DE3269947D1 - Improved cryopump - Google Patents

Improved cryopump

Info

Publication number
DE3269947D1
DE3269947D1 DE8282902216T DE3269947T DE3269947D1 DE 3269947 D1 DE3269947 D1 DE 3269947D1 DE 8282902216 T DE8282902216 T DE 8282902216T DE 3269947 T DE3269947 T DE 3269947T DE 3269947 D1 DE3269947 D1 DE 3269947D1
Authority
DE
Germany
Prior art keywords
cryopump
improved
improved cryopump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8282902216T
Other languages
English (en)
Inventor
Allen J Bartlett
Robert M Lewis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Helix Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helix Technology Corp filed Critical Helix Technology Corp
Application granted granted Critical
Publication of DE3269947D1 publication Critical patent/DE3269947D1/de
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE8282902216T 1981-05-22 1982-05-19 Improved cryopump Expired DE3269947D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/266,186 US4356701A (en) 1981-05-22 1981-05-22 Cryopump
PCT/US1982/000689 WO1982003993A1 (en) 1981-05-22 1982-05-19 Improved cryopump

Publications (1)

Publication Number Publication Date
DE3269947D1 true DE3269947D1 (en) 1986-04-24

Family

ID=23013534

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8282902216T Expired DE3269947D1 (en) 1981-05-22 1982-05-19 Improved cryopump

Country Status (5)

Country Link
US (1) US4356701A (de)
EP (1) EP0079960B1 (de)
JP (1) JPS58500772A (de)
DE (1) DE3269947D1 (de)
WO (1) WO1982003993A1 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4546613A (en) * 1983-04-04 1985-10-15 Helix Technology Corporation Cryopump with rapid cooldown and increased pressure
IL71403A (en) * 1983-04-04 1991-01-31 Helix Tech Corp Cryopump with rapid cooldown and increased pressure stability
US4494381A (en) * 1983-05-13 1985-01-22 Helix Technology Corporation Cryopump with improved adsorption capacity
US4719938A (en) * 1985-01-22 1988-01-19 Helix Technology Corporation Self-cleaning valve and cryopump utilizing the same
US4718240A (en) * 1985-03-01 1988-01-12 Helix Technology Corporation Cryopump regeneration method and apparatus
DE3512614A1 (de) * 1985-04-06 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe
US4718241A (en) * 1985-10-31 1988-01-12 Helix Technology Corporation Cryopump with quicker adsorption
SU1698482A1 (ru) * 1988-01-08 1991-12-15 Институт Анатилического Приборостроения Научно-Технического Объединения Ан Ссср Криогенный конденсационный насос
EP0338113B1 (de) * 1988-04-22 1992-01-29 Leybold Aktiengesellschaft Verfahren zur Adaption einer zweistufigen Refrigerator-Kryopumpe auf ein betimmtes Gas
US5156007A (en) * 1991-01-30 1992-10-20 Helix Technology Corporation Cryopump with improved second stage passageway
WO1994000212A1 (en) * 1992-06-24 1994-01-06 Extek Cryogenics Inc. Cryopump
US5305612A (en) * 1992-07-06 1994-04-26 Ebara Technologies Incorporated Cryopump method and apparatus
US5517823A (en) * 1995-01-18 1996-05-21 Helix Technology Corporation Pressure controlled cryopump regeneration method and system
US5782096A (en) 1997-02-05 1998-07-21 Helix Technology Corporation Cryopump with improved shielding
FR2840232B1 (fr) * 2002-05-30 2004-08-27 Cit Alcatel Piege cryogenique a regeneration rapide
US7037083B2 (en) 2003-01-08 2006-05-02 Brooks Automation, Inc. Radiation shielding coating
US7313922B2 (en) * 2004-09-24 2008-01-01 Brooks Automation, Inc. High conductance cryopump for type III gas pumping
TWI490408B (zh) 2008-04-04 2015-07-01 Brooks Automation Inc 利用錫鎵合金的低溫泵
WO2012016192A2 (en) 2010-07-30 2012-02-02 Brooks Automation, Inc. Multi-refrigerator high speed cryopump
JP6031451B2 (ja) 2011-02-09 2016-11-24 ブルックス オートメーション インコーポレイテッド クライオポンプ
US9174144B2 (en) 2012-04-20 2015-11-03 Sumitomo (Shi) Cryogenics Of America Inc Low profile cryopump
CN207111346U (zh) * 2017-07-03 2018-03-16 京东方科技集团股份有限公司 低温泵
JP7472020B2 (ja) 2017-11-17 2024-04-22 エドワーズ バキューム リミテッド ライアビリティ カンパニー 周縁部に設けられた第１及び第２ステージアレイを備えるクライオポンプ
CN111542698B (zh) 2017-11-17 2022-03-11 爱德华兹真空泵有限责任公司 具有增强型正面阵列的低温泵

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2703673A (en) * 1950-04-08 1955-03-08 Alois Vogt Vacuum pump
US3081068A (en) * 1959-10-16 1963-03-12 Milleron Norman Cold trap
US3218815A (en) * 1964-06-17 1965-11-23 Little Inc A Cryogenic refrigeration apparatus operating on an expansible fluid and embodying a regenerator
US3364654A (en) * 1965-09-27 1968-01-23 Union Carbide Corp Ultrahigh vacuum pumping process and apparatus
US3338063A (en) * 1966-01-17 1967-08-29 500 Inc Cryopanels for cryopumps and cryopumps incorporating them
CH437616A (de) * 1966-08-23 1967-06-15 Balzers Patent Beteilig Ag Wahlweise mit Kühlmitteln verschiedener Temperatur kühlbarer Treibmittelfänger für Vakuumdampfpumpen
US3390536A (en) * 1967-02-01 1968-07-02 Gca Corp Cryogenic pumping apparatus
FR1519847A (fr) * 1967-02-23 1968-04-05 Air Liquide Pompe cryogénique à fort débit sous vide élevé
DE1816981A1 (de) * 1968-01-02 1969-08-21 Internat Res & Dev Company Ltd Kryogenpumpe
US3850001A (en) * 1973-06-15 1974-11-26 Chicago Bridge & Iron Co Lng ship tank inert gas generation system
US4212170A (en) * 1979-04-16 1980-07-15 Oerlikon Buhrle USA Incorporated Cryopump
US4277951A (en) * 1980-04-10 1981-07-14 Air Products And Chemicals, Inc. Cryopumping apparatus

Also Published As

Publication number Publication date
EP0079960A1 (de) 1983-06-01
US4356701A (en) 1982-11-02
JPS58500772A (ja) 1983-05-12
WO1982003993A1 (en) 1982-11-25
EP0079960B1 (de) 1986-03-19
JPH0257235B2 (de) 1990-12-04
EP0079960A4 (de) 1983-09-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition