DE3264399D1 - Projection apparatus with a focusing device - Google Patents

Projection apparatus with a focusing device

Info

Publication number
DE3264399D1
DE3264399D1 DE8282400636T DE3264399T DE3264399D1 DE 3264399 D1 DE3264399 D1 DE 3264399D1 DE 8282400636 T DE8282400636 T DE 8282400636T DE 3264399 T DE3264399 T DE 3264399T DE 3264399 D1 DE3264399 D1 DE 3264399D1
Authority
DE
Germany
Prior art keywords
projection apparatus
focusing device
focusing
projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8282400636T
Other languages
English (en)
Inventor
Laurent Berger
Paul Tigreat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MATRA GCA SA
Original Assignee
MATRA GCA SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MATRA GCA SA filed Critical MATRA GCA SA
Application granted granted Critical
Publication of DE3264399D1 publication Critical patent/DE3264399D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
    • G03F9/7026—Focusing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/40—Optical focusing aids
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Automatic Focus Adjustment (AREA)
  • Focusing (AREA)
  • Variable Magnification In Projection-Type Copying Machines (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE8282400636T 1981-04-16 1982-04-06 Projection apparatus with a focusing device Expired DE3264399D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8107709A FR2504281A1 (fr) 1981-04-16 1981-04-16 Appareil de projection a dispositif de mise au point

Publications (1)

Publication Number Publication Date
DE3264399D1 true DE3264399D1 (en) 1985-08-01

Family

ID=9257505

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8282400636T Expired DE3264399D1 (en) 1981-04-16 1982-04-06 Projection apparatus with a focusing device

Country Status (5)

Country Link
US (1) US4477185A (de)
EP (1) EP0063980B1 (de)
JP (1) JPS57188027A (de)
DE (1) DE3264399D1 (de)
FR (1) FR2504281A1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58113706A (ja) * 1981-12-26 1983-07-06 Nippon Kogaku Kk <Nikon> 水平位置検出装置
JPS59121932A (ja) * 1982-12-28 1984-07-14 Fujitsu Ltd 自動焦点制御装置
US4845373A (en) * 1984-02-22 1989-07-04 Kla Instruments Corporation Automatic alignment apparatus having low and high resolution optics for coarse and fine adjusting
NL8401710A (nl) * 1984-05-29 1985-12-16 Philips Nv Inrichting voor het afbeelden van een maskerpatroon op een substraat.
FR2580087B1 (de) * 1985-04-03 1988-12-02 Hispano Suiza Sa
US4810077A (en) * 1986-02-13 1989-03-07 Spectra-Tech, Inc. Grazing angle microscope
US4721386A (en) * 1986-07-18 1988-01-26 Barnes Engineering Company Three-axis angular monitoring system
US4821196A (en) * 1987-02-20 1989-04-11 International Business Machines Corporation High resolution automatic focus correction electronic subsystem for E-beam lithography
US4886958A (en) * 1988-03-25 1989-12-12 Texas Instruments Incorporated Autofocus system for scanning laser inspector or writer
DE3921661C1 (de) * 1989-06-30 1991-01-17 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De
FR2674036B1 (fr) * 1991-03-13 1993-07-30 Mrejen Jean Jacques Procede de commande de mise au point pour la prise de vue et organe de commande a cette fin.
ATE169123T1 (de) * 1991-03-25 1998-08-15 Heidelberger Druckmasch Ag Verfahren und vorrichtung zur optischen messung von distanzen
JP2943499B2 (ja) * 1992-04-22 1999-08-30 日本電気株式会社 高さ測定方法および装置
US5311288A (en) * 1992-07-06 1994-05-10 Opal Technologies Ltd. Method and apparatus for detecting surface deviations from a reference plane
US5510892A (en) * 1992-11-25 1996-04-23 Nikon Corporation Inclination detecting apparatus and method
US5636013A (en) * 1995-01-04 1997-06-03 Hutchinson Technology Incorporated Suspension assembly static attitude and distance measuring instrument
US6166808A (en) * 1996-12-24 2000-12-26 U.S. Philips Corporation Optical height meter, surface-inspection device provided with such a height meter, and lithographic apparatus provided with the inspection device
US5844727A (en) * 1997-09-02 1998-12-01 Cymer, Inc. Illumination design for scanning microlithography systems
US6774945B1 (en) 1999-10-18 2004-08-10 Hewlett-Packard Development Company, L.P. Focusing apparatus for image recording system
DE10026830A1 (de) * 2000-05-30 2001-12-06 Zeiss Carl Jena Gmbh Optischer Sensor zur Messung des Abstands und/oder der Neigung einer Fläche
DE10233087A1 (de) * 2002-07-19 2004-02-05 Roche Diagnostics Gmbh Reflexionsphotometrisches Analysesystem
AU2010222633B2 (en) 2009-03-11 2015-05-14 Sakura Finetek Usa, Inc. Autofocus method and autofocus device
DE102013103971A1 (de) 2013-04-19 2014-11-06 Sensovation Ag Verfahren zum Erzeugen eines aus mehreren Teilbildern zusammengesetzten Gesamtbilds eines Objekts
US10007102B2 (en) 2013-12-23 2018-06-26 Sakura Finetek U.S.A., Inc. Microscope with slide clamping assembly
US11280803B2 (en) 2016-11-22 2022-03-22 Sakura Finetek U.S.A., Inc. Slide management system

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3517992A (en) * 1968-04-24 1970-06-30 Leitz Ernst Gmbh Automatic focusing slide projector
US3612698A (en) * 1969-05-01 1971-10-12 Ibm Automatic holographic wafer positioning system and method
GB1312663A (en) * 1970-05-28 1973-04-04 Ti Group Services Ltd Optical control means
US3645623A (en) * 1970-09-25 1972-02-29 Raymond A Patten Apparatus for monitoring film thickness by reflecting a light beam from the film surface
DE2225972A1 (de) * 1972-05-27 1973-12-13 Agfa Gevaert Ag Automatische fokussiervorrichtung
US3865483A (en) * 1974-03-21 1975-02-11 Ibm Alignment illumination system
DE2539206A1 (de) * 1975-09-03 1977-03-17 Siemens Ag Verfahren zur automatischen justierung von halbleiterscheiben
JPS5245907A (en) * 1975-10-09 1977-04-12 Agency Of Ind Science & Technol Automatic optical path adjusting device
JPS53123103A (en) * 1977-04-02 1978-10-27 Mansei Kogyo Kk Optical information reader
JPS54133305A (en) * 1978-04-07 1979-10-17 Hitachi Ltd Information recorder
JPS5545122A (en) * 1978-09-25 1980-03-29 Mansei Kogyo Kk Focus controller of optical reader
FR2445512A1 (en) * 1978-12-27 1980-07-25 Thomson Csf Position detecting system for image forming appts. - includes two part photodiode providing two signals with difference proportional to position error
NL186353C (nl) * 1979-06-12 1990-11-01 Philips Nv Inrichting voor het afbeelden van een maskerpatroon op een substraat voorzien van een opto-elektronisch detektiestelsel voor het bepalen van een afwijking tussen het beeldvlak van een projektielenzenstelsel en het substraatvlak.
JPS5696203A (en) * 1979-12-27 1981-08-04 Fujitsu Ltd Detection device for optical position

Also Published As

Publication number Publication date
JPS57188027A (en) 1982-11-18
FR2504281A1 (fr) 1982-10-22
FR2504281B1 (de) 1985-04-12
US4477185A (en) 1984-10-16
EP0063980A1 (de) 1982-11-03
EP0063980B1 (de) 1985-06-26

Similar Documents

Publication Publication Date Title
DE3264399D1 (en) Projection apparatus with a focusing device
GB2153543B (en) A projection exposure apparatus
JPS57100573A (en) Camera device
GB2114919B (en) A developing device
HK14790A (en) Shutter device
GB8332416D0 (en) Optical position location apparatus
GB2086977B (en) A removable fixing device
DE3269110D1 (en) Focal zoom device
JPS57199220A (en) Positioning device
DE3267153D1 (en) Retention unit for a copying device
GB2128520B (en) A slag-scraping apparatus
JPS57148711A (en) Automatic focusing apparatus
GB2089144B (en) A connection device
GB2111791B (en) Automatic focusing device
GB2049231B (en) Automatic focusing device for a camera
DE3270308D1 (en) Automatic focusing apparatus
GB2152007B (en) A device for moving a barrel
JPS57190921A (en) Optical apparatus
GB2084748B (en) A winding device for a camera
JPS57120928A (en) Photographic apparatus
JPS57155530A (en) Optical apparatus
GB2104335B (en) Focussing apparatus for camera
ZA833419B (en) A focusing apparatus
GB2047905B (en) Focus indicating device for a camera
ZA815690B (en) Real image projection device

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee