 DE 3270064 D1 DE3270064 D1 DE 3270064D1 DE 8282103628 T DE8282103628 T DE 8282103628T DE 3270064 T DE3270064 T DE 3270064T DE 3270064 D1 DE3270064 D1 DE 3270064D1
Authority
DE
Germany
Prior art keywords
electron beam
semiconductor wafer
transfer device
beam pattern
pattern transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8282103628T
Other languages
English (en)
Inventor
Ichiro Mori
Kazuyoshi Sugihara
Toshiaki Shinozaki
Toru Tojo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE3270064D1 publication Critical patent/DE3270064D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE8282103628T 1981-05-07 1982-04-28 Electron beam pattern transfer device and method for aligning mask and semiconductor wafer Expired DE3270064D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56068532A JPS57183034A (en) 1981-05-07 1981-05-07 Electron bean transfer device

Publications (1)

Publication Number Publication Date
DE3270064D1 true DE3270064D1 (en) 1986-04-30

Family

ID=13376433

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8282103628T Expired DE3270064D1 (en) 1981-05-07 1982-04-28 Electron beam pattern transfer device and method for aligning mask and semiconductor wafer

Country Status (4)

Country Link
US (1) US4469949A (de)
EP (1) EP0065143B1 (de)
JP (1) JPS57183034A (de)
DE (1) DE3270064D1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4572956A (en) * 1982-08-31 1986-02-25 Tokyo Shibaura Denki Kabushiki Kaisha Electron beam pattern transfer system having an autofocusing mechanism
JPS59220922A (ja) * 1983-05-31 1984-12-12 Toshiba Corp 位置合わせ方法
GB2155201B (en) * 1984-02-24 1988-07-13 Canon Kk An x-ray exposure apparatus
GB2157069A (en) * 1984-04-02 1985-10-16 Philips Electronic Associated Step and repeat electron image projector
US4749867A (en) * 1985-04-30 1988-06-07 Canon Kabushiki Kaisha Exposure apparatus
US4861162A (en) * 1985-05-16 1989-08-29 Canon Kabushiki Kaisha Alignment of an object
US5029222A (en) * 1987-09-02 1991-07-02 Fujitsu Limited Photoelectron image projection apparatus
US4928018A (en) * 1989-06-29 1990-05-22 Texas Instruments, Incorporated Thermo-enhanced electron image projector
JPH07263308A (ja) * 1994-03-18 1995-10-13 Fujitsu Ltd 電子ビーム露光方法及び装置
JPH09320931A (ja) * 1996-05-28 1997-12-12 Nikon Corp 結像特性計測方法及び該方法を使用する転写装置
JP2000003847A (ja) * 1998-06-15 2000-01-07 Canon Inc 荷電粒子線縮小転写装置及びデバイス製造方法
US6437347B1 (en) 1999-04-13 2002-08-20 International Business Machines Corporation Target locking system for electron beam lithography
JP3805565B2 (ja) * 1999-06-11 2006-08-02 株式会社日立製作所 電子線画像に基づく検査または計測方法およびその装置
US6952255B2 (en) * 2003-08-06 2005-10-04 Lam Research Corporation System and method for integrated multi-use optical alignment
JP6200224B2 (ja) * 2012-09-13 2017-09-20 日本メクトロン株式会社 フォトマスク、フォトマスク組、露光装置および露光方法
US9984943B2 (en) 2016-05-16 2018-05-29 Massachusetts Institute Of Technology Systems and methods for aligning and coupling semiconductor structures
EP3706262B1 (de) * 2019-02-15 2022-01-26 Nichia Corporation Verfahren zur herstellung einer lichtemittierenden vorrichtung, lichtemittierende vorrichtung und basiselement

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1533755A (fr) * 1966-08-16 1968-07-19 Jeol Ltd Dispositif pour le réglage du point de traitement dans un appareil à faisceau électrique ou analogue
US3679497A (en) * 1969-10-24 1972-07-25 Westinghouse Electric Corp Electron beam fabrication system and process for use thereof
US3710101A (en) * 1970-10-06 1973-01-09 Westinghouse Electric Corp Apparatus and method for alignment of members to electron beams
US3683195A (en) * 1971-03-22 1972-08-08 Kasper Instruments Apparatus for the automatic alignment of two superimposed objects,e.g. a semiconductor wafer and mask
US3745358A (en) * 1971-05-10 1973-07-10 Radiant Energy Systems Alignment method and apparatus for electron projection systems
FR2146106B1 (de) * 1971-07-16 1977-08-05 Thomson Csf
DE2722958A1 (de) * 1977-05-20 1978-11-23 Siemens Ag Verfahren zur justierung einer halbleiterscheibe relativ zu einer bestrahlungsmaske bei der roentgenstrahl-fotolithografie
US4335313A (en) * 1980-05-12 1982-06-15 The Perkin-Elmer Corporation Method and apparatus for aligning an opaque mask with an integrated circuit wafer

Also Published As

Publication number Publication date
EP0065143A3 (en) 1983-11-09
EP0065143B1 (de) 1986-03-26
US4469949A (en) 1984-09-04
JPS57183034A (en) 1982-11-11
EP0065143A2 (de) 1982-11-24
JPS6226578B2 (de) 1987-06-09

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Legal Events

Date Code Title Description
8320 Willingness to grant licences declared (paragraph 23)
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee