DE3206600A1 - FIXING STRUCTURE FOR FIXING OPTICAL FIBERS AND LENSES OF THE GRADIENT TYPE AND METHOD FOR PRODUCING SUCH A FIXING STRUCTURE AND DEVICE WITH SUCH A FIXING STRUCTURE - Google Patents

Description

-πι fixation structure for fixing optical fibers and Lenses of the gradient type and method for producing such a fixation structure and device with such a fixing structure 5

The present invention relates to a fixation structure for fixing optical fibers and lenses a method for producing such a fixing structure and a device with such a Fixation structure.

Optical devices, such as optical connectors, optical switches and the like. currently play in systems or planning for systems for communication technology using optical fibers plays a significant role. Because of this, a variety of devices has been proposed for relevant purposes. For example a device has been proposed in which opposing Ends of optical fibers are moved relative to one another by mechanical means. Such a device however, poses problems in terms of reliability and the light losses in the connection areas. A technique has also been proposed in which, using a gradient type lens (reflective Lens) parallel rays of light obtained from light transmitted through an optical fiber, be directed into the core of an optical fiber. However, this conventional technique requires an expensive one metallic device for connecting the axis in series of the optical fiber with the axis of the gradient lens or for connecting the axes of gradient lenses one after the other. The cascading of the optical fibers with the gradient lens or the gradient lens with the other Gradient lens requires extremely high accuracy. An experimental technique was used to create a to enable exact series connection in which the axis of the optical fiber and the axis of the gradient

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p _F connector should be included
be relatively easy to manufacture.
The gradient-type lens can be made of a translucent

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stand, is provided in such a way that the keyways have sidewalls , v; el "che in i hv ^ bif cTljj ^ Crh (rlriat ^ benen (1" j 1) d-vs silicon single crystal correspond. According to another Aspsirc

Production of such a fixation structure, the implementation of an anisotopopsRgi1 "AÄEsihrittes on the surface 5! @ Before the Si 1 i zium-Einkri stall s in the plane (100) with a WQl? RiBs!; E _s di @ _o edfig 8§fäe ^ iojasti ; nde? iafe? änddÄgh§ei this
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daoei with ei Aedi fitߧC lex, ipns-Jinde ^ e ^ op? i? n * gi yodei aer alka lischen Ätzsab§tBe.zP9S (iit; i «grKons $ i9 $ ef @iind. _rt earth.

The fourth keyway has, which deeply grooved side walls in the planes ("all) have ₅ from one lens

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.cBiedspiel swei se was such an optical connector
proposed in which a precision engineered substrate

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by means of an anisotropic etching technique on the surface of a silicon single crystal. This procedure uses a photo mask which can create grooves with high accuracy, so that there are advantages that a number of these grooves having a V-shaped cross-section with a high accuracy in shape and the positional relationship between the grooves can be established.

An optical multi-core connector has also already been used proposed in which a cross-sectionally V-shaped groove for fixing an optical fiber integrally with an im Cross-section V-shaped groove for a connecting pin is formed on a common substrate to provide an accurate Allow connection between plugs.

In either case, these are conventional devices with Affected disadvantages, for example the way that dust can settle on the end faces of the optical fibers, with a distance between them and thus an increase in the Loss of connection comes about.

The present invention is based on the object of creating a fixation structure that can be connected in series the axis of a gradient type lens with the axis of an optical fiber or the axes of gradient type lenses with extremely high accuracy and in an easy manner, and a method for manufacturing a propose such structure, what structure such

should be such that it can be manufactured at low cost and easily. Further lies the present invention It is an object of the invention to provide an apparatus using such a structure which is lightweight and assemble with good reproducibility.

Another object is the present invention to provide an optical switch or connector that is capable of rotating the axis of the optical fiber with that of the gradient type lens

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with a high degree of accuracy into other switching, wherein Connection losses due to light diffusion are even then avoided be when there is a space between themselves sets opposite ends of the lenses of the connector. The optical switch or connector should be used be relatively easy to manufacture.

According to the objective for the present invention is the fixing structure for fixing the optical fiber and the gradient type lens made of a silicon single crystal the structure having a surface in a plane (100) thereof and having a first keyway and a second keyway communicating with each other is provided such that the keyways are side walls have, which in their planes with planes (111) of the silicon single crystal correspond. According to another aspect of the present invention includes a method for Manufacture of such a fixation structure the implementation an anisotropic etching step on the surface of the silicon single crystal in the plane (100) with a An etching mask having a predetermined template formed thereon. The anisotropic etching process can with an etching substance such as an alkaline one Etching substance or the like. are executed.

In accordance with another aspect for the present Invention consists of a connecting device a fixation structure that has a surface in the plane (100) with first and second keyways which has keyways Side walls in the planes (111) have, from a lens of the gradient type, which with the side walls of the first ■ Keyway, and an optical fiber connected to the sidewalls of the second keyway, the lens and the optical fiber, if necessary, connected to each other at their respective ends are.

In accordance with a further aspect for the present

The invention includes a method of fixing a lens and an optical fiber on such a fixing structure in accordance with the present invention, fixing the gradient lens in the first keyway and the optical Fiber in the second keyway and, if necessary, joining the end portions of the lens and the optical Fiber to each other.

In accordance with another aspect of the present invention, the connector, having the construction of the type briefly described above and described in detail below, is assembled with a part for optical devices.
15th

In the following the invention is based on several, exemplary embodiments for the figures relating to the invention are described in detail.

Fig. 1 shows a perspective view of an embodiment for a substrate structure according to the present invention.

2A and 2B show a plan view and a plan view, respectively Front view of the substrate structure according to FIG. 1.

3A, 4A, 5A, 7A and 8A show, respectively a plan view, which plan views each individually different exemplary embodiments for substrate structures represent according to the present invention.

Fi. 3B, 4B, 5B, 7B and 8B show, respectively a front view of the substrate structure in question according to FIG. 3A, FIG. 4A, FIG. 5A, FIG. 7A or FIG. 8A.

Fig. 6 shows a perspective view of another

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Fig. 18 and others

\ im® & 0t £ nv§gl i®mv4e§iii§iu§4y§9att-fch V & ri arrcen 1 η the construction of a device according to the invention. 9A, tffflg.v8ßaHscfiä8iiSetztz ^ ig (gp each cross-section

sifting through substrate structures, with the individual Fig. 20 zS ^ tiStBedifirötfftte ^^ flndiffrS ^ iiiSiffsgiigifiV ^ Hf according to

shine through a gradient lens and an opti-fi G. 9Cs§ [e§gf agineyiDfByf-ßäßht, which is a pattern that is based on the

Substrate structure according to FIG. 9B is formed, g. 21 z4f ^ ij'§n§ii? Iauäi5tslisiCiTC ₂ the one matrix switch

represents; der die V e r ■> i π d s r - S u b s ΐ r a ΐ structure according to Fig. 10Äe ^ e <jfib] ^ ä'ffr ^ iJ'FiauffiS-iiiMuie.jniedfriiGO-pdpl atte from a

Silicon single crystal for producing the fixation F-ig. 22 z & i§vHMeg§m $> iia- £ ruN§Tlä? Se $ Ue® £ & fäy4NV & ng vsran-

scha u1i ch i ₃ in which a pair ν on G radie η i e η lenses Fig. lO ^ i-ye Μ

_s gjurf | J.ef, s ^ gl ^ inj ^ of the substrate structure according to the present invention are illustrated.

Fig. 23 shows a representation ₃ which shows a construction variant. 1 0ß _R % £ i <g $ r §Λ §§h MW $ i? -3 fh $ sf ^{1 e} cTe i ^s "* f ί Π ^ ί ^ ^Γ # * ί ^u f ο i" r "* c h t # tif§ffl ^ UiSlgrr-a ^ uf ^ nsf ^ fiiiii ^ ef ^^ fittffeiSefi ¹ ^ F ¹ Q · IOC.

FIg. 24 shows a representation ₅ which veraii-

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s§ [| rö <kiHf QSePfc £ ff§t3ί? # Ιΐί ^ ¹ P ⁿ t9mfJfei ^d ief vViVdAgend © ο invention are illustrated.

Fig. 25 shows I ei ηe ρe r sρektiyi schs view, which ei ηeη ο j ti Fig. 11 siieii§ts§ä@^t.Swe-f (S _l eiiin§itft; _t 5.apf _i 3 [? Tht -erf

net , where the optical fibers _a - those with the Fig. 1 2Gszfidtl4ne4ßii iP ^ i? P ^ it | 3iyritfi: Aiesftptf ₉ i cM $ £ rr <£ $

irgeQiiägrfdinvOÜ -V-shaped keyways that are formed in the base plate _{5 are} fixed and where F ig. 1 3bÄ-Bi (§-i; _fl ep ^ e ₅ IQyefjsCjbfirjiyt sg ^^ hrt:, ΚέΦΐ ^ ιίΐ ^e ä

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in which a cross-sectionally V-shaped keyway with

an overlying photoresist layer came about immediately after the completion of the etching step, is illustrated.
5

14A and 14B show a plan view and a plan view, respectively. Fig. 3 is a side view of the substrate structure with a gradient lens and optical fiber in Figs V-shaped keyways in cross section, which are in the Base plate according to FIG. 12 are formed, are fixed.

14C and 14D each show a cross-sectional view, being the states in which the gradient lens and the optical fiber in the cross section V-shaped keyways formed in the base plate are fixed as shown in FIGS. 14A and 14B, respectively are illustrated.

Fig. 15 is a cross-sectional view showing a state is illustrated in which the gradient lens or optical fiber in question in cross section V-shaped keyway formed in the substrate structure according to the present invention is, is fixed.

Fig. 16 is a front view illustrating a state is, in which a pair of the substrate structures are connected to one another such that the im Cross-section of V-shaped keyways together form a cavity that is approximately square in cross-section, in which the gradient lens or the optical The fiber is fi xed.

Fig. 17 is a diagram showing a transmission path for light through the optical fibers and the gradient lenses.

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Fig. 18 and Jig. 19 each show a representation, wherein Variants of the transmission path are illustrated by variants in the construction of a device according to the invention. ■ - **

Fig. 20 is a diagram in which illustrates

will, like laser light rays generated by a laser diode, pass through a gradient lens and an optical fiber.

Fig. 21 is a plan view showing a matrix switch

that shows the connector substrate structure according to FIG of the present invention used.

Fig. 22 is a diagram illustrating an apparatus in which a pair of gradient lenses are interconnected, with a total of three optical fibers are fi xed on the gradient lenses in question.

FIG. 23 is a diagram illustrating a construction variant in which a pair of devices according to FIG. 22 are connected to one another.

FIG. 24 is a diagram illustrating a state in which a plurality of connecting devices with half mirror η are arranged by which half mirror light or light rays are deflected into different transmission paths.

Fig. 25 is a perspective view illustrating an optical switch in which three pairs of gradient lenses and optical fibers are arranged, the optical fibers connected to the Gradient lenses are connected, in respective, V-shaped cross-sectional keyways formed in the base plate are fixed and a prism is mounted in a third keyway

-19-

is, which is designed such that they with the other, in cross-section V-shaped keyways in connection.

FIG. 26 shows a plan view of the optical switch according to FIG. 25.

Fig. 27 is a plan view showing an optical switch

for a computer network or the like. visualized.

Fig. 28 is a cross-sectional view showing a substrate structure in which a keyway has a U-shaped cross section with an optical fiber or a gradient lens that is fixed therein in this way is that it touches the side walls of the keyway, illustrated.

Fig. 29 shows a perspective view of an optical Connector in accordance with the present invention.

30 and 32 each show a plan view illustrating an optical connector employing the Substrate structure according to FIG. 29 is used.

Figure 31 shows a cross-sectional view of the optical connector ders according to FIG. 30.

The substrate structure according to the present invention consists of a base plate made of a silicon single crystal. The silicon single crystal that is used for the base plate is to be produced can be produced in essentially the same way as for the production of silicon

Single crystals for manufacturing silicon wafers for integrated circuits or the like. happens.

The base plate, which is used for the fixation structure according to the

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PrI 9d VeafdiS e / r $ ef iJeiliaitjyseeBpei / te pdenafd etfei SD dPii-it ^ mi / V ^ jWigtiidiUnigszweg-k hsbefischen a first iis cross section V-shaped keyway 14 and a second isn Ouar-Pdi? ^ ift-f © υ ^^ ε ^ ίΐ deisw ^ dMat daiaSiei e

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the lens is bonded or whether it is spaced from the lens, as well as an example may be given, in which when the axis of the optical fiber does not physically correspond to that of the gradient lens, i.e. H. if the axis of the optical fiber does not physically coincide with that of the lens, light or rays of light passing through the optical fiber are transmitted in the axis of another opposing optical fiber in different directions and / or in different transmission paths through one or more lenses of the gradient types in which light or rays of light transmitted by the optical fiber are reflected, concentrated, or focused.

In FIGS. 1 and 2A, 2B, a base plate 10 is made from a silicon single crystal, which has a surface 12 which corresponds with its plane with the plane (100) of the silicon single crystal. The base plate is on theirs Surface with a first keyway 14 and a second Keyway 16 provided in a manner that the first keyway is in communication with the second keyway and that the side walls thereof are aligned in correspondence with the planes (111) of the silicon single crystal. The first and the two te keyways can be V-shaped or U-shaped or any have another suitable shape in cross-section. In This embodiment for the construction of the keyways, the first keyway is formed so that their Axis is precisely aligned with or corresponds to the axis of the second keyway so that the axis of a

SO gradient-type lens to be installed in the first keyway with the axis of the optical fiber inserted in the second keyway is to be attached, exactly aligned one behind the other, as will be described in detail below.

The design and structure of the keyways to be formed in the surface of the base plate may vary according to Application of the substrate structure for a device

vary. For example, Figures 3A up to and including 8A shows a variety of different embodiments for the construction or structure of the keyways.

As shown in Figures 3A and 3B, a first "V" or first V-shaped keyway 14 and a second "V" are or a second V-shaped keyway 16 formed on the surface of the base plate 10 so that the axis of the first keyway is adjacent to the axis of the second keyway.

4A and 4B show another embodiment

for the design and structure of the substrate structure in accordance with the present invention. A first "V" or a first V-shaped keyway 14 is in the middle ren area of the surface 12 of the base plate 10 ausgebil det, and three second "V" or second V-shaped keyways are formed to mate with the first keyway in Connected. The second keyways can be arranged in different ways, for example in such a way that that two of them are optically interconnected by the first keyway so that the axis of one with the Axis of the other is one behind the other.

5A and 5B show another embodiment for the substrate structure according to the present invention. In this embodiment there is a third "V" or a third V-shaped keyway 18 is formed between a first V-shaped cross-sectionally keyway 14 and a second V-shaped cross-sectionally keyway 16 such that the The axis of the third keyway corresponds exactly to the axes of the first and second keyways. The widths and depths of the first, second, and third keyways can be set in falling in this order. Particularly where there is no part for assembling an optical device in accordance with the present invention in the third However, there is no limitation on the shape or size of the third keyway. Be it also noted that the third keyway is outside the

first and / or second keyway and that the width and / or depth of the third keyway varies can be. The third keyway can be composed of a plurality of keyways. 5

FIG. 6 shows another embodiment of the construction of the substrate structure in accordance with FIG present invention in which a first keyway 14 is in the shape of an equiangular semi-trapezoidal cross-section or a square that widens outwards, Has a U-shaped cross-section, d. H. that the keyway is formed so that the side walls 14a of the first Keyway 14 each correspond to the planes (111) of the silicon single crystal and that their bottom region 14b is flat and is oriented parallel to the surface 12 of the base plate •. It should be noted that the second keyway 16 is of course designed in this way may be that it suits an outwardly widening square, U-shaped or any other one th cross-section and that also the shape of the keyways can be varied as long as their side walls correspond to the plane (111) of the silicon single crystal.

In accordance with the present invention, the number of combinations or sets of first and second keyways may vary depending on the purpose of a device, which results from the base plate on which the first and second keyways are formed varies depending thereon will. For example, Figures 7A and 7B show an embodiment of the construction of the keyways in which three pairs of first keyways 14 and second keyways 16 as shown in Figures 1 and 2A and 2B are formed on the surface 12 of a common base plate 10. In this embodiment are six pieces each of a first keyway 14 and a second keyway 16 on the surfaces 12 of base plates 10 educated. Furthermore, two sentences communicate each time of first and second keyways with one another such that

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and second keyway pattern areas 14A and 16A, respectively, as shown in Fig. 16A, and the remainder of the areas where keyways will not be formed remain with initially the layers consisting of the SiO ^ layer 20, the photo lacquer layer 22 and the mask 24 covered.

10A through 10G show another embodiment for forming keyways on the surface a base plate 10 made of a silicon single crystal. As in As shown in Fig. 10A, the base plate for the substrate structure according to the present invention is made by cutting of the silicon single crystal prepared in such a way that a surface 12, which corresponds to the plane (100) thereof, and an orientation flat 10A that coincides with the plane

(110) related to it, arises. Over the entire area of the surface, a layer, namely a Si ^ H layer 26, is used as an etch mark, as shown in Fig. 10B, for example by means of the reduced pressure CVD method (CVD = £ hemica \ ^ apor deposition) by flowing through a gasmi ture of SiK ₂ Cl ₂ and NH ₃ formed by heating the base plate at 75O ⁰ C to 900 C. The etching mask 26 can be formed by different techniques, for example by the plasma CVD method. As shown in FIG. 10C, a photoresist layer 28 is then placed on the etching mask 26 (for example, the trademark "AZ-13050Ü; Shipley CO.) is applied in a conventional manner. The photoresist layer 28 is provided with a photomask 30, as shown in FIG. IOD and FIG is to transmit light, and a stencil area 32B, who is unable to let light through. The photomask 30 contains a reference pattern 34 for positioning the base plate 10, for example such that the orientation flat 1OA of the base plate with the reference pattern is aligned. It can be seen from Fig. 10F that exposing the photoresist layer 28 to light to form a pattern corresponding to the first and second keyways. The pattern formed in this way

is then developed and the stencil area 32A is removed so as to expose the surface of the etch mask 26 in substantial correspondence with a pattern for the first and second keyways and to cover the remainder of the surface of the etch mask with the photoresist layer 28 . The photoresist layer acts as an etch protective layer. The etching is then carried out by means of the plasma etching technique under the action of a high-frequency electric field (for example 13.5 MHz), while for example CF ₄ flows through, with areas of the etching mask 26 being removed in accordance with the openings that are formed on the photoresist layer . The photoresist layer is then removed to leave the etch mask 26 with the predetermined pattern on the base plate. 15th

The base plate 10 having the layer with the predetermined pattern as shown in Fig. 11 is then subjected to anisotropic etching with an etchant such as an alkaline solution such as an aqueous KOH solution or an aqueous NaOH solution. Fig. 11 and Fig. 12 can be seen that the anisotropic etchant the Surface of the silicon single crystal that is exposed to the etchant is exposed to form the keyways, gradually corroded, the side walls of the keyways being in their Corresponding plane with the planes (111) of the silicon single crystal, at a certain angle Θ with respect to the plane (100) thereof are aligned. This anisotropic etching is effected by taking advantage of the effect that the Planes (111) of the silicon single crystal only weakly with the Etching agents are etched so that a difference in the speed of the etching process between the planes (100) and (111) arises. Where the etching is effected to a final stage, it leads to corrosion of the crystal surface at the angle θ to form a keyway having a V-shaped cross section. The etching process continues stop when the V-shaped cross-section is completed. Where the etching in a shorter period of time as it leads to completion, is completed, results

get a keyway with a square, "U" -shaped Cross section, d. H. it creates a keyway with side walls that coincide with the planes (111) of the silicon single crystal an angle Θ with respect to the plane (100) thereof and with a flat bottom surface in the plane (100) thereof correspond, as indicated by dash-dotted lines in Fig. 11 is indicated. This technique allows the etched surfaces to be extremely flat and smooth.

In the anisotropic etching process, an etchant such as 50 mol% hydrazine (N ₂ H.) in an aqueous solution can also be used. After the anisotropic etching process is completely finished, the layer or layers that form the surface of the base plate are in front of a Have protected etching, for example removed by means of a plasma etching technique.

It should be noted that the angle 0, which is in its plane corresponds to level (111) with respect to level (100) dated, constant at 54.74 ° regardless of the depth of the Keyway is observed. If a keyway with a larger cross-section is to be formed, a corresponding stencil area will be placed on top of a photoresist layer or any other layer that adheres to the baseplate is applied, just leave it larger so that it is with corresponds to the intended width of the keyway.

Note, however, that, as shown in Fig. 13, a width 2W of the first or second keyway 14 or 16 is wider than a width 2W 'of the stencil area 14A or 16A. Since the ratio of 2W / 2W remains constant when the etching conditions are set to be constant, the width 2W ¹ · can be set in advance when these conditions are taken into account. In a

^For large-scale production, it is preferable to fix a rod-shaped optical fiber coated with a secondary nylon sheath or the like in the V-shaped keyway of the base plate.

Ϊ hen is.

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high accuracy can be achieved by forming a mask layer by a known technique for forming a thin layer with a pattern, for example a photolithographic Technology as used in the field of manufacturing integrated circuits or the like. developed has been effected.

Where the V-shaped keyway 14 or 16 has a width 2W in the Width direction and side walls at an angle Θ with respect to the surface 12 of the base plate 10 and where the gradient lens 36 is a rod shape or the optical fiber 38 a radius jr and the center a height h [just above of the surface 12 of the base plate, the following relationship applies:

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Since the anisotropic etching of the silicon single crystal acts at a certain angle Θ with respect to the surface of the base plate, W _n becomes 66 microns, where r = 60 microns and h _Q = 10 microns. if
r = nr _Q = 7.5 χ 60 = 450 microns, W _{giving h Q} = 10 is 542 microns. From this it can be seen that where the juxtaposition of the lens, which has a radius of 0.9 mm, is carried out with the optical fiber, which has a radius of 120 microns, with its axes at a height of 10 microns just above the surface the base plate are located. The masking on the base plate is effected so that a stencil area 1.084 microns wide for the first keyway and 132 microns wide for the second keyway.

hen is.

When h = 0, two base plates 10, which have an identical shape and size, are connected to one another in such a way that the keyways thereof, which are V-shaped in cross-section, are closed are aligned with each other, and the gradient lens 36 and the optical fiber 38 are fixed in the opening in a rhombic cross section of the two keyways, as shown in FIG Fig. 16 is shown.

The connection devices according to the present invention can be used, for example, in the field of micro-optics used for optical communication systems. As in 17 to 19, for example, an incoming trending light 42A passing through a first optical fiber 38A is converted into parallel rays 42B in a gradient type lens 36A of 1/4 period step length, and the parallel rays are transmitted to a second, opposed, gradient-type lens 36B. In of the second lens to which the parallel rays from the first lens are transmitted, the parallel rays become a single ray 42C into an optical fiber 38B associated with the second lens is focused. The light or beam of light 42C then passes over the two te optical fiber 38B is transmitted to a desired location. As shown in FIG. 18, a half mirror 44 may be positioned between a first lens 36A and a second lens 36B, which are the facing first lens. With the half mirror, the parallel rays coming from the first lens, deflected at a predetermined angle of reflection in a different direction, and then received by a third lens 36C, wherein they are further transmitted as a single light or as a single light beam through an optical fiber 38C. That

Light or the rays of light that have a wavelength which is different from that of the light or rays of light reflected from the half mirror occur through this and become lens 36B and then

to the optical fiber 38B. This construction of a combination of gradient lenses and optical fibers can be used as a T-coupler. As also shown in Fig. 19, a number of light retardation plates ten, such as metal 1-layer filter, between them opposing lenses 36A and 36B may be arranged. With this construction there is light or rays of light, which are transmitted to an optical fiber 38A through lens 36A and the light retardation plates (indicated generally at 46) to lens 36B and opti cen fiber 38B is transmitted in substantially the same manner as shown in FIG.

Fig. 20 shows that a connecting device can be made that includes a base plate 10 having a first keyway 14 and a second keyway 16 with a gradient type lens 36; and an optical fiber 38, which elements are connected to the first and second, respectively Keyway connected has. In this embodiment '20 for constructing the substrate structure in accordance with the present invention is a third keyway 18 between the first and second keyways 14 and 16, respectively, and lens 36 is not directly connected to optical fiber 38 tied together. This construction also allows light or light rays to be transmitted efficiently. A light emitting diode or laser diode 50 can be used as a light source or as a source of laser rays.

In Fig. 21, a matrix switch is shown in which the substrate structure is four sets, each consisting of a lens 36 of the gradient type and an optical fiber 38 fixed in alignment with each other on the base plate 10 and are connected to a matrix of switching elements 50,

contains.
35

Fig. 22 shows an apparatus including a substrate structure according to Figs. 6A and 6B in which a gradient lens 36D is located in the first keyway 14 via a half mirror

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Light wave having a wavelength λ_ is transmitted into the gradient lens 361 via the optical fiber 381. the second single light wave is reflected by half mirror 52B and with the third single light wave that passes through the half mirror 52B, combined. That combined light is then transmitted from lens 36H into gradient lens 36G and through half mirror 52A reflected. The mixed light reflected by the half mirror 52A becomes single light with the first wave which passes through the half mirror 52A is combined and then transmitted into a fourth optical fiber 38J as a mixed light having the wavelengths λ 1, X “ and λ. This structure can be implemented with a multiple internally reflective device in a relatively simple manner be assembled.

Fig. 24 shows a device which has three sets of each connecting device with half mirrors arranged in a transmission path for light or light rays are. This device is constructed in such a way that light or light rays having wavelengths λ, λ υ.λ., and pass through gradient lenses 36K, 36L and 36M from optical fibers 38K, 38L and 38M, through half mirrors 52A, 52B and 52C are reflected according to their wavelengths and through a gradient lens 36P into an optical Fiber 38P are transmitted, and that a fourth light beam, which has a wavelength λ. has which by a Gradient lens 36N from an optical fiber 38N passes through half mirrors 52A, 52B and 52C into the lens 36P and the optical fiber 38P are transmitted. Conversely, mixed light rays, the wavelengths λ., Λ, λ u. λ ^ and through lens 36P from the optical fiber 38P are transmitted into the lenses 36K, 36L, 36M and 36N as individual light waves that have the wavelengths λ ,, ^ 2 '* 3 b ^zw "* 4 ^naDen .> Are separated from each other. The light rays, which have the wavelengths λ., Λ and λ_, are separated accordingly and transmitted through the mirrors 52A, 52B and 52C, and the light , which is the wavelength λ.

is entered directly through the device into lens 36N and optical fiber 38N, as indicated by arrows in FIG dash-dotted lines in Fig. 24 is indicated, transferred.

Fig. 25 and Fig. 26 show an optical switch composed of three sets of gradient lenses (indicated generally at 36) and optical fibers (indicated generally at 38). The lenses 36 are in the first keyways (generally designated 14) fixed, and the optical Fibers 38 are fixed in second keyways (indicated generally at 16). The base plate 10 is also with a third keyway 18, the side walls 18A, which correspond to the planes (111) of the silicon single crystal, and a flat bottom portion 18B parallel to the surface of the base plate. The third Keyway is with a switching means, for example one straight prism 54 is provided. As shown in Fig. 26, light or rays of light entering the optical fiber 38Q can be transmitted through the gradient type lens 36Q to the prism 54, which is the direction of the light in an opposite direction, namely at an angle of 360 °, through a double reflection can change at a right angle and the double reflected light to an adjacent lens 36R and one optical fiber 38R connected thereto. When the prism 54 moves to different locations is, for example, as shown by dash-dotted lines in 26, indicated, the light transmitted to the optical fiber 38Q and the lens 36Q can be twofold Reflection can be transmitted by the prism 54 in an opposite direction at an angle of 360 °. That Light is then passed through lens 36S, for example optical fiber 38S transmitted.

In Fig. 27 is an optical switch for a computer network or the like. shown the four sets of gradient lenses 36T through 36W inclusive and optical fibers 38T through

38W including and a pair of mirrors 56A and 56B contains. The lenses and optical fibers are in their respective first keyways (indicated generally at 14) and fixed in the respective second keyways (indicated generally at), and the mirrors are in a third Keyway 18 mounted, the plate 10 in the central region of the base is formed such that it is with the first and second keyways. In the optical switch of this type, light passing through the optical Fiber 38T and lens 36T being transmitted, reflected twice by mirror 56A at an angle of 90 °. The reflected light goes into lens 36U and optical fiber 38U and then into an optoelectronic transducer 58 and a connection station 60 are transmitted. The signal will then transferred to an electro-optic converter 62 and in Light converted, which is subsequently transmitted into the optical fiber 38V and the lens 36V. The light that comes from the Lens 36V is transmitted is then reflected twice at an angle of 90 ° by mirror 56B and then transmitted into lens 36W and optical fiber 38W. Of the A computer network or the like using an optical switch as shown in Fig. 27 allows signals to be transmitted by means of an optical fiber from a central station to a plurality of substations or connection stations. A conventional computer network or the like with a closed loop system must stop operating if one or more substations become defective. The optical switch of the type like him shown in Fig. 27, the disadvantages posed by

³ ^ a conventional computer network or the like. Avoid. For example, where a system including optical fiber 38U and lens 36U is disrupted, mirrors 56A and 56B can be moved away to provide a path for the light to direct the light from lens 36T can be transferred to lens 36W.

In Fig. 28, a base plate 10 is shown having a keyway 14 or 16 with side walls 14A or 16A that correspond to the correct

sponding to the planes (111) of the silicon single crystal are inclined, and with a bottom portion 14B or 16B that is flat and parallel to the surface of the base plate is aligned, has. In the first or second keyway 14 or 16 is a gradient type lens 36 or a optical fiber 38 is fixed in such a way that the lens or optical fiber is in 1line contact with the Sidewalls 14A or 16A stands, with the bottom area no contact with the lens or the optical fiber.

In FIGS. 29 to 32 inclusive there is an optical one Connectors are shown each comprising a rod-shaped optical fiber, a gradient-type lens, and a jacketed optical fibers fixed in corresponding keyways formed on the silicon single crystal base plate. As best seen in Fig. 29 can be seen, the base plate 10 is provided with a predetermined number of first keyways 14 for the lenses, from two th keyways 16 for the rod-shaped optical fibers and third keyways for the jacketed optical fibers and fourth keyways 64 for connecting the Base plate provided with another base plate. In Fig. 30 and Fig. 31 there is shown an optical connector, which is constructed so that the base plate 10 the Has structure as previously described and is provided with lenses 36 of the gradient type, which are shown in FIGS first keyways 14 are fixed, the rod-shaped 'optical fibers 38 in respective second keyways 16 are fixed, and the covered optical fibers 66 are fixed in respective third keyways 18. The respective keyways 14, 16 and 18 are designed in such a way that that they communicate with one another - and that their axes are in series with one another. In this embodiment, the Keyways as "U" -shaped, widening outwards Keyways formed. It should be noted, however, that the shape of these keyways is not limited to how has already been explained earlier.

Fig. 32 shows an apparatus in which a pair of optical connectors shown in Fig. 30 and Fig. 31 having gradient type lenses 36 are connected to each other are related to each other. The optical connectors can be arranged by arranging a common connecting pin 68 in the fourth keyway 64, which is usually on both Sides of the base plate 10 is formed, and by inserting the pin into a cover plate (not shown) to fix the two end regions of the pin and the base plates with screws (not shown) or any other suitable means. It is also possible to mount a cover plate (not shown) and an opening between the bottom te this cover plate and the relevant keyway of the To form the base plate, into which a common connecting pin is inserted and secured with a spring (not shown) is fixed. The free end region of the connecting pin can be inserted into another opening made by another reason plate and another cover plate is formed, turned that are connected to each other in the same way.

The present invention allows simplification of the A substrate structure for fixing and connecting an optical fiber to a gradient type lens with high accuracy and easily. The use of a conventional technique of forming a stencil thin layer to form keyways on the base plate from a silicon single crystal allows a highly accurate and easy arrangement of keyways in which the optical fibers and the gradient lenses are fixed. These advantages afforded by the present invention also allow the substrate to be assembled with other parts for an extremely high optical device Accuracy and in an easy way.

The patent attorney

U / tU

Claims (1)

Dipl.-Ing. H. MITSCHERLICH * D-8000 MÖNCHEN 22 Dipi. -I ng. K. GUNSCHMANN Steinsdorfstrasse 10 Dr.rer.nat. W. KÖRBER ^ ^{(089) '29} " ⁸⁴ Dipl.-Ing. J. SCHMIDT-EVERS
PATENT LAWYERS February 24, 1982 Nippon Sheet Glass Co., Ltd.
8,4-chome, Doshomachi, Higashi-ku,
Osaka,
JAPAN Expectations: 1. Fixation structure for fixing optical fibers and Lenses of the gradient type, characterized in that a base plate (10) made of a silicon single crystal is provided which has a surface (12) which is in its plane with a plane (100) of the silicon single crystal corresponds, as well as a first keyway (14) and a second keyway (16), which in the surface (12) are designed in such a way that they have side walls (14a or 16a) have which with planes (111) of the silicon single crystal correspond, has that the first keyway (14) is formed to be a lens (36) of the gradient type by its side walls (14a) can fix, and that the second keyway (16) is formed such that it is a optical fiber (38) can fix through its side walls (16a). 2. Fixation structure according to claim 1, characterized g e mark It is ensured that the first keyway (14) differs in width and depth from the second keyway (16). det. 3. Fixation structure according to claim 1 or 2, characterized gekennzei chnet that the first keyway (14) and the second keyway (16) each have a V-shaped or a square that widens outwards, Have a U-shaped cross-section. -Z- 4. Fixation structure according to claim 1 or 2, characterized characterized in that the first keyway (14) is formed so that its cavity is flush with the cavity communicates with the second keyway (16). 5. Fixation structure according to claim 3, characterized in that g e - k e η η ζ e i c h η e t that the first keyway (14) such is designed that its cavity is in communication with the cavity of the second keyway (16). IO 6. Fixation structure according to claim 1 or 2, characterized characterized in that the first keyway (14) is formed so that its axis is either exactly on the axis of the second keyway (16) is aligned, or does not match this. 7. Fixation structure according to claim 3, characterized in that that the first keyway (14) is formed such that its axis is either exactly on the axis or not aligned with the second keyway (16) this agrees. 8. Fixation structure according to claim 4, characterized in that g e - k e η η ζ e i c h η e t that the first keyway (14) such is designed that its axis is either precisely aligned with the axis of the second keyway (16) or not with this matches. 9. Fixation structure according to claim 1 or 2, characterized gekennzei chnet that the first keyway (14) and the second keyway (16) is formed such that their side walls (14a and 16a) in a 1-line shape Contact with the peripheral surface of the gradient type lens (36) or the optical fiber (38). 10. Fixation structure according to claim 3, characterized in that - k e η η ζ e i c h η e t that the first keyway (14) or the second keyway (16) is formed such that their Side walls (14a or 16a) in a linear contact with the peripheral surface of the gradient type lens (36) or the optical fiber (38). 11. Fixation structure according to claim 4, characterized in that the first keyway (14) or the second keyway (16) is formed such that its side walls (14a and 16a, respectively) are in linear contact with the peripheral surface of the gradient type lens (36) or the optical fiber (38). 12. Fixation structure according to claim 6, characterized in that the first keyway (14) or the second keyway (16) is formed such that its side walls (14a and 16a, respectively) are in linear contact with the peripheral surface of the gradient type lens (36) or the optical fiber (38). 13. Fixation structure according to claim 1 or 2, characterized 20 indicated that the surface (12) of the silicon single crystal is provided with a third keyway (18) is. 14. Fixation structure according to claim 13, characterized in that g e k e η η ζ e i c h η e t that the third keyway (18) in a plurality is provided. 15. Fixation structure according to claim 13 or 14, characterized g e k e η η ζ e i c h η e t that the third keyway (18) is designed such that its cavity with the cavity of the first keyway (14) and that of the second keyway (16) in Connection. 16. Fixation structure according to claim 13 or 14, characterized characterized in that the third keyway (18) has a V-shaped or U-shaped cross section. 17. Fixation structure according to claim 15, characterized in that 206600 _e ("Ή8 J ₁ e-inen r I: s Vie% ^ ^ ii & rftil era chU röftr ifcitg & n 7QiMD ^ CS§h% i fct) Qh ⁰ ^ t during a Durc h tri 11s of gases " consisting of SiH" C1 "and NK ₀ , through gelf ^ iiirliW ^ W ¹ Qs structure according to claim 13 or 14, characterized that the third keyway (18) p ^ g, e% au on de η & r s, t ^ n _e K% i \ η uj% β (Tj ^ ^ i ^ dj / i (^ r ιά ^ A ^ hrsend, ^ _e ( _s Ir ^) _{1 is} aligned or not with the- elite
ser / these match. 26. The method according to claim 23 or 24, characterized in that l < ⁹ e fti ^ i first keyway (14) and / or the axis of the second keyway (16) is aligned or not with this / the ?? ni $ l & S-iF% i #% toiWB ¹ Ih claim 2 5, characterized geke η η denotes that the Layer (20} by chemical 2: 0) g: e§i hr% dk% u ^ r ^ dhr <er ^ el n ^ Pl ts ^ i ^ 4, ei ^ ajrt is formed that their side walls (18A) are in linear contact with the circumferential surface the z ^ fiddi ^ r.opli deepened ^ as _; er (38) t> Pj | e ^ B ^ BOSe ₁₁ {3% \ _s ugd ^ or n ^are · l 5 _{ZW #} ^ er optical fiber (38) stand or from contact with the lens (36) and / or fftin ^ .e _{ken fi} . ζ eich η et _s that the chord according to (6) mi 11 & 1 ε oer ^ i _S ^ t ^ r ^ tfigsstff ^ ttf ^ _c ftfi? b fiQPBR ^ Früh ^ t ^d J ^ a ^rch 9 e indicates that the third Keyway (18) der- ^^^ Wh ^nd % ^ ¹ ^^>, n _r evner n, i qn ^ ör ^ m ^ ge.n _t Ber t ^ l ^ iQUq, ^ _r ra ^% ₂ 4% *? · 9Mi ¹ R ^ a «ih9 -δ-se (36) of the gradient type or the optical fiber (38) or are kept free from contact with the lens (36) and / or the optical fiber (38). 23. A method of manufacturing a fixation structure for fixing a gradient type lens and at least one optical fiber, g e k e η η ζ e i c h η e t by the following Steps: Π) Forming a SiO ^ layer (20) for the manufacture of one Etching mask on the surface (12) of a base plate (10) made of a silicon single crystal, the surface (12) is designed such that it corresponds to a plane (100) of the silicon single crystal; (2) Form a photoresist layer (22) on the surface the later etching mask, namely the SiO ^ layer (20); (3) Forming a photomask (24) on the surface of the photoresist layer (22), which photomask (24) has a predetermined one Template (32) with a template area (32B) which is translucent and with a template area (32A), which is opaque, represents; (4) Exposing the photomask (24) to light rays and developing the template (32); (5) Remove the opaque area of the stencil (32A) from the photomask (24) and the photoresist layer (22); (6) Etching the base plate (10) with the template (32) to form keyways (14,16), the side walls (14a, 16a) in a plane (111) with respect to a plane (100) of the base plate (10); and if necessary (7) removing the remainder of the photoresist layer (22) from the Base plate (10). -δι 24. The method according to claim 23, characterized in that the step according to (1) in a temperature range of about 750 ⁰ C to 90O ⁰ C during a passage of gases consisting of SiHpClp and NH ₃ , is carried out. 25. The method according to claim 23 or 24, characterized in that - ke η η ζ calibrate η et that the layer (20) consists of a Si ₃ N ₄ layer. 26. The method according to claim 23 or 24, characterized in that the layer (20) by chemical Vapor deposition (CVD = Chemical V ^ apor Reposition) with reduced Pressure or formed by a plasma CVD technique will. 27. The method according to claim 25, characterized in that the layer (20) by chemical Vapor deposition (CVD = Chemical V ^ apor Reposition) with reduced Pressure or formed by a plasma CVD technique will. 28. The method according to claim 23, characterized in that the step according to (5) by means of Plasma etching technique is carried out. 29. The method according to claim 28, characterized in that the step according to (5) by means of Plasma etching technique under the action of a high frequency electric field is carried out during a passage of CF. gas. 30. The method according to claim 23, characterized in that g e k e η η - ζ e i c h η e t that the step according to (6) by means of the anisotropic etching technique is carried out. 31. The method according to claim 30, characterized in that the etching process by means of an alkaline -7-see solution is carried out. 32. The method according to claim 31, characterized in that the alkaline solution is an aqueous one NaOH solution or an aqueous KOH solution. 33. Process for the production of a fixation structure for Fixing a lens of the gradient type and at least one optical fiber, marked by the following following steps: (1) cutting a silicon single crystal along its plane (100) to obtain a base plate (10), and
Polishing a plane surface (12) lying in the plane (100); (2) Application of an SiO ₂ layer (26) to the surface
(12); (3) Applying a layer of photoresist (28) to the surface the SiO ^ layer (26); (4) producing an etching mask (30) having a predetermined
Stencil (32) on the surface of the photoresist layer (28); (5) Exposing the etching mask (30) and removing it
exposed areas (32A); (6) Removal of the area of the SiOp layer (26), which is with the exposed area (32B) of the etching mask (30) corresponds; (7) Etching of the base plate (10) using the resulting
Template (32) to at least one keyway (14 and / or 16) to form the side walls (14a and / or 16a) with a plane (111) in relation to the plane (10Ü) corresponding planar surface (12) of the basic --0-ti ll 2 epilaltie i IcS) th ^ bcemß; «Tosdwefiatlelv ^ ererefW-d ^ Llii'cfischa 1 ter is provided for the fixation structure which the L in se (36) (tSr) d Eiiitifeitrtnteyic d« eisn φ. esrtfeiss «d & r isei © | r-sfc ¥ i" t ^ 26 _; ). ^ i ΐ e "< ^iier M atr iχ νon Schalte! erneηten (50) νe rbi η ti e ί. 34. The method according to claim 33, characterized in that the step according to (6) is carried out by treatment with hydrofluoric acid. 35. The method according to claim 33, characterized in that g e k e η η 10ο ζ e i c h η e t that the step according to (7) by means of a anisotropic etching process is carried out. 36. The method according to claim 35, characterized in that the etching process by means of an alkaline 1§5 see solution is carried out. 37. The method according to claim 36, characterized in that g e k e η η zei Calculates that the alkaline solution is an aqueous NaOH solution or an aqueous KOH solution. 38. Device, characterized in that a fixation structure is provided which includes a lens (36) of the gradient type and at least one optical fiber (38) can fix that the fixation structure for a basic 2Ei5platte (10) made of a silicon single crystal with one surface (12), which coincides with the plane (100) of the silicon single crystal corresponds and a first keyway (14) and has a second keyway (16) which keyways on the surface (12) are formed so that they side walls 3Q0de (14a or 16a) that coincide with planes (111) of the silicon single crystal correspond that the lens (36) is fixed on the side walls (14a) of the first keyway (14) and that the optical fiber (38) is fixed on the side walls (16a) of the second keyway (16). 39. Apparatus according to claim 38, characterized in that the lens (36) of the gradient type with the optical fiber (38) is connected in such a way that the axis 320G600 se of the lens (36) with the axis of the optical fiber (38) corresponds. 40. Apparatus according to claim 38, characterized in that g e k e η η ζ e i c h η e t that the lens (36) of the gradient type with the optical fiber (38) is connected so that the axis of the lens (36) does not coincide with the axis of the optical fiber (38) matches. 41. Apparatus according to claim 38, characterized in that a third keyway (18) is formed on the surface (12) of the base plate (10) so that its cavity coincides with that of the first keyway (14) and with that of the second keyway (16) in connection is, and that a means for switching the transmission path for light or light rays from the optical Fiber (38) and then transmitted from the gradient type lens (36) is provided, this Means is mounted within the third keyway (18). 42. Apparatus according to claim 41, characterized in that the means for transmitting light or light rays from a prism (54) or a half mirror (44, 52) exists. 43. Apparatus according to claim 38, characterized in that a combination or association with or to an additional set or more additional sets of fixation structures is provided on which Lenses (36) and optical fibers (38) are fixed so that light passes from one set of the fixing structure to the other Sentence or to the other sentences by switching the transmission path for the light or the light rays in themselves opposite directions or in different directions Because of is to be transferred. 44. Apparatus according to claim 38, characterized in that g e k e η η - z e i c h η e t that a matrix switch is also provided can be seen of the fixation structure that holds the lens (36) and carrying at least one optical fiber (38) connecting to a matrix of switching elements (50).