DE3213348C2 - Piezoelektrischer Motor - Google Patents
Piezoelektrischer MotorInfo
- Publication number
- DE3213348C2 DE3213348C2 DE3213348A DE3213348A DE3213348C2 DE 3213348 C2 DE3213348 C2 DE 3213348C2 DE 3213348 A DE3213348 A DE 3213348A DE 3213348 A DE3213348 A DE 3213348A DE 3213348 C2 DE3213348 C2 DE 3213348C2
- Authority
- DE
- Germany
- Prior art keywords
- piezoelectric
- oscillator
- rotor
- motor
- oscillators
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003993 interaction Effects 0.000 abstract description 8
- 238000005516 engineering process Methods 0.000 abstract description 2
- 230000002441 reversible effect Effects 0.000 description 17
- 241000446313 Lamella Species 0.000 description 12
- 239000000463 material Substances 0.000 description 6
- 239000004033 plastic Substances 0.000 description 6
- 229920003023 plastic Polymers 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000010287 polarization Effects 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910000760 Hardened steel Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
- H02N2/0065—Friction interface
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/369,181 US4400641A (en) | 1982-04-16 | 1982-04-16 | Piezoelectric motor with two part rotor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3213348A1 DE3213348A1 (de) | 1983-10-20 |
| DE3213348C2 true DE3213348C2 (de) | 1985-05-09 |
Family
ID=23454436
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE3213348A Expired DE3213348C2 (de) | 1982-04-16 | 1982-04-08 | Piezoelektrischer Motor |
Country Status (10)
Families Citing this family (63)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1208269A (en) * | 1982-02-25 | 1986-07-22 | Toshiiku Sashida | Motor device utilizing ultrasonic oscillation |
| US4513219A (en) * | 1982-11-25 | 1985-04-23 | Canon Kabushiki Kaisha | Vibration wave motor |
| US4495432A (en) * | 1982-12-15 | 1985-01-22 | Canon Kabushiki Kaisha | Piezoelectric vibration wave motor with sloped drive surface |
| USRE34409E (en) * | 1983-05-04 | 1993-10-19 | Nikon Corporation | Drive circuit for surface-wave driven motor utilizing ultrasonic vibration |
| JPS59204477A (ja) * | 1983-05-04 | 1984-11-19 | Nippon Kogaku Kk <Nikon> | 超音波モーターの駆動制御回路 |
| JPS6096183A (ja) * | 1983-10-26 | 1985-05-29 | Canon Inc | 振動波モータ |
| JPS60170472A (ja) * | 1984-02-10 | 1985-09-03 | Canon Inc | 振動波モ−タ |
| US4786836A (en) * | 1984-03-01 | 1988-11-22 | Matsushita Electric Industrail Co., Ltd. | Piezoelectric motor |
| JPS61139280A (ja) * | 1984-12-11 | 1986-06-26 | Matsushita Electric Ind Co Ltd | 電歪モ−タ |
| JPS61224878A (ja) * | 1985-03-29 | 1986-10-06 | Canon Inc | 振動波モ−タ− |
| JPS62152381A (ja) * | 1985-12-25 | 1987-07-07 | Canon Inc | 回転動力装置 |
| US4742260A (en) * | 1986-02-06 | 1988-05-03 | Hiroshi Shimizu | Piezoelectrically driving device |
| US4794294A (en) * | 1986-06-12 | 1988-12-27 | Canon Kabushiki Kaisha | Vibration wave motor |
| JP2632811B2 (ja) * | 1986-08-29 | 1997-07-23 | キヤノン株式会社 | 振動駆動モータ |
| US5146129A (en) * | 1986-12-01 | 1992-09-08 | Canon Kabushiki Kaisha | Vibration wave motor |
| EP0306530A4 (de) * | 1987-02-28 | 1989-06-21 | Ki Polt I | Piezoelektrischer motor. |
| US4755705A (en) * | 1987-06-15 | 1988-07-05 | Holum Mark J | Piezoelectric motor |
| JP2690907B2 (ja) * | 1987-09-25 | 1997-12-17 | 株式会社日立製作所 | 複合型圧電モータ |
| DE3735623A1 (de) * | 1987-10-21 | 1989-05-03 | Philips Patentverwaltung | Elektrischer rotations- oder linearmotor, dessen laeufer mittels ultraschallschwingungen angetrieben wird |
| JPH01270776A (ja) * | 1988-04-22 | 1989-10-30 | Aisin Seiki Co Ltd | 超音波モータの動体 |
| US4831306A (en) * | 1988-05-04 | 1989-05-16 | Micro-Pulse Research And Development | Piezoelectric motor having a pivotally mounted annular shaped housing |
| EP0344008B1 (en) * | 1988-05-26 | 1994-08-17 | Kohji Toda | Vibrator-type actuator |
| DE3920726A1 (de) * | 1988-06-29 | 1990-01-04 | Olympus Optical Co | Ultraschalloszillator |
| US5043621A (en) * | 1988-09-30 | 1991-08-27 | Rockwell International Corporation | Piezoelectric actuator |
| US4928030A (en) * | 1988-09-30 | 1990-05-22 | Rockwell International Corporation | Piezoelectric actuator |
| GB2235820A (en) * | 1989-06-21 | 1991-03-13 | Brother Ind Ltd | A drive system for a mechanical part of an image forming apparatus |
| EP0513288A1 (en) * | 1990-12-04 | 1992-11-19 | Scansov Transport Ab | Piezoelectric motor |
| DE4233256C1 (de) * | 1992-10-02 | 1993-12-02 | Endress Hauser Gmbh Co | Schall- oder Ultraschallwandler |
| US5466979A (en) * | 1993-03-03 | 1995-11-14 | Board Of Regents, The University Of | Methods and apparatus to reduce wear on sliding surfaces |
| US5616980A (en) * | 1993-07-09 | 1997-04-01 | Nanomotion Ltd. | Ceramic motor |
| US5682076A (en) * | 1993-08-03 | 1997-10-28 | Nanomotion Ltd. | Ceramic disc-drive actuator |
| KR100341871B1 (ko) * | 1993-09-08 | 2002-11-29 | 아스라브 쏘시에떼 아노님 | 회전자위치탐지기를갖는압전모터및그압전모터고정자제조방법 |
| CH686854B5 (de) * | 1994-12-29 | 1997-01-31 | Ebauchesfabrik Eta Ag | Piezoelektrischer Motor mit Einrichtung, die Informationen bezueglich der Rotorposition und/oder -drehzahl liefert. |
| DE19535481C1 (de) * | 1995-09-23 | 1997-07-03 | Univ Magdeburg Tech | Piezoelektrische Antriebseinheit zur Erzeugung rotatorischer oder translatorischer Abtriebsbewegungen mittels längsschwingender piezoelektrischer Aktoren |
| DE19538978C1 (de) * | 1995-10-19 | 1996-11-21 | Univ Magdeburg Tech | Antriebseinheit zur Erzeugung vorzugsweise rotatorischer Abtriebsbewegungen, insbesondere mittels piezoelektrischer Aktoren |
| GB9617076D0 (en) * | 1996-08-14 | 1996-09-25 | Intelligent Manufacturing Syst | Bearings and supports |
| JP2002529038A (ja) * | 1998-10-26 | 2002-09-03 | ナノモーション リミテッド | 多方向モータ |
| US6242850B1 (en) | 1999-07-28 | 2001-06-05 | Technology Commercialization Corp. | Piezoelectric motor and a disk drive using same |
| US6373170B1 (en) | 2000-03-10 | 2002-04-16 | Edo Electro-Ceramic Products | Piezo-electric motor |
| US6664714B2 (en) | 2000-03-23 | 2003-12-16 | Elliptec Resonant Actuator Ag | Vibratory motors and methods of making and using same |
| CA2315013C (en) * | 2000-08-03 | 2005-02-08 | Eontech Group, Inc. | Piezoelectric motor |
| CA2320011A1 (en) * | 2000-09-18 | 2002-03-18 | Eontech Group, Inc. | Piezoelectric motor |
| US20050127789A1 (en) * | 2001-03-08 | 2005-06-16 | Magnussen Bjoern B. | Piezoelectric motors and methods for the production and operation thereof |
| DE10113660A1 (de) * | 2001-03-21 | 2002-09-26 | Koninkl Philips Electronics Nv | Piezoelektrischer Antrieb |
| AU2002364931A1 (en) * | 2001-08-09 | 2003-07-15 | Bainbridge Networks, Inc. | Fiber optic switch and piezoelectric motor |
| DE10146703A1 (de) * | 2001-09-21 | 2003-04-10 | Elliptec Resonant Actuator Ag | Piezomotor mit Führung |
| AU2003209048C1 (en) * | 2002-02-06 | 2006-10-05 | Elliptec Resonant Actuator Aktiengesellschaft | Piezoelectric motor control |
| US7368853B2 (en) * | 2002-04-22 | 2008-05-06 | Elliptec Resonant Actuator Aktiengesellschaft | Piezoelectric motors and methods for the production and operation thereof |
| UA71044C2 (uk) * | 2002-06-13 | 2004-11-15 | Сергій Федорович Петренко | Мікроманіпулятор |
| US20040113519A1 (en) * | 2002-12-12 | 2004-06-17 | Charles Mentesana | Micro-beam friction liner and method of transferring energy |
| JP4483275B2 (ja) * | 2003-02-05 | 2010-06-16 | 株式会社デンソー | 積層型圧電素子及びその製造方法 |
| KR100501196B1 (ko) * | 2003-07-09 | 2005-07-18 | 삼성전기주식회사 | 렌즈 이송장치 |
| US6867532B2 (en) * | 2003-07-17 | 2005-03-15 | The Brady Group Inc. | Long life piezoelectric drive and components |
| DE102004020329A1 (de) * | 2004-04-26 | 2005-11-10 | Epcos Ag | Elektrische Funktionseinheit und Verfahren zu deren Herstellung |
| US7436101B1 (en) * | 2004-11-04 | 2008-10-14 | Elliptec Resonant Actuator Ag | Multistage piezoelectric drive |
| DE102005017108A1 (de) * | 2005-01-26 | 2006-07-27 | Epcos Ag | Piezoelektrisches Bauelement |
| US7545076B1 (en) | 2005-07-11 | 2009-06-09 | Itt Manufacturing Enterprises, Inc. | System and method for tracking drive frequency of piezoelectric motor |
| JP4780770B2 (ja) * | 2006-04-10 | 2011-09-28 | 株式会社豊田自動織機 | 振動アクチュエータ |
| UA84065C2 (ru) * | 2006-11-09 | 2008-09-10 | Сергей Федорович Петренко | Пьезоэлектрический генератор механических колебаний и пьезоелектрический двигатель на его основе (варианты) |
| EP2142407B1 (en) * | 2007-04-13 | 2019-02-20 | Technion Research & Development Foundation Ltd. | Vibrating robotic crawler |
| DE102008023478A1 (de) * | 2007-11-08 | 2009-05-14 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultraschalllinearantrieb mit hohlzylindrischem Oszillator |
| JP5794142B2 (ja) | 2011-12-27 | 2015-10-14 | 日立金属株式会社 | 接続構造、接続方法及び差動信号伝送用ケーブル |
| US9941774B2 (en) * | 2012-08-08 | 2018-04-10 | Marvell World Trade Ltd. | Controlling fan motors using capacitive sensing |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2439499A (en) * | 1942-08-20 | 1948-04-13 | Brush Dev Co | Piezoelectric motor |
| SU1278994A1 (ru) * | 1974-07-05 | 1986-12-23 | Киевский Ордена Ленина Политехнический Институт Им.50-Летия Великой Октябрьской Социалистической Революции | Пьезоэлектрический двигатель |
| SE436675B (sv) * | 1975-08-12 | 1985-01-14 | Ki Politekhnichsky I Im 50 Let | Elektrisk motor driven genom piezoelektriska krafter |
| AU505959B2 (en) * | 1975-08-13 | 1979-12-06 | Kievsky P I T 5ol V O S R | Piezoelectric motor |
| JPS5832518B2 (ja) * | 1975-09-01 | 1983-07-13 | キエフスキ−．ポリチエフニチエスキ−．Ｉｎｓｔ．イメニ．５０−レチア．ベリコイ．オクチヤブルスコイ．ソシイアリスチチエスコイ．レボリユツイ− | 圧電モ−タ |
| SU625273A1 (ru) * | 1976-07-09 | 1978-09-25 | Каунасский Политехнический Институт Имени Антанаса Снечкуса | Вибродвигатель |
| SU636760A1 (ru) * | 1977-01-03 | 1978-12-05 | Киевский Ордена Ленина Политехнический Институт Им.50-Летия Великой Октябрьской Социалистической Революции | Пьезоэлектрический привод |
| SU651435A1 (ru) * | 1977-02-07 | 1979-03-05 | Каунасский Политехнический Институт Им. Антанаса Снечкуса | Двухфазный вибродвигатель |
| SU632014A1 (ru) * | 1977-03-28 | 1978-11-05 | Каунасский Политехнический Институт Им.А.Снечкуса | Вибродвигатель |
| SU642802A1 (ru) * | 1977-07-18 | 1979-01-15 | Киевский Ордена Ленина Политехнический Институт Им. 50-Летия Великой Октябрьской Социалистической Революции | Пьезоэлектрический реверсивный двигатель |
| SU661661A1 (ru) * | 1977-11-24 | 1979-05-05 | Киевский Ордена Ленина Политехнический Институт Им. 50-Летия Великой Октябрьской Социалистической Революции | Пьезоэлектрический реверсивный двигатель |
| SU805476A1 (ru) * | 1978-05-12 | 1981-02-15 | Специальное Проектно-Конструкторское Итехнологическое Бюро Малых Электричес-Ких Машин Производственного Объедине-Ния "Эльфа" | Вибродвигатель |
| DD143682A1 (de) * | 1979-03-22 | 1980-09-03 | Roland Baudisch | Piezoelektrischer vibrationsantrieb |
-
1982
- 1982-04-01 AT AT0130482A patent/AT382262B/de not_active IP Right Cessation
- 1982-04-05 SE SE8202161A patent/SE452933B/sv not_active IP Right Cessation
- 1982-04-07 CA CA000400628A patent/CA1182159A/en not_active Expired
- 1982-04-07 GB GB08210268A patent/GB2118373B/en not_active Expired
- 1982-04-08 AU AU82498/82A patent/AU551505B2/en not_active Ceased
- 1982-04-08 DE DE3213348A patent/DE3213348C2/de not_active Expired
- 1982-04-15 NL NL8201577A patent/NL8201577A/nl not_active Application Discontinuation
- 1982-04-16 US US06/369,181 patent/US4400641A/en not_active Expired - Fee Related
- 1982-04-16 FR FR8206614A patent/FR2525411A1/fr active Granted
- 1982-04-28 JP JP57072516A patent/JPS58192475A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| AT382262B (de) | 1987-02-10 |
| DE3213348A1 (de) | 1983-10-20 |
| AU551505B2 (en) | 1986-05-01 |
| GB2118373B (en) | 1986-04-16 |
| ATA130482A (de) | 1986-06-15 |
| SE452933B (sv) | 1987-12-21 |
| FR2525411A1 (fr) | 1983-10-21 |
| US4400641A (en) | 1983-08-23 |
| FR2525411B1 (US06262066-20010717-C00315.png) | 1984-07-20 |
| AU8249882A (en) | 1983-10-13 |
| CA1182159A (en) | 1985-02-05 |
| NL8201577A (nl) | 1983-11-01 |
| SE8202161L (sv) | 1983-10-06 |
| JPS58192475A (ja) | 1983-11-09 |
| GB2118373A (en) | 1983-10-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE3213348C2 (de) | Piezoelektrischer Motor | |
| DE3500607C2 (de) | Torsionsschwingungs-Ultraschallvibrator sowie Torsionsschwingungs-Piezomotor | |
| EP0306530A1 (de) | Piezoelektrischer motor | |
| DE2530045C2 (de) | Elektrostriktiver Motor | |
| DE3703676C2 (US06262066-20010717-C00315.png) | ||
| EP0313130B1 (de) | Elektrischer Rotations- oder Linearmotor, dessen Läufer mittels Ultraschallschwingungen angetrieben wird | |
| DE3415628C2 (US06262066-20010717-C00315.png) | ||
| DE3213275A1 (de) | Piezoelektrischer motor | |
| DE3852224T2 (de) | Ultraschalltreiberanordnung. | |
| EP3123534B1 (de) | Ultraschallmotor | |
| EP3172826B1 (de) | Ultraschallmotor | |
| DE3635806A1 (de) | Ultraschallvibrator | |
| DE3433768A1 (de) | Piezo-elektrischer motor | |
| WO2015090312A1 (de) | Ultraschallmotor | |
| DE3852822T2 (de) | Ultraschallantriebsanordnungen. | |
| DE3833342A1 (de) | Piezomotor | |
| EP3844866B1 (de) | Ultraschallaktor | |
| DE19909913B4 (de) | Elektromechanische Antriebsvorrichtung | |
| WO1991009428A1 (de) | Schrittmotor zum antrieb eines körpers, insbesondere einer welle, um kleine drehwinkel pro schritt | |
| DE102004044184B4 (de) | Miniaturisierbarer Motor | |
| WO2003036786A2 (de) | Piezoelektrischer antrieb | |
| EP1581992A2 (de) | Verfahren zum Betreiben eines piezoelektrischen Motors sowie piezoelektrischer Motor mit einem Stator in Form eines hohlzylindrischen Oszillators | |
| DE1488698C3 (de) | Elektrische Antriebsvorrichtung, insbesondere Antriebsvorrichtung fur eine kleine mechanische Nutzlast | |
| EP1396012B1 (de) | Piezoelektrischer antrieb | |
| DE3851781T2 (de) | Wanderwellenmotor. |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OM8 | Search report available as to paragraph 43 lit. 1 sentence 1 patent law | ||
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |