DE3261653D1 - Sputtering apparatus - Google Patents

Sputtering apparatus

Info

Publication number
DE3261653D1
DE3261653D1 DE8282300772T DE3261653T DE3261653D1 DE 3261653 D1 DE3261653 D1 DE 3261653D1 DE 8282300772 T DE8282300772 T DE 8282300772T DE 3261653 T DE3261653 T DE 3261653T DE 3261653 D1 DE3261653 D1 DE 3261653D1
Authority
DE
Germany
Prior art keywords
sputtering apparatus
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8282300772T
Other languages
English (en)
Inventor
Yoshio Homma
Sukeyoshi Tsunekawa
Hiroshi Morisaki
Seiki Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE3261653D1 publication Critical patent/DE3261653D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/3255—Material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H01J37/3408—Planar magnetron sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE8282300772T 1981-02-18 1982-02-16 Sputtering apparatus Expired DE3261653D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56021550A JPS5850312B2 (ja) 1981-02-18 1981-02-18 スパツタリング装置

Publications (1)

Publication Number Publication Date
DE3261653D1 true DE3261653D1 (en) 1985-02-07

Family

ID=12058097

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8282300772T Expired DE3261653D1 (en) 1981-02-18 1982-02-16 Sputtering apparatus

Country Status (4)

Country Link
US (1) US4394245A (de)
EP (1) EP0058560B1 (de)
JP (1) JPS5850312B2 (de)
DE (1) DE3261653D1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4431505A (en) * 1982-08-16 1984-02-14 Vac-Tec Systems, Inc. High rate magnetron sputtering of high permeability materials
FR2777912B1 (fr) * 1998-04-23 2000-05-19 Imphy Sa Piece en alliage magnetique doux comportant au moins une zone amagnetique et procede de fabrication

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3325394A (en) * 1963-07-01 1967-06-13 Ibm Magnetic control of film deposition
US3282815A (en) * 1963-07-01 1966-11-01 Ibm Magnetic control of film deposition
US3716472A (en) * 1966-02-04 1973-02-13 Siemens Ag Cathode atomization apparatus
FR1594668A (de) * 1968-10-15 1970-06-08
FR2071512A5 (de) * 1969-12-31 1971-09-17 Radiotechnique Compelec
US3878085A (en) * 1973-07-05 1975-04-15 Sloan Technology Corp Cathode sputtering apparatus
FR2324755A1 (fr) * 1975-09-19 1977-04-15 Anvar Dispositif de pulverisation cathodique de grande vitesse de depot
US4169031A (en) * 1978-01-13 1979-09-25 Polyohm, Inc. Magnetron sputter cathode assembly
US4175029A (en) * 1978-03-16 1979-11-20 Dmitriev Jury A Apparatus for ion plasma coating of articles

Also Published As

Publication number Publication date
EP0058560A3 (en) 1982-12-01
US4394245A (en) 1983-07-19
EP0058560B1 (de) 1984-12-27
EP0058560A2 (de) 1982-08-25
JPS5850312B2 (ja) 1983-11-09
JPS57137469A (en) 1982-08-25

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee