DE3168240D1 - High pressure plasma hydrogenation of silicon tetrachloride - Google Patents

High pressure plasma hydrogenation of silicon tetrachloride

Info

Publication number
DE3168240D1
DE3168240D1 DE8181901232T DE3168240T DE3168240D1 DE 3168240 D1 DE3168240 D1 DE 3168240D1 DE 8181901232 T DE8181901232 T DE 8181901232T DE 3168240 T DE3168240 T DE 3168240T DE 3168240 D1 DE3168240 D1 DE 3168240D1
Authority
DE
Germany
Prior art keywords
high pressure
silicon tetrachloride
pressure plasma
plasma hydrogenation
hydrogenation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8181901232T
Other languages
German (de)
Inventor
Kalluri Ramulingsuwara Sarma
Murray John Rice
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/148,094 external-priority patent/US4309259A/en
Application filed by Motorola Inc filed Critical Motorola Inc
Application granted granted Critical
Publication of DE3168240D1 publication Critical patent/DE3168240D1/en
Expired legal-status Critical Current

Links

DE8181901232T 1980-05-09 1981-04-06 High pressure plasma hydrogenation of silicon tetrachloride Expired DE3168240D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/148,094 US4309259A (en) 1980-05-09 1980-05-09 High pressure plasma hydrogenation of silicon tetrachloride
PCT/US1981/000462 WO1981003168A1 (en) 1980-05-09 1981-04-06 High pressure plasma hydrogenation of silicon tetrachloride

Publications (1)

Publication Number Publication Date
DE3168240D1 true DE3168240D1 (en) 1985-02-28

Family

ID=26764457

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8181901232T Expired DE3168240D1 (en) 1980-05-09 1981-04-06 High pressure plasma hydrogenation of silicon tetrachloride

Country Status (1)

Country Link
DE (1) DE3168240D1 (en)

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee